双输入轴微机械陀螺仪的研究与进展

微机械陀螺仪是微机电系统（MEMS）研究的重要内容。双输入轴微机械陀螺仪可最大限度地发挥微结构的固有功能并实现最低成本。本综合了国内外在这方面的主要研究报道，概述各自的结构、工艺、测试和性能特点，以展示双输入轴微机械陀螺仪的发展历史与研究现状。

Development and Progresses in Micromachined Dual Input Axis Gyroscopes

Owing to their advantages in miniaturization, cheapness, batch fabrication and high volume of civil and military applications, micromachined gyroscopes are of the most attractive MEMS devices. Micromachined dual input axis gyroscopes have made the best use of inherent functions of the microstructures and therefore can reach the lowest cost. This paper summarizes the vast majority of publications on this subject, presents the respective characteristics of microstructures, fabrication processes, tests and performances. Hence the development and status on micromachined dual input axis gyroscopes are outlined.