基于微光机电系统的微光学自适应微镜的研究

提出了一种利用热应力改变镜面曲率的可调焦微光学自适应微镜。与传统自适应微镜相比,采用该原理制作的微镜具有驱动电压低和驱动力较大的优点,而且制作简单。以硅为基底进行了表面热氧化、光刻显影、HF酸刻蚀、KOH湿法刻蚀,溅射铝膜等微加工工艺的研究,获得硅铝双金属可调焦微反射镜4×4阵列,单元尺寸3 mm×3 mm,单晶硅基底厚60μm,硅表面溅射的铝膜厚150 nm。该微镜的镜面填充率为100%,可变形镜面占总镜面面积的79%。利用激光波面干涉仪对可调焦微反射镜的动态性能进行了测试。实验表明,该微镜可产生单向连续变形,最大变形量15.8μm,非线性滞后27%,工作电压0~2.5V,可调焦范围∞~0.036 m。     

High energy X-ray micro-optics

A tremendous progress in X-ray optics development was made in the past decade. Progress has been driven by the unique properties of X-ray beams produced by third generation synchrotron sources. The very low emittance coupled with high brilliance allows one to develop efficient focusing devices for new X-ray microscopy techniques. This article provides an overview of the state-of-the-art in micro-focusing optics and methods for hard X-rays. The main emphasis is put on those methods which aim to produce submicron and nanometer resolution. These methods fall into three broad categories: reflective, refractive and diffractive optics.The basic principles and recent achievements are discussed for all optical devices. To cite this article: A. Snigirev, I. Snigireva, C. R. Physique 9 (2008).     

Directly laser-written integrated photonics devices including diffractive optical elements

Femtosecond laser-written integrated devices involving Fresnel Zone Plates (FZPs) and waveguide arrays are demonstrated as built-in optical couplers. These structures were fabricated in borosilicate glass using a direct laser writing technique. The optical properties of these integrated photonic structures were investigated using CW lasers and high-resolution CCDs. For a single FZP coupled to a single waveguide, the overall coupling efficiency was 9%. A multiplexed optical coupler composed of three FZP layers was demonstrated to couple three waveguides simultaneously in a waveguide array. Structures of this type can be used as platforms for multichannel waveguide coupling elements or as microfluidic sensors that require higher light collecting efficiency.     

红外微透镜阵列及其与MCT红外焦平面的集成

针对中短波碲镉汞（MCT）红外焦平面探测器的使用要求,设计了用于混合集成和单片集成且尺寸大小与探测器像元结构匹配的方形底折射微透镜阵列。采用热熔成形和（反应）离子柬刻蚀转移技术制作了多种红外材料微透镜,如Si、Ge、GaAs、蓝宝石以及红外玻璃（IRG-103和IRG-104）微透镜。针对混合集成和单片集成的不同要求,选用多种光刻胶如AZ6112和AZ6130等不同厚度的胶以及SUN-120P低熔点正型光刻胶,进行热熔和刻蚀实验,遴选分别适用于混合和单片集成的光刻胶。优化光刻胶和衬底材料的刻蚀速率比,得到高填充因子和合适光学参数的微透镜阵列。探究了SUN-120P低熔点正型光刻胶的特性和通过离子柬刻蚀转移视线实现零间距透镜的工艺。最后介绍了与MCT红外焦平面阵列器件的集成方式和工艺进展。     

热驱动微光学

通过实例研究和近期报道的文献,论述了热驱动微光学的研究进展。驱动器主要通过应用在液体和液气界面的压力来调控光学微流体,包括微镜片和薄膜微透镜,热驱动器利用芯片上的温度变化产生所需要的压力差,从而对微透镜进行调控。同时还讨论了用于微光学结构的各种设备、结构、液体和膜材料,并提供了典型操作特性。     

扩展微透镜数值孔径范围的阶梯光刻热熔法研究

在微透镜阵列的光刻热熔制作法中，临界角效应严重影响了微透镜的制作范围和面形质量。在对临界角效应定性研究的基础上，提出了用阶梯光刻熔法来扩展热熔型微透镜阵列的数值孔径范围。实验结果表明，采用这一方法制作的微透镜，其单元孔径范围扩展为５０￣９００μｍ，相对口径范围扩大到为Ｆ／１￣Ｆ／１０，并有效地改善了临界角效应对大孔径微透镜面形质量的影响。     

Fabrication of Micro-Optic Elements by the Sol-Gel Method

Micro-lens arrays composed of organic-inorganic materials were molded on glass substrates by the sol-gel method. Each lens had the same focal length and accurate pitch. There was no change in appearance or focal length after heat treatment at 350°C. The arrays had a refractive index of 1.53 (@1550 nm) and a transmittance of 98%/mm (@1550 nm). The film material did not change in appearance during evaluation for acid resistance.     

微型光学元件的透过波面畸变的数字化检测

介绍了由浙江大学研制的CQG II型车间数字干涉仪检测 φ3 6mm× 0 5mm平行平面玻璃的透过波面畸变的情况。最近研制出的干涉仪测量的最大口径为 φ60mm ,采用移相式条纹扫描数字化处理 ,基于WINDOWS操作系统实现实时检测 ,以优于λ/ 30的精度计算出被检件的波面误差。工厂生产检测表明 :在上述仪器上增加一个 4倍口径的放大系统 ,可以使通光口径 φ3 1mm的工件达到 42 0 0个采样点 ,仪器的透射测量标准干涉腔误差PV≤ 0 0 2 8λ ,仪器隔日多次测量重复性PV≤ 0 0 3λ。该仪器已经正常投入使用 ,生产的用于光学信息产品的微型光学件已为日本先锋公司 (PIONEER)复检通过 ,成为工厂批量生产过程质量控制 (QC)的重要手段。     

Sol-Gel Prepared Glass for Refractive and Diffractive Micro-Optical Elements and Arrays

The fast sol-gel method enables facile preparation of siloxane-based glassy matrices, in which polymerization is completed within minutes and volume changes <5% take place upon curing. Single-face and two-face replication of micro-optical arrays have been obtained, as well as crack-free elements >10 mm thick. Minimizing shrinkage and enabling relaxation of the drying sol-gel are key factors in the elimination of cracking. These features and the resulting optical quality of the glass make this method technologically and economically attractive for replication-produced micro-lenses and micro-optical arrays.     

Microlens arrays for confocal microscopy

A new; high resolution measuring system based on confocal microscopy has been developed for the evaluation of microlens arrays; in particular for applications in confocal microscopy itself. Lenslet arrays for parallel scanning and processing in confocal microscopy were designed as phase-matched Fresnel lenslets and fabricated by direct laser writing. Replica arrays were produced by ultraviolet embossing and hot embossing techniques. Fabricated arrays with a numerical aperture of 0.28 exhibited near diffraction limited performance and a focal length standard deviation of 120 nm in a nominal value of 250 μm. The technique developed represents a convenient and powerful technique for the characterization of lenslet arrays in general.