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Improvement of total-dose irradiation hardness of silicon-on-insulator materials by modifying the buried oxide layer with ion implantation 下载免费PDF全文
The hardening of the buried oxide (BOX) layer of separation by implanted
oxygen (SIMOX) silicon-on-insulator (SOI) wafers against total-dose irradiation
was investigated by implanting ions into the BOX layers. The tolerance to
total-dose irradiation of the BOX layers was characterized by the
comparison of the transfer
characteristics of SOI NMOS transistors before and after irradiation to
a total dose of 2.7
Mrad(SiO2. The experimental results show that the implantation of
silicon ions into the BOX layer can improve the tolerance of the BOX layers
to total-dose irradiation. The investigation of the mechanism of the
improvement suggests that the deep electron traps introduced by silicon
implantation play an important role in the remarkable improvement in
radiation hardness of SIMOX SOI wafers. 相似文献
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In this work, we investigate the back-gate I-V characteristics for two kinds of NMOSFET/ SIMOX transistors with H gate structure fabricated on two different SOI wafers. A transistors are made on
the wafer implanted with Si+ and then annealed in N2,and B transistors are made on the wafer without implantation and annealing. It is demonstrated experimentally that A transistors have much less back-gate threshold voltage shift ΔVth than B transistors under X-ray total dose irradiation. Subthreshold charge separation technique is employed to estimate the build-up of oxide charge and interface traps during irradiation, showing that the reduced ΔVth for A transistors is mainly
due to its less build-up of oxide charge than B transistors.
Photoluminescence (PL) research indicates that Si implantation results in the formation of silicon nanocrystalline (nanocluster) whose size increases with the implant dose. This structure can trap electrons to compensate the positive charge build-up in the buried oxide during irradiation, and thus reduce the threshold voltage negative shift. 相似文献
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应用数量分析法综合评价医院各年度工作质量 总被引:1,自引:0,他引:1
科学评价医院各年度工作质量.用主成分分析和因子分析法对医院九年工作质量进行综合评价.我校附属口腔医院在1997至2006九年中工作质量综合评价排序结果为9、7、6、5、8、4、2、3、1.该方法可消除人为因素干扰,对综合评价医院各年度工作质量效果有应用价值,简单易行. 相似文献
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建立了液相色谱-质谱测定牛奶中35种四环素类、磺胺类、青霉素类、大环内酯类、氯霉素类等5类抗生素残留的检测方法。样品经碱性乙腈-Mcllvaine缓冲液超声提取,用Eclipse XDB-C8色谱柱(150 mm×2.1 mm, 3.5 μm)分离,梯度洗脱,流速0.25 mL/min,进样量10 μL,采用多反应监测正离子或负离子模式,可以一次性对牛奶中的目标化合物进行定性和定量测定。在优化条件下,35种化合物的检出限均低于10.0 μg/kg,方法回收率为70.1%~109.9%,相对标准偏差(RSD)为2.89%~9.99%。结果表明该方法适用于牛奶中抗生素残留的检测。采用所建立的检测方法对市售的50种不同乳品进行了检测,其中一个样品检出氯霉素含量为0.48 μg/kg。检测结果表明,中国市场上销售的乳品氯霉素污染的风险仍然存在。本研究建立的液相色谱-质谱联用方法实现了牛奶中35种四环素类、磺胺类、青霉素类、大环内酯类、氯霉素类等5类抗生素残留的测定。该方法简单、快捷、经济,可实现多种抗生素残留的快速测定。 相似文献
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