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To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode (LD) interferometers,a novel real-time displacement measurement LD interferom- etry is proposed and its measurement principle is analyzed.By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping,the measurement accuracy is im- proved,and the measurement range is enlarged to a few wavelengths.In experiments,the peak-to-peak amplitude of the speaker vibration was 2361.7 nm,and the repeatability was 2.56 nm.The measurement time was less than 26μs. 相似文献
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用于频域光学相干层析成像的深度分辨色散补偿方法 总被引:4,自引:2,他引:2
提出一种深度分辨的色散补偿方法,用于增强频域光学相干层析成像的纵向分辨率。将频域光学相干层析成像采集的干涉谱信号傅里叶变换到空域,获取对应不同深度的干涉谱条纹相位,通过对其进行调整实现对被测样品不同深度处的色散的精确补偿。避免传统方法中采用统一色散系数进行色散补偿所带来的过补偿与欠补偿误差,可以有效消除色散引起的频域光学相干层析成像系统点扩展函数的展宽和扭曲。模拟和实验结果表明,基于深度分辨的色散补偿方法在样品的全深度探测范围内可以达到较佳的补偿效果,可有效提高光学相干层析成像系统的纵向分辨率。 相似文献
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