Thin films of magnesium oxide prepared by plasma-enhanced chemical vapour deposition |
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| Authors: | Yu-Wen Zhao H Suhr |
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| Institution: | (1) Department of Organic Chemistry, University Tübingen, Auf der Morgenstelle 18, W-7400 Tübingen, Germany |
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| Abstract: | Thin films of magnesium oxide have been deposited on glass, quartz, stainless steel, and nickel by plasma enhanced chemical vapour deposition using 2,2,6,6-tetramethyl-heptanedionato-3,5-magnesium(II) (Mg(thd)2) as precursor. The films show (100)-orientation when deposited at temperatures  673 K. The influence of experimental parameters on deposition rate and film properties has been studied.On leave from the Beijing Solar Energy Research Institute, Beijing, China |
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| Keywords: | 81 15 Gh 52 90 +z 68 55 -a |
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