Depth profile analysis of polyimide film treated by potassium hydroxide

The structural change in the depth direction of a polyimide (UPILEX‐S) film treated in alkaline solution, which was a representative surface treatment used to form a seed layer for plating and to improve the adhesive strength, was analyzed by means of micro Fourier transform infrared attenuated total reflection (FTIR‐ATR) line analysis with gradient shaving preparation. The polyimide film was treated with KOH. The imide ring opened through the alkaline treatment, and the amide structure and carboxylic acid salt were formed. The attainment depth of this structural change was almost proportional to the treatment time, and it reached about 8 μm after a 30‐min treatment. The degree of structural change through the alkaline treatment was almost constant after it reached a considerably degraded stage, and the chemically changed region penetrated into the inner part of the film from the surface. An intermediate layer before the final degraded stage appeared in the treated layer, and its thickness increased with the treatment time. The region that was changed chemically by the alkaline treatment progressed to the inner part simultaneously and continuously as the treatment time increased. The combined use of gradient shaving preparation and micro FTIR‐ATR line analysis was found to be extremely effective for the depth profiling of organic materials. © 2003 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 41: 2071–2078, 2003     

Dynamic moderation of an electric field using a SiO2 switching layer in TaOx ‐based ReRAM

ReRAMs using oxygen vacancy drift in their resistive switching are promising candidates as next generation memory devices. One remaining issue is degradation of the on/off ratio down to 10² or less with an increased number of switching cycles. Such degradation is caused by a local hard breakdown in a set process due to a very high electric field formed just before the completion of a conductive filament formation. We found that introducing an ultra‐thin SiO₂ layer prevents the hard breakdown by dynamical moderation of the electric field formed in the TaO_x matrix, resulting in repeated switching while retaining a higher on/off ratio of about 10⁵. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)     

Effects of the surface pressure on the formation of Langmuir-Blodgett monolayer of nanoparticles

The effects of the surface pressure on the particle arrangement of Langmuir-Blodgett (LB) monolayers of alkanethiol-capped gold nanoparticles were studied. The LB monolayers were prepared from a highly concentrated particle solution, which increases film fabrication efficiency but readily causes small particle voids in the particle array. Overcompressing the LB monolayer to a high surface pressure restructured the particles and eliminated the voids. When the gold particles capped by dodecanethiol were 8.5 nm in diameter, the particle arrangement was vastly improved and a wafer-scale LB monolayer was transferred onto a substrate at the surface pressure of 20 mN/m.     

化学镀技术在超大规模集成电路互连线制造过程的应用

总结自大马士革铜工艺建立以来,电化学工作者利用化学镀技术围绕该工艺而开展的一系列相关研究,介绍了应用化学镀沉积镍三元合金防扩散层和化学镀铜种子层的研究以及离子束沉积法(Ion ized C lus-ter Beam,ICB)形成Pd催化层后的化学镀铜技术和超级化学镀铜方法.简要叙述化学镀铜技术在超大规模集成电路中的应用,总结化学镀铜技术的研究进展,并指出了今后的发展方向.     

Strain imaging of a perpendicular recording head in a Hard Disk Drive

Imaging of magnetic-field-induced strains using scanning probe microscopy enables us to observe magnetic domain structures and magnetic force distributions. This method has an ability of observing magnetic structures in deep portions along with surface structures. We observed an air-bearing surface of a perpendicular recording head in a hard disk drive in large areas including the whole yokes, and investigated characteristics of the magnetic poles and layers subjected to magnetic fields produced by writing coil currents. Attractive forces independent of the field directions acted between the upper and lower yokes made by soft material, which generated surface displacements in the ABS. The signals were second-harmonic oscillations for alternating currents without a dc bias, and the amplitude images represented the field distribution. Meanwhile, fixed magnetic charges in both ends of the read sensor, which were produced by the hard-bias film, were subjected to the fields. The fixed charges, which hardly changed by the fields, lead to strains depending on the field directions, and generated specific contrasts of one pair of bright-dark spots in the strain images. In the absence of surface underlayer, the fields by the writing coil broke into the read sensor sandwiched by the shield layers.     

Transition process from one celled vortex to two celled vortex

Changes in the flow structure, the vorticity distribution and the stream function during the transition process from the one celled vortex to the two celled vortex following a rapid change in the radial Reynolds number have been examined. Starting from a thin filament-like structure corresponding to the one celled vortex. a thick vortex core first grew up from the outlet region and turned into a cylindrical structure corresponding to the two celled vortex. The vorticity distribution also changed from a single-summit type to a ring-summit type.     

Fabrication of Nanomaterials Using Porous Alumina Templates

Nanofabrication by self-organization methods has attracted much attention owing to the fact that it enables mass production without the use of expensive lithographical tools, such as an electron beam exposure system. Porous alumina can be fabricated electrochemically through anodic oxidation of aluminum by means of such a self-organization method, yielding highly ordered arrays of nanoholes several hundreds down to several tens of nanometers in size. This paper is an overview of recent research on porous alumina science and technology, nanohole array self-organization conditions and mechanisms, various methods of nanostructure formation using porous alumina templates, optical and magnetic nanofabrication, perspectives on electronic nano device fabrication and chemical/biological sensors and membranes.     

Synthesis of epitaxial Si(100) nanowires on Si(100) substrate using vapor–liquid–solid growth in anodic aluminum oxide nanopore arrays

The synthesis of epitaxial Si nanowires with growth direction parallel to Si [100] on Si(100) substrate was demonstrated using a combination of anodic aluminum oxide (AAO) template, catalytic gold film sandwiched between the template and the Si(100) substrate and vapor-liquid-solid growth using SiH₄ as the Si source. After growing out from the AAO nanopores, most Si nanowires changed their diameter and growth direction into larger diameter and 〈111〉 direction. PACS 81.07.-b; 82.45.Cc