基于WO3- Pd复合膜的D型光纤光栅氢气传感器

采用磁控溅射方法在侧边抛磨的光纤光栅（D型光纤光栅）上溅射40 nm WO3-Pd复合薄膜,制作了D型光纤光栅氢气传感器.40 nm WO3-Pd复合薄膜是由5 nm的WO3、5 nm的WO3/Pd混合膜和30 nm的Pd 薄膜组成.实验中,首先采用射频溅射技术向D型光纤光栅溅射5 nm WO3薄膜,再利用共溅射技术溅射5 nm WO3/Pd混合膜,最后用直流溅射技术溅射30 nm的Pd薄膜.SEM结果显示在多次通氢气后WO3-Pd薄膜仍然具有较好的表面形貌,这说明WO3-Pd复合薄膜具有较好的机械性能.实验结果表明:该氢气传感器具有较好的重复性,同镀有同样氢气敏感膜的普通FBG相比,D型光纤光栅的灵敏度提高了200%|在氢气体积浓度为6%时,D型光纤光栅传感器的波长变化为15pm.     

Optical coatings on fiber for relative-humidity sensing applications

A fiber-optic relative-humidity （RH） sensor composed of multilayer of porous dielectric films is proposed. The transducer deposited on fiber end-face is multilayer coating consisting of nano-porous TiO2 and SiO2 films, which forms a low-fineness Fabry-Perot （F-P） filter with one of minimum reflections at about 1350- nm wavelength. The dielectric thin films realized by e-beam evaporation without ion-source assistance have columnar and porous structures, which exhibit sensitivity to RH change of environments. When the sensor is exposed to an environment of RH change from 10.9% to 92.8%, experimental results demonstrate 77.9-nm shift of characteristic wavelength.     

基于WO3- Pd复合膜的D型光纤光栅氢气传感器

采用磁控溅射方法在侧边抛磨的光纤光栅(D型光纤光栅)上溅射40 nm WO3-Pd复合薄膜,制作了D型光纤光栅氢气传感器.40 nm WO3-Pd复合薄膜是由5 nm的WO3、5 nm的wO3/Pd混合膜和30 nm的Pd薄膜组成.实验中,首先采用射频溅射技术向D型光纤光栅溅射5 nmWO3薄膜,再利用共溅射技术溅射5...