Correlation between density and structure. in boron nitride thin films by X-ray diffraction |
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| Authors: | W Donner S Chamera A Rühm H Dosch S Ulrich H Ehrhardt |
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| Institution: | Institut für Materialwissenschaften, Universit?t Wuppertal, D-42285 Wuppertal, Germany (Fax: (+202) 2581-139, E-mail: donner@uni-wuppertal.de), DE
Institut für Dünnschichttechnologie, Universit?t Kaiserslautern, D-67663 Kaiserslautern, Germany, DE
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| Abstract: | *
ion=100 eV. Above E*
ion the average density (deduced from X-ray reflectivity) shows a strong increase, indicating the sudden appearance of the cubic
boron nitride phase consistent with the sp3 concentration deduced from IR absorption spectroscopy. The in-plane X-ray diffraction shows that this cubic phase consists
of small nanocrystals of 70 Å linear size.
Received: 26 November 1996/Accepted: 27 January 1997 |
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| Keywords: | PACS: 68 55 Jk 81 15 Jj 68 55 Nq |
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