Giant Temperature Coefficient of Resistance in ZnO/Si （111） Thin Films

Giant negative temperature coefficient of resistance （TCR） was observed in ZnO/Si （111） thin films. The films were grown using the pulsed laser deposition （PLD） technique, taking Si （111） wafer as substrates, with a substrate at the temperature below 450°C in the PLD. It is found that both TCR-temperature behavior and TCR value are strongly affected by deposition temperature. The maximal TCR value over -10.9%K-1 can be observed at the deposition temperature from 20°C to 350°C and reaches to -13%K-1 at deposition temperature 20°C where the film shows X-ray diffraction amorphous. The results suggest that the ZnO/Si films demonstrate great potentials when used in a low-cost, high-performance, non-cooling and highly sensitive bolometer.