| m面蓝宝石上外延（110）取向立方MgZnO薄膜及其日盲紫外探测器件研究 |
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| 引用本文： | 郑剑,张振中,张吉英,刘益春,王双鹏,姜明明,陈星,李炳辉,赵东旭,刘雷,王立昆,单崇新,申德振.m面蓝宝石上外延（110）取向立方MgZnO薄膜及其日盲紫外探测器件研究[J].发光学报,2014,35(6):678-683. |
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| 作者姓名： | 郑剑 张振中 张吉英 刘益春 王双鹏 姜明明 陈星 李炳辉 赵东旭 刘雷 王立昆 单崇新 申德振 |
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| 作者单位： | 1. 发光学及应用国家重点实验室中国科学院长春光学精密机械与物理研究所, 吉林长春 130033;
2. 中国科学院大学, 北京 100049;
3. 东北师范大学先进光电子功能材料研究中心, 吉林长春 130024 |
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| 基金项目： | 国家重点基础研究发展计划(2011CB302006, 2011CB302002); 国家自然科学基金(11134009, 61376054, 11174273, 11104265, 61177040)资助项目 |
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| 摘 要： | 由于在日盲紫外探测方面的应用前景，具有合适带隙的MgZnO合金半导体薄膜受到越来越多的关注。获得具有择优取向的单一相MgZnO对提升MgZnO基日盲紫外探测器性能至关重要。本文利用低压金属有机化学气相沉积（LP-MOCVD）方法在m面蓝宝石衬底上制备了一系列不同组分的MgxZn1-xO薄膜。光学和结构特性测试结果表明：Zn摩尔分数达到55%的Mg0.45Zn0.55O薄膜依然是单一立方相，其光学带隙可以达到4.7 eV。立方岩盐结构MgZnO与m面蓝宝石衬底的外延结构关系为（110）MgZnO‖（1010）sapphire、001]MgZnO‖1210]sapphire和110]MgZnO‖0001]sapphire。唯一确定的面内取向有利于薄膜晶体质量的提高。基于（110）取向立方相Mg0.45Zn0.55O薄膜制备金属-半导体-金属（MSM）结构器件，获得了光响应峰在260 nm、光响应截止波长278 nm的日盲紫外探测器。
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| 关 键 词： | 立方MgZnO （110）取向 日盲紫外探测器 MOCVD |
| 收稿时间： | 2014/3/3 |
Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors |
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| ZHENG Jian,ZHANG Zhen-zhong,ZHANG Ji-ying,LIU Yi-chun,WANG Shuang-peng,JIANG Ming-ming,CHEN Xing,LI Bing-hui,ZHAO Dong-xu,LIU Lei,WANG Li-kun,SHAN Chong-xin,SHEN De-zhen.Epitaxial (110)-oriented Cubic MgZnO Films on m-plane Sapphire for Solar-blind UV Photodetectors[J].Chinese Journal of Luminescence,2014,35(6):678-683. |
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| Authors: | ZHENG Jian ZHANG Zhen-zhong ZHANG Ji-ying LIU Yi-chun WANG Shuang-peng JIANG Ming-ming CHEN Xing LI Bing-hui ZHAO Dong-xu LIU Lei WANG Li-kun SHAN Chong-xin SHEN De-zhen |
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| Institution: | 1. State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2. University of Chinese Academy of Sciences, Beijing 100049, China;
3. Center for Advanced Optoelectronic Functional Materials Research, Northeast Normal University, Changchun 130024, China |
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| Abstract: | A series of MgxZn1-xO alloy films were grown on m-plane sapphire by low-pressure metalorganic chemical vapor deposition (LP-MOCVD). Optical and structural characterizations indicated that the films with Zn mole fraction up to 55% are single-cubic-phased, and the optical bandgap of Mg0.45Zn0.55O film is 4.7 eV. The epitaxial JP2]relationships between substrate and rocksalt MgZnO layers were determined as (110)MgznO‖(1010)sapphire,001]MgZnO‖1210]sapphire, and 110]MgZnO‖0001]sapphire. The fixed uniform orientation of the films was accompanied by an improvement in crystal quality. A metal-semiconductor-metal structured solar-blind ultraviolet detector fabricated on Mg0.45Zn0.55O film showed a response peak at 260 nm and a sharp cutoff at 278 nm. |
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| Keywords: | cubic MgZnO (110)-oriented solar-blind UV photodetectors MOCVD |
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