Surface analysis of insulating materials by Secondary Ion Mass Spectrometry (SIMS) |
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Authors: | G Müller |
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Institution: | (1) Bayer AG, D-4150 Krefeld-Uerdingen, Fed. Rep. Germany |
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Abstract: | For a non-conducting solid sample (TiO2 powder) the conditions for compensation of the charge build-up at the surface caused by the ion impact in SIMS are experimentally
investigated. The compensation is achieved by an additional auxiliary electron beam of low energy. The resolution and the
intensities of the secondary ions were measured as a function of the ratio of the current densities of the electron and the
ion beams. The compensation for negative secondary ions, and especially for those with higher masses, is more critical than
for positive ones. The intensities are influenced by the different values of the mean emission energies and the form of the
energy distributions. Examples of mass spectra by SIMS for some insulators are given. |
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Keywords: | 79 20 |
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