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Tradeoff between speed and static power dissipation of ultra-thin body SOI MOSFETs
Authors:Tian Yu  Huang Ru  Zhang Xing and Wang Yang-Yuan
Institution:Institute of Microelectronics, Peking University, Beijing 100871, China
Abstract:The speed performance and static power dissipation of the ultra-thin-body (UTB) MOSFETs have been comprehensively investigated, with both DC and AC behaviours considered. Source/drain extension width ($L_{\rm sp})$ and silicon film thickness $(t_{\rm si})$ are two independent parameters that influence the speed and static power dissipation of UTB silicon-on-insulator (SOI) MOSFETs respectively, which can result in great design flexibility. Based on the different effects of physical and geometric parameters on device characteristics, a method to alleviate the contradiction between power dissipated and speed of UTB SOI MOSFETs is proposed. The optimal design regions of $t_{\rm si}$ and $L_{\rm sp}$ for low operating power and high performance logic applications are given, which may shed light on the design of UTB SOI MOSFETs.
Keywords:ultra-thin-body  SOI  MOSFET  simulation
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