拼接干涉仪在控制装校面形中的应用

通过对比大口径光学元件夹持不当时全口径与局部口径之间的图像关系,研究局部面形控制的新方式。并与高精度的大口径干涉仪进行比对测试,验证拼接干涉仪的测试精度。实验表明,拼接干涉仪局部测试精度可达50 nm(PV值).空间分辨力高达5 mm~(-1),可以实现中频段的装校临控。使用拼接干涉仪扫描测试全口径面形,测试不确定度小于100nm.与φ600 mm的大口径干涉仪测试结果差别小于0.04λ(波长λ=632.8 nm)。     

Accuracy and analysis of long-radius measurement with long trace profiler

The long trace profiler(LTP) is proposed to measure radius of curvature(R) and surface figure of a longradius spherical surface in an optical shop.Equipped with a motorized rotary stage and a two-dimensional tilt stage,the LTP scans the full aperture and calculates the absolute radius of curvature of each scanning line based on the least square method.Nonlinear error and manufacture error difference between center and the edge are obtained by comparing R results.The R-limit is validated and expressed as D/R,where D is the aperture of the mirror under test.A full-aperture three-dimensional figure is also reconstructed based on triangle interpolation.