Fabrication of three-dimensional crystalline microstructures by selective ion implantation and chemical etching

We present a new fabrication technique to produce three-dimensional (3D) microstructures on crystalline substrate using selective ion implantation and chemical etching. Localized lattice-damage layers at the specified depth beneath the substrate surface are formed by selective ion implantation. After etching out the partial surface regions and the buried lattice-damage layers by chemical etching, the 3D crystalline microstructures are produced. This technique is demonstrated on LiNbO₃ crystal to produce undercutting and free-standing microstructures, including microwire, microring, and microdisk. The measurement results of micro-Raman spectra show that the used fabrication process does not affect the original crystalline structure. The features of this technique include smooth structure surface, large undercutting range, and auto-etching stop. By using multiple implantations or repeating the proposed process several times, versatile 3D crystalline microstructures can be produced.     

Surface plasmon resonance biosensor based on electro-optically modulated phase detection

A novel electro-optically modulated surface plasmon resonance (EOMSPR) biosensor based on phase detection by collinear heterodyne interferometry is presented. Its operation is by means of modulating the SPR-induced phase variation by electro-optic effect. Because the relation between the phase change and the applied voltage is highly sensitive to analyte properties, the linear regression slope of this relation can be used in the analyte detection. The detection characteristics of this EOMSPR biosensor are measured, and their dependences on waveguide width and gold-film thickness are discussed. This novel EOMSPR biosensor has attractive features, such as compactness, resolution tunability, and noise reduction.     

Electro-optically tunable microring resonators on lithium niobate

Electro-optical tuning of a microring resonator fabricated on lithium niobate (LiNbO3) is presented. The device structure, including microring resonator and couplers, is designed in detail and is produced by titanium diffusion on the wet-etched LiNbO3 ridge surface. The resonance wavelengths for TM and TE polarizations can be tuned by electro-optic effect. The output characteristics of through port and drop port in the microring resonators are measured, and the effect of applied voltage on the shift of resonant wavelength is discussed. The presented microring resonators have the features of fast tuning speed, high material stability, bidirection wavelength shift, and no heating interference. Realization of such a microring resonator on LiNbO3 makes the utilization of electro-optic tuning and nonlinear effects in the versatile photonic applications of microring resonators achievable.