基于AFM纳米氧化技术的金纳米粒子定点组装

二维纳米粒子矩阵列在纳米电子器件^1,2]、表面增强喇曼活性基底^3,4]、刻蚀掩模^5]等领域具有广泛的应用前景。在这些纳米粒子阵列为内部，纳米粒子的排布是随机、无序的。这一缺点已经妨碍了纳米粒子阵列在上述领域中的进一步应用。基于此，人们开始关注纳米粒子的可控组装。传统的光刻技术^6]、微接触印刷技术^7]以及生物分子模板技术^8]都被用来实现纳米粒子在固体表面上的可控组装，本实验室在纳米粒子的合成及可控组装方面也进行了研究^7,9,11]。本文力图精确控制单个纳米粒子在基底表面上的组装位置。利用AFM纳米氧化技术。在硅表面构建了纳米级的化学图形化表面，通过不同的化学官能团，如甲基、氨基对金纳米粒子亲和性质的差异，实现了纳米粒子在固体表面的定点组装。

Site-selective Assembly of Gold Nanoparticles on Silicon Using AFM Nano-oxidation Technique

Patterned nanoparticle arrays on solid surface have drawn much attention because of their potential for fabricating nanoelectronic devices. Here, we report a novel method to realize the site selective assembly of gold nanoparticles on silicon, which combines the AFM nano oxidation technique and wet chemical assembly technique. Nanosized oxide dots were generated by AFM nano oxidation on OTS covered silicon, followed by modification of APTMS monolayer on the oxide dots. Because of the specific electrostatic attraction between gold nanoparticles and the amino terminated APTMS monolayers, gold nanoparticles were only deposited on the oxidized regions. With this approach, we have successfully fabricated site selective gold nanoparticle assemblies.