| 相移测量技术中相移器研究 |
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| 引用本文： | 范华,张弛,任雅萍,谭玉山.相移测量技术中相移器研究[J].应用光学,1998,19(6):34-37,33. |
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| 作者姓名： | 范华 张弛 任雅萍 谭玉山 |
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| 作者单位： | 西安交通大学激光红外研究所 |
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| 摘 要： | 本文介绍一种用于相移测量技术的相移器。该相移器由计算机通过Ｄ／Ａ接口板自动控制输出电压幅度，其电路采用闭环控制，位移由压电晶体产生，具有很高的电压稳定度（０１％）和较小的相移误差（小于３°）。描述相移器的结构、驱动源工作原理及相移器标定方法
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| 关 键 词： | 电子散斑 相移器 干涉计量 相移测量 计算机控制 |
STUDY ON PHASE SHIFTER EMPLOYED IN PHASE SHIFTING METROLOGY |
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| Fan Hua,Zhang Chi,Ren Yaping,Tan Yushan.STUDY ON PHASE SHIFTER EMPLOYED IN PHASE SHIFTING METROLOGY[J].Journal of Applied Optics,1998,19(6):34-37,33. |
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| Authors: | Fan Hua Zhang Chi Ren Yaping Tan Yushan |
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| Abstract: | A phase shifter used in phase shifting interference metrology tchnique is presented in this paper.Its output voltage is controlled automatically by computer through D/A interface card.The closed loop control system is used in the circuit.The PZT is employed to generate displacement.The error of output voltage is less than 0 1% and the error of phase shift less than 3 degrees.The structure of phase shifter,the operating principle of the driver and the calibration method are described. |
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| Keywords: | electronic speckle pattern interferometry(ESPI) phase shifter interference metrology |
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