脉冲激光沉积技术制备超导薄膜的研究进展

超导薄膜不仅在超导应用方面扮演着举足轻重的角色，而且是超导机理研究的良好载体，是连接超导应用和机理的桥梁。脉冲激光沉积(PLD)是最常用的超导薄膜制备技术之一。本文综述了PLD技术制备铜氧化物、铁基、氮化物、钛氧化物等超导薄膜的研究进展，并介绍了与高温超导薄膜应用相关的两种PLD新技术：超导带材和大面积薄膜制备。最后，本文介绍了基于材料基因工程的高通量组合薄膜技术在高温超导研究上的典型成功案例。继续发展和使用该实验技术，构建与高温超导相关的高维相图和定量规律，有望实现机理研究实验上从量变到质变的全面突破。     

Optimization of large-area YBa2Cu3O7-δ thin films by pulsed laser deposition for planar microwave devices

This paper presents high quality YBa₂Cu₃O_7-δ(YBCO) thin films on LaAlO₃ substrate for microwave devices prepared by pulsed laser deposition(PLD). The double-sided YBCO films cover a large area and have been optimized for key parameters relevant to microwave device applications, such as surface morphology and surface resistance(Rs).This was achieved by improving the target quality and increasing the oxygen pressure during deposition, respectively. To ev...