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A compact electron cyclotron resonance plasma source has been developed for molecular beaut epitaxy equipment. Faraday cup and Langmuir probe were used to measure the ion current densities, electron temperatures, ion densities, and plasma potentials. The ion current densities as function of pressure and microwave power have been studied. 相似文献
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A compact electron cyclotron resonance plasma source has been developed for molecular beaut epitaxy equipment. Faraday cup and Langmuir probe were used to measure the ion current densities, electron temperatures, ion densities, and plasma potentials. The ion current densities as function of pressure and microwave power have been studied. 相似文献
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