使用多光谱手段研究熔石英断裂机理

熔石英玻璃是高能激光系统中不可缺少的光学材料,其损伤问题一直是限制系统能量提升的瓶颈之一。通过纳秒激光脉冲诱导熔石英玻璃样品产生断裂,并使用多光谱手段对断裂前后样品进行检测,从而在实验和理论上了解了样品断裂形貌及内部相变结构成因,并从宏观到微观上统一解释了断裂形貌和相变结构的关系。在激光等离子冲击波作用下,熔石英发生断裂,且冲击波作用过程中在玻璃内部产生了推动裂纹扩展的尖端环向应力。在尖端环向应力作用下,不同损伤区域形成了不同扩展速度和长度的裂纹, 按照裂纹形貌特性差异可以将断裂区分为雾化区、羽毛区、镜面区三个部分。使用透射光谱、能量散射光谱检测损伤前后样品,发现裂纹的产生引起了玻璃透过率和带隙的下降,且断裂区出现氧原子游离或缺失;使用Raman光谱检测样品损伤前后不同形貌区,发现等离子冲击波使熔石英中Si-O-Si键断裂并发生重组,导致镜面区、羽毛区、雾化区三元拓扑环和四元拓扑环宏观上对应的斯石英相和柯石英相的相对含量依次升高,破坏了材料的固有原子结构特性,使材料断裂区向高密度相转变。氧游离的发生会在玻璃内部产生的大量缺陷,从而使得玻璃透过率及带隙下降,严重影响了玻璃的性能。     

Conditions for laser-induced plasma to effectively remove nano-particles on silicon surfaces

Particles can be removed from a silicon surface by means of irradiation and a laser plasma shock wave.The particles and silicon are heated by the irradiation and they will expand differently due to their different expansion coefficients,making the particles easier to be removed.Laser plasma can ionize and even vaporize particles more significantly than an incident laser and,therefore,it can remove the particles more efficiently.The laser plasma shock wave plays a dominant role in removing particles,which is attributed to its strong burst force.The pressure of the laser plasma shock wave is determined by the laser pulse energy and the gap between the focus of laser and substrate surface.In order to obtain the working conditions for particle removal,the removal mechanism,as well as the temporal and spatial characteristics of velocity,propagation distance and pressure of shock wave have been researched.On the basis of our results,the conditions for nano-particle removal are achieved.