双尺度织构的激光光刻工艺

搭建了双光束激光干涉光刻系统和激光快速扫描系统。利用干涉光刻系统,实现了不同周期、不同深度、大面积的表面规则光栅织构的构筑。利用激光快速扫描器的二维扫描功能,通过控制激光功率和扫描速度,对曝光量和填充线条间距进行了优化。提出了两种双尺度复合织构的制备方法:一种是在激光快速扫描系统中对抗蚀剂表面分别进行x, y方向的扫描光刻,然后在干涉光刻系统中进行双光束干涉光刻;另一种是在激光干涉光刻系统中进行两次曝光,每次曝光的入射角不同。实验结果表明:这两种方法在制备双尺度复合织构方面具有快速、廉价、操作简易等优点。     

Performance testing of log pile photonic crystal fast-fabricated by direct femtosecond laser writing

Great efforts has been made on fabricating photonic crystals （PCs） with photonic band gaps （PBGs） during the past decade. Three-dimensional （3D） log pile PC was fabricated fast by direct femtosecond laser writing in ORMOCER. Qualitative analysis of the errors of PC was investigated using the Image Pro Plus. Surface qualities such as bending, distortion, and surface roughness were shown, and the band gap in the infrared wavelength region was observed. Meanwhile, the theory was experimentally verified that the center of PBG diminishes as the crystal lattice period reduces. Therefore, it is possible to fabricate PCs whose band gap range is from the near-infrared to visible wave band.     

飞秒光镊技术及其发展

激光捕获技术是利用光辐射力来捕捉、移动和操纵微粒的先进技术。飞秒光镊在实现粒子微纳操纵的同时还伴随着非线性现象的发生。阐述了飞秒光镊的模型和原理以及系统的各种结构形式,包括单光束梯度力光阱、贝塞耳光阱、双光束光纤光阱和冲击波光阱几种形式,并分析了每种形式的特点。