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Vertically aligned carbon nanotube based electrodes: Fabrication, characterisation and prospects
Authors:F Javier del Campo  J García-Cspedes  F Xavier Muoz  E Bertrn
Institution:aInstituto de Microelectrónica de Barcelona IMB-CNM-CSIC, Esfera UAB, Campus Universitat Autónoma de Barcelona, 08193 – Bellaterra, Barcelona, Spain;bFEMAN group, IN2UB, Universitat de Barcelona, Martí i Franquès 1, E-08028 Barcelona, Spain
Abstract:We present a methodology to fabricate carbon nanotube based electrodes using plasma enhanced chemical vapour deposition. The metal catalyst nanoparticles used to promote nanotube growth are removed using a water plasma treatment in combination with an acid attack. The final integrated microelectrode-based devices present excellent electrocatalytic properties that make them suitable for electrochemical applications. The presented methodology enables the construction of highly regular and dense vertically aligned carbon nanotube (VACNT) forests that can be confined within the patterned bounds of a desired surface. These VACNT electrodes display very low capacitive currents and are amenable to further chemical modifications.
Keywords:Vertically aligned carbon nanotubes  VACNT  PECVD  Modified electrodes  Microelectrodes  Thin film electrodes
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