声表面波驱动的非接触式转动马达

在研究摩擦力驱动的接触式转动马达的基础上,本文研制了一种由声表面波驱动的非接触式转动马达.这种马达的定子选用128°YX-LiNbO3晶体,在晶体表面光刻两对叉指换能器,由叉指换能器在定子表面激发两列平行而反向传播的声表面波.定子表面铺一层流体,转子就浮在流体表面.当定子表面有两列平行而反向的声表面波传播时,流体层中就会产生平行而反向的声流,这种黏性流体的声流运动就会驱动转子运动.实验上测定了马达的角速度随驱动电压,流体层厚度以及流体运动黏性系数变化的结果.同时,我们也发现,在相同工作频率下,非接触式转动马达的阈值电压远小于接触式.     

Performance of Non-Contact Linear Actuators Driven by Surface Acoustic Waves*

A new kind of non-contact linear actuator （motor） driven by surface acoustic waves （SAWs） is presented, in which the stators are made from SAW delay lines using 128° YX-LiNbO3 substrates. A fluid layer is introduced between the slider and the stator of the actuator, and the slider is a circular aluminum disk suspended on the surface of the liquid （water） layer. As the SAW is excited on the stator, the SAW is converted to a leaky wave in the interface of the stator and the liquid, and then propagates into the liquid. Owing to the nonlinear effect of wave propagation, acoustic streaming is generated, which pushes the slider to move. By the experiments, the relations between the slider velocity and the experimental parameters, such as the exciting voltage of the SAWs, the thickness and the kinematic viscosity of the liquid layer, are obtained.