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Dislocation Reduction Mechanisms in Gallium Nitride Films Grown by Canti-Bridge Epitaxy Method 下载免费PDF全文
By using the special maskless V-grooved c-plane sapphire as the substrate, we previously developed a novel GaN LEO method, or the so-called canti-bridge epitaxy (CBE), and consequently wing-tilt-free GaN films were obtained with low dislocation densities, with which all the conventional difficulties can be overcome [J. Vacuum Sci. Technol. B 23 (2005) 2476]. Here the evolution manner of dlslocations in the CBE GaN films is investigated using transmission electron microscopy. The mechanisms of dislocation reduction are discussed. Dislocation behaviour is found to be similar to that in the conventional LEO GaN films except the enhanced dislocation-combination at the coalescence boundary that is a major dislocation-reduction mechanism for the bent horizontal-propagating dislocations in the CBE GaN films. The enhancement of this dislocation-combination probability is believed to result from the inclined shape and the undulate morphology of the sidewalls, which can be readily obtained in a wide range of applicable film-growth conditions during the GaN CBE process. Further development of the GaN CBE method and better crystal-quality of the GaN film both are expected. 相似文献
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Quantum computing requires ultracold ions in a ground vibrational state,which is achieved by sideband cooling.We report our recent efforts towards the Lamb-Dicke regime which is a prerequisite of sideband cooling.We first analyse the possible imperfection in our linear ion trap setup and then demonstrate how to suppress the imperfection by compensating the excess micromotion of the ions.The ions,after the micromotion compensation,are estimated to be very close to the Doppler-cooling limit. 相似文献
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借助高分辨电子显微像结合解卷处理的方法研究了GaN晶体中的堆垛层错.简要介绍了高分辨电子显微像的解卷处理原理,指出通过解卷处理可以把本来不直接反映待测晶体结构的高分辨电子显微像转换为直接反映晶体结构的图像.用高分辨电子显微像观察了GaN晶体中的堆垛层错,对高分辨电子显微像作了解卷处理.在解卷像上清晰可见缺陷核心的原子排列情况,据此确定了层错的类型.此外,还讨论了解卷处理在研究晶体缺陷中的效用.
关键词:
GaN
晶体缺陷
高分辨电子显微学
解卷处理 相似文献
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