Production of laser-heated plasma in high- pressure Ar gas and emission characteristics of vacuum ultraviolet radiation from Ar2 excimers |
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| Authors: | H Tanaka A Takahashi T Okada M Maeda K Uchino T Nishisaka A Sumitani H Mizoguchi |
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| Institution: | (1) Kyushu University, Fukuoka 812-8581, Japan, JP;(2) Research Division, Komatsu Ltd., Hiratsuka 254-8567, Japan, JP;(3) Research Division, Gigaphoton Inc., Hiratsuka 254-8567, Japan, JP |
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| Abstract: | A new pump scheme for the realization of a practical Ar2 excimer laser operating at 126 nm has been proposed and investigated experimentally. In this scheme, pre-ionized high-pressure
Ar gas was excited by an intense transversely-excited atmospheric (TEA) CO2 laser irradiation. A 100-mm-long line plasma was successfully produced at an argon gas pressure of 2 MPa. The vacuum ultraviolet
emission at 126 nm from the Ar2 excimers was observed and its emission characteristics were investigated under various experimental conditions.
Received: 10 December 2001 / Published online: 14 March 2002 |
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| Keywords: | PACS: 33 20 Ni 42 55 Lt 52 50 Jm |
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