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We report the improved performance of the conventional contact 1.3 #m GalnNAs vertical cavity surface emitting lasers (VCSELs) grown by metal-organic vapour-phase epitaxy (MOVPE). A new wet etching approach was applied in the fabrication of 1.3μm GaInNAs oxide-confined VCSELs. The threshold current of single mode device is 1.0mA. The multiple mode devices show very low threshold currents below 2 mA at 5-85℃, which were the best results for 1.3μm GaInNAs VCSELs reported. Maximum single mode output power of 0.256mW and the maximum multiple mode power of 0.883mW were obtained at room temperature. 相似文献
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