| Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O^3＋ Implantation |
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| 引用本文： | 焦扬,王克明,王雪林,陈峰,王磊,王亮玲,陆庆明,马宏骥,聂瑞.Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O^3＋ Implantation[J].中国物理快报,2006,23(12):3327-3330. |
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| 作者姓名： | 焦扬 王克明 王雪林 陈峰 王磊 王亮玲 陆庆明 马宏骥 聂瑞 |
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| 作者单位： | [1]School of Physics and Microelectronics, Shandong University, Jinan 250100 [2]School-of--Chemistry and Chemical Engineering, Shandong University, Jinan 250100 [3]The Key Laboratory of Heavy Ion Physics of Ministry of Education, Peking University, Beijing 100871 |
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| 基金项目： | Supported by the National Natural Science Foundation of China under Grant Nos 10475052, 10505013 and 10575067, and the Key Laboratory of Heavy Ion Fhysics of-Education Ministry （Peking University）. |
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| 摘 要： | A planar optical waveguide was formed in RbTiOP04 crystal by 6.0-MeV oxygen ion implantation with the dose of 2 × 10^15 ions/cm2 at room temperature. Annealing at 200℃ for 30min in air is performed to improve the thermal stability of the waveguide. The dark modes of the waveguide are measured at wavelengths 633 and 1539 nm, respectively. The refractive index profiles in the guiding layer are reconstructed by using the reflectivity calculation method. TRIM＇98 code was carried out to simulate the damage profiles caused by the implantation process to obtain a better understanding of the waveguide formation.
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| 关 键 词： | RbTiOP04 晶体 平面光波导 氧离子注入 室温 |
| 收稿时间： | 2006-09-04 |
| 修稿时间： | 2006-09-04 |
Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O3+ Implantation |
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| JIAO Yang,WANG Ke-Ming,WANG Xue-Lin,CHEN Feng,WANG Lei,WANG Liang-Ling,LU Qing-Ming,MA Hong-Ji,NIE Rie.Optical Waveguide Formed in RbTiOPO4 Crystal by 6.0 MeV O3+ Implantation[J].Chinese Physics Letters,2006,23(12):3327-3330. |
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| Authors: | JIAO Yang WANG Ke-Ming WANG Xue-Lin CHEN Feng WANG Lei WANG Liang-Ling LU Qing-Ming MA Hong-Ji NIE Rie |
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| Institution: | ¹School of Physics and Microelectronics, Shandong University, Jinan 250100
²School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
³The Key Laboratory of Heavy Ion Physics of Ministry of Education, Peking University, Beijing 100871 |
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| Abstract: | A planar optical waveguide was formed in RbTiOPO4; crystal by 6.0-MeV oxygen ion implantation with the dose of 2×1015 ions/cm² at room temperature. Annealing at 200°C for 30 min in air is performed to improve the thermal stability of the waveguide. The dark modes of the waveguide are measured at wavelengths 633 and 1539 nm, respectively. The refractive index profiles in the guiding layer are reconstructed by using the reflectivity calculation method. TRIM'98 code was carried out to simulate the damage profiles caused by the implantation process to obtain a better understanding of the waveguide formation. |
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| Keywords: | 61 80 Jh 42 79 Gn 42 82 Et |
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