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Design and characterization of a 3D encapsulation with silicon vias for radio frequency micro-electromechanical system resonator 下载免费PDF全文
In this paper, we present a three-dimensional(3D) vacuum packaging technique at a wafer level for a radio frequency micro-electromechanical system(RF MEMS) resonator, in which low-loss silicon vias is used to transmit RF signals.Au–Sn solder bonding is adopted to provide a vacuum encapsulation as well as electrical conductions. A RF model of the encapsulation cap is established to evaluate the parasitic effect of the packaging, which provides an effective design solution of 3D RF MEMS encapsulation. With the proposed packaging structure, the signal-to-background ratio(SBR) of 24 dB is achieved, as well as the quality factor(Q-factor) of the resonator increases from 8000 to 10400 after packaging.The packaged resonator has a linear frequency–temperature( f –T) characteristic in a temperature range between 0℃ and 100℃. And the package shows favorable long-term stability of the Q-factor over 200 days, which indicates that the package has excellent hermeticity. Furthermore, the average shear strength is measured to be 43.58 MPa among 10 samples. 相似文献
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PtCr合金的溶液制备及其电化学性质分析 总被引:1,自引:0,他引:1
催化剂性能的高低直接决定了燃料电池性能的好坏. 采用Pt基合金不仅能够降低催化剂Pt的载量, 而且往往能够提高催化剂的性能. 本工作用Cr作为合金化元素, 通过液相共沉淀的方式制备了不同比例的碳载PtCr合金催化剂. 采用高分辨透射电镜(HRTEM), 扫描电镜(SEM)等技术对合金催化剂的物理性质进行了测试. 结果表明, 获得的PtCr/C催化剂均匀地分散在Vulcan XC-72碳载体上, 粒度小于4 nm. 通过电化学测试, 研究了不同比例PtCr合金的电化学催化性能. 循环伏安测试表明, 本实验条件合成的合金催化剂在Pt/Cr原子比为2/1的时候, 对氧还原动力学有最佳的催化性能. 相似文献
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报道了一种基于非线性偏振旋转效应的被动锁模光纤激光器。采用980 nm分布式反馈激光器作为泵浦源,0.5 m长的高掺杂掺铒光纤作为增益介质。实现了脉冲宽度为822 fs的传统孤子锁模脉冲,输出脉冲的平均功率为2.8 mW,信噪比为55.8 dB。通过微调腔内的偏振控制器,实现了传统孤子脉冲和孤子分子脉冲间的切换,孤子分子的脉冲宽度为312 fs,信噪比为53.86 dB。孤子分子脉冲经掺铒光纤放大器放大后泵浦一段57 m长的高非线性光纤,产生了位于第三近红外窗口(1600 nm~1870 nm)的超连续谱,其20 dB谱宽为355.8 nm。 相似文献
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The helicity of stable single helical carbon chains and iodine chains inside single-walled carbon nanotubes(SWCNTs)is studied by calculating the systematic van der Waals interaction energy.The results show that the optimal helical radius increases linearly with increasing tube radius,which produces a constant separation between the chain structure and the tube wall.The helical angle exhibits a ladder-like decrease with increasing tube radius,indicating that a large tube can produce a small helicity in the helical structures. 相似文献
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理论研究了谐波发射的量子路径在非均匀正交激光场下的调控机制.结果表明,在适当的双色激光偏振角和非均匀参数的组合下,不仅谐波截止能量有明显增大;谐波发射的短量子路径可以被单独选择出来对谐波连续区起到贡献作用.并且,该方案在长脉宽激光下依然适用.最后,利用谐波连续区可以获得脉宽在50 as的孤立阿秒脉冲. 相似文献