利用溅射原子角分布规律改进平行板静电场法

用Trim程序计算溅射原子的角分布规律，发现溅射原子出射角服从过余弦分布，利用这一规律，改进了收集方法，使得离子收集效率大大提高. 关键词： AVLIS 离子引出 溅射

Improving parallel electrode method by sputtering atoms' angle distribution rule

In atomic vapor laser isotope separation (AVLIS) engineering, the parallel electrode method has the advantage of simple structure, but when the extraction voltage is high, the sputtering loss is very large and the collection ratio is very low. This paper calculates the angular distribution of sputtering atoms by Trim code. The results show that the angular distribution follows the cosine rule. The collection method is modified according to the rule, which makes the collection ratio very high.