Surface flatness of optical thin films evaluated by gray level co-occurrence matrix and entropy

The surface characteristics of titanium oxide films evaluated by gray level co-occurrence matrices (GLCMs) and entropy are demonstrated experimentally. A PC-based measurement system was set up to detect the interference fringe of optical coating surface as captured by a Fizeau interferometer. Titanium oxide films were prepared by an electron-beam gun evaporation method. The proposed measuring system was used to evaluate the surface flatness of titanium oxide films coated on glass substrates. The variation of entropy in titanium oxide films before and after film deposition was found to be related to the root-mean-square (rms) surface roughness. Surface characteristics of thin films were fast measured by our proposed method and the test results were verified by atomic force microscopy (AFM) and scanning electrical microscopy (SEM).     

A method for fringe normalization by Zernike polynomial

A new approach for fringe normalization by Zernike polynomial fitting to cancel background illumination in an interferogram is proposed. With this method, background illumination can be suppressed, high frequency noise is immunized and the contrast is improved by normalization. The main idea for this paper is to use the Zernike polynomial fitting interferogram to cancel background illumination; the high frequency noise is then filtered by a Wiener filter. Finally, the paper uses the method of local region contrast modulation to enhance fringe contrast. This method can overcome the problem of the non-uniformity illumination of fringe patterns resulting from the marginal reflection of optical components and a non-uniformity light source