Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique

The symmetric deposition technique is often used to improve the uniformity of sculptured thin film （STF）. In this paper, optical properties of STF with the columnar angles 4-/3 are analyzed theoretically, based on the characteristic matrix method for extraordinary waves. Then, the transmittances of uniformity monolayer and bilayer STF in symmetrical style are calculated to show the effect of the bilayer structure on the optical properties of STF. The inhomogeneity of STF is involved in analyzing the differences in transmittance and phase retardation between monolayer and bilayer STF deposited in symmetric style. The results show that optical homogeneity of STF can be improved by depositing in symmetric style at the normal incidence, but it is not the same case as the oblique incidence.     

溶胶-凝胶法制备Si基ZnO薄膜的光伏特性

用溶胶-凝胶法在P型半导体Si（100）基片上生长了具有六角晶形的ZnO薄膜。SEM和XRD显示,C轴择优取向性明显,薄膜生长质量较好。ZnO薄膜的光致发光谱不仅有384.2nm的紫外波峰（FWHM=20.3nm）,而且还有649.2nm的红光波峰（FWHM=214nm）,两峰相对高度比为0.934。用波长为632.8nm的氦氖激光照射ZnO薄膜的表面,产生了明显的光伏效应。     

Experimental demonstration of narrow-band rugate minus filters using rapidly alternating deposition technology

The design, fabrication and performance of narrow-band rugate minus filters are investigated in this paper. A method of fabricating graded-index coatings by rapidly alternating deposition of low(Si O2) and high(Al2 O3) refractive index materials is presented to fabricate a rugate structure. The narrow-band rugate minus filter design and fabrication approaches are discussed in detail. The experimental results, including transmittance spectrum, surface damage test and damage morphology investigated with a scanning electron microscope, demonstrate the high performance of the as-fabricated spatial filter and confirm the feasibility of the fabrication method for narrow-band rugate minus filters.