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| 一种高透过率光纤探针的制作 | |
| 引用本文： | 张工力,白永林,White J D,侯洵.一种高透过率光纤探针的制作[J].光子学报,1999,28(5):436-439. |
| 作者姓名： | 张工力 白永林 White J D 侯洵 |
| 作者单位： | 1. 中国科学院西安光学精密机械研究所,西安,710068 2. 西北大学光子学与光子技术研究所,西安,710069 3. 国家瞬态光学技术重点实验室,西安 710068 |
| 基金项目： | “九·五”攀登计划预选项目 |
| 摘 要： | 本文介绍了一种用于近场扫描光学显微镜(NSOM)中的高透过率光纤探针的制作方法。采用缓冲氢氟酸腐蚀低掺杂的普通单模石英光纤,选取适当比例的腐蚀液,可以得到直径、圆锥角均十分理想的针尖。这种方法不需要高掺杂的特殊光纤或是采用先熔拉后腐蚀的复合工艺。针尖经过镀膜后经测量为针尖直径100nm、透过率5.5×10-4. |
| 关 键 词： | 近场扫描光学显微术 光纤探针 化学腐蚀 蒸发镀铝 |
| 收稿时间： | 1999-01-06 |
FABRICATION OF A HIGH-TRANSMISSION FIBER PROBEFOR NEAR-FIELD SCANNING OPTICAL MICROSCOPE |
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| Zhang Gongli,Bai Yonglin,White J D,Hou Xun.FABRICATION OF A HIGH-TRANSMISSION FIBER PROBEFOR NEAR-FIELD SCANNING OPTICAL MICROSCOPE[J].Acta Photonica Sinica,1999,28(5):436-439. | |
| Authors: | Zhang Gongli Bai Yonglin White J D Hou Xun |
| Institution: | 1. Xi′an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi′an 710068;2. Institute of Photonics and Photon Technology, Northwest University, Xi′an 710069;3. State Key Laboratory of Transient Optics Technology, Xi′an 710068 |
| Abstract: | It is presented a one-step technique of fabricating a high-transmission fiber probe for near-field scanning optical microscope (NSOM).A commercial single-mode silica fiber with a low GeO2-doped core is etched in buffered hydrofluoric acid (HF).At a proper ratio of the etching solution,the tradeoff between tip cone angle and diameter is satisfied very well.Therefore,a selective chemical etching for special high doped fiber or a hybrid pull-etch process is not necessary.After coating tip with aluminum,we obtained fiber probes with typical parameters as follows:tip diameter of 100nm and transmission efficiency of 5.5?10-4. |
| Keywords: | Near field scanning optical microscopy Fiber probe Chemical etching Aluminum evaporation |
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