YBCO/ND-Y2O3/YBCO超导薄膜的制备及其特性研究

采用光辅助金属有机物化学气相沉积技术,在LaAlO3(100)单晶衬底上外延制备约500 nm厚YBCO/ND-Y2O3/YBCO薄膜.用X射线衍射技术分析薄膜的物相结构和外延特性,通过扫描电子显微镜观察薄膜的表面与截面形貌.主要研究了不同生长时间的Y2 O3纳米点对YBCO超导薄膜性能的影响.Y2 O3纳米点生长时间为2Os样品的临界电流密度达到2.4 MA/cm2(77 K,0T),与未生长Y2O3纳米点的YBCO薄膜相比,其临界电流密度提高20;.分析表明,薄膜中的Y2O3在YBCO薄膜内部起到了有效钉扎中心作用,提高了临界电流密度.     

Nanodots and microwires of ZrO_2 grown on LaAlO_3 by photo-assisted metal–organic chemical vapor deposition

ZrO_2 nanodots are successfully prepared on LaAlO_3(LAO)(100) substrates by photo-assisted metal-organic chemical vapor deposition(MOCVD). It is indicated that the sizes and densities of ZrO_2 nanodots are controllable by modulating the growth temperature, oxygen partial pressure, and growth time. Meanwhile, the microwires are observed on the surfaces of substrates. It is found that there is an obvious competitive relationship between the nanodots and the microwires. In a growth temperature range from 500℃ to 660℃, the microwires turn longest and widest at 600℃, but in contrast, the nanodots grow into the smallest diameter at 600℃. This phenomenon could be illustrated by the energy barrier, decomposition rate of Zr(tmhd)_4, and mobility of atoms. In addition, growth time or oxygen partial pressure also affects the competitive relationship between the nanodots and the microwires. With increasing oxygen partial pressure from 451 Pa to 75_2 Pa,the microwires gradually grow larger while the nanodots become smaller. To further achieve the controllable growth, the coarsening effect of ZrO_2 is modified by varying the growth time, and the experimental results show that the coarsening effect of microwires is higher than that of nanodots by increasing the growth time to quickly minimize ZrO_2 energy density.