THE ANNEALING EFFECT OF CRYSTAL 4H-SiC FILMS PREPARED BY PULSED LASER DEPOSITION

SiC films were prepared by pulsed XeCl laser ablation of ceramic SiC target on Si(100) substrate at temperature 850℃ and post-deposition high temperature annealing above 1100℃ (1100℃-7 Pa). The surface morphology, crystal structure, composition and chemical state of the element in the films before and after annealing were studied by X-ray diffraction, transmission electron microscopy, scanning electron microscopy, Auger electron Spectrum, X-ray photoelectron spectrum and photoluminescence methods. It was found that the films were consisted of polycrystal 4H-SiC structure before annealing and were turned into singlecrystal epitaxial 4H-SiC after annealing. The surfaces of the films were smooth and the adhesion of films with the substrate was good. The films were transparent. Excited by the laser with wavelength 290 nm at room temperature, the films emitted two luminescence bands with the peaks at 377 nm and 560 nm. The emission at 377 nm was attributed to the combination of the transmission among the valence and conductor bands, while the one at 560 nm was possibly to be from exciton emission.     

三层膜中特殊的磁电阻效应

本文研究了ＬＳＭＯ／ＰＣＭＯ／ＬＳＭＯ三层膜的运输性质和磁电阻电磁特性，随中间层Ｐｒ０．７Ｃａ０．３ＭｎＯ３＋δ厚度的增加，在零磁场下，三层膜的电阻率显著下降，在磁场为Ｈ＝０．７５Ｔ，磁电阻效应在减少，转变温度向高温区移动，而且，热激活能在减少，中间层不仅诱发了内磁场，还诱发了ＬＳＭＯ的能隙中的态密度。     

三层膜中特殊的内磁场效应

本文用直流溅射法在（１００）ＬａＡｌＯ３单晶基片上制备了ＬＳＭＯ／ＰＣＭＯ／ＬＳＭＯ三层膜，并研究了三层膜的电，磁特性。在零磁下，三层膜的电阻率随中间层Ｐｒ０．７Ｃａ０．３ＭｎＯ３＋δ厚度的增加而显著下降、转变温度向高温区移动。中间层ＰＣＭＯ的作用相当于提供了一个内磁场。     

LPL3层膜的结构、磁性和磁电阻效应的研究

采用直流溅射法在 ( 1 0 0 )LaAlO3 单晶基片上制备了La_0.67Sr_0.33MnO_3+δ/Pr_0.7Ca_0.3MnO_3+δ/La_0.67Sr_0.33MnO_3+δ(简称为LPL) 3层膜 .用X射线粉末衍射法(XRD)研究了系列样品的摇摆曲线和衍射全图 ,结果表明所有的样品均为高度取向的外延膜 .SQUID磁强计的测量结果证实了 3层膜中磁耦合的存在 .用常规的四端引线法测量了LSMO、PCMO和LPL 3层膜的电阻 ,分析了logρ 1 /T曲线 .由此可以得出如下结论 :具有铁磁性的PCMO中间层在 3层膜中可能起到了内磁场的作用 ,使得LSMO膜的顺磁性被削弱 ,这个作用与外加磁场的作用一样 ,降低了 ρ_max,增大了由金属到半导体的转变温度T_p;PCMO中间层还诱发了LSMO的能隙中的态密度的变化 .以上两个原因使得在零场中样品的电阻率和T_p 随着中间层PCMO的厚度变化而明显变化 .