PERFORMANCE OF A COMPACT ECR SOURCE FOR MBE EQUIPMENT |
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| Institution: | Institute of Physics, Academia Sinica, Beijing 100080, China Institute of Semiconductors, Academia Sinica, Beijing 100083, China; High Energy Electronics Research Institute, University of Electronics Science and Technology of China, Chengdu 610054 , China |
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| Abstract: | A compact electron cyclotron resonance plasma source has been developed for molecular beaut epitaxy equipment. Faraday cup and Langmuir probe were used to measure the ion current densities, electron temperatures, ion densities, and plasma potentials. The ion current densities as function of pressure and microwave power have been studied. |
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