FeCoBSiO2磁性纳米颗粒膜的微波电磁特性

采用交替沉积磁控溅射工艺制备了超薄多层的FeCoBSiO2磁性纳米颗粒膜.利用x射线衍射仪、扫描探针显微镜、透射电子显微镜分析了薄膜的微结构和形貌特征.采用振动样品磁强计、四探针法、微波矢量分析仪及谐振腔法测量薄膜试样的磁电性能和微波复磁导率.重点对SiO2介质相含量、薄膜微结构对电磁性能产生重要影响的机理做了分析和探讨.结果 表明：这类FeCoBSiO2磁性纳米颗粒膜具有良好的软磁性能和高频电磁性能，2GHz时的 磁导率μ′高于70，可以应用于高频微磁器件或微波吸收材料的设计. 关键词： 磁性纳米颗粒膜 高频特性 复磁导率 磁控溅射     

Microwave properties and surface topography of softmagnetic films with high resistivity

A single layer of CoFeB and a multilayer of CoFeB--MgO films are prepared by means of DC/RF magnetron sputter deposition. The excellent microwave properties and high electrical resistivity are simultaneously achieved in the discontinuous multilayer structure of [Co₄₄Fe₄₄B₁₂(0.7nm)/MgO(0.4nm)]_{40} film. This film has a high permeability ({μ \prime }) (larger than 100 below 2.1GHz), a high magnetic loss (μ') (larger than 100 in a range from 1.5 to 3.3GHz), a resistivity of 3.3× 10^*