Ge Complementary Tunneling Field-Effect Transistors Featuring Dopant Segregated NiGe Source/Drain

Ge complementary tunneling field-effect transistors(TFETs) are fabricated with the NiGe metal source/drain(S/D) structure. The dopant segregation method is employed to form the NiGe/Ge tunneling junctions of sufficiently high Schottky barrier heights. As a result, the Ge p-and n-TFETs exhibit decent electrical properties of large ON-state current and steep sub-threshold slope(S factor). Especially, I_d of 0.2 μA/μm is revealed at V_g-V_(th) = V_d = ±0.5 V for Ge pTFETs,with the S factor of 28 mV/dec at 7 K.