Fabrication of nanostructured silicon by metal-assisted etching and its effects on matrix-free laser desorption/ionization mass spectrometry |
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| Authors: | Chen W Y Huang J T Cheng Y C Chien C C Tsao C W |
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| Institution: | aDepartment of Chemical & Materials Engineering, National Central University, Jhongli, Taiwan;bDepartment of Mechanical Engineering, National Central University, Jhongli, Taiwan;cDepartment of Medical Research, Cathay General Hospital, Taipei, Taiwan;dInstitute of Biomedical Engineering, National Central University, Jhongli, Taiwan;eSchool of Medicine, Fu Jen Catholic University, Taipei, Taiwan;fDepartment of Anesthesiology, Sijhih Cathay General Hospital, Sijhih City, Taipei, Taiwan |
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| Abstract: | A matrix-free, high sensitivity, nanostructured silicon surface assisted laser desorption/ionization mass spectrometry (LDI-MS) method fabricated by metal-assisted etching was investigated. Effects of key process parameters, such as etching time, substrate resistance and etchant composition, on the nanostructured silicon formation and its LDI-MS efficiency were studied. The results show that the nanostructured silicon pore depth and size increase with etching time, while MS ion intensity increases with etching time to 300 s then decreases until 600 s for both low resistance (0.001–0.02 Ω cm) and high resistance (1–100 Ω cm) silicon substrates. The nanostructured silicon surface morphologies were found to directly affect the LDI-MS signal ion intensity. By characterizing the nanostructured silicon surface roughness using atomic force microscopy (AFM) and sample absorption efficiency using fluorescence microscopy, it was further demonstrated that the nanostructured silicon surface roughness was highly correlated to the LDI-MS performance. |
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| Keywords: | Abbreviations: LDI laser desorption/ionization MS mass spectrometry ESI electrospray ionization MALDI matrix-assisted laser desorption/ionization DIOS desorption/ionization on silicon D/I desorption/ionization FE-SEM field emission scanning electron microscope AFM atomic force microscope |
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