Microwave properties and surface topography of softmagnetic films with high resistivity |
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| Authors: | Ma Qiang Jiang Jian-Jun Bie Shao-Wei Tian Bin Liang Pei and He Hua-Hui |
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| Affiliation: | Department of Electronic Science and Technology, Huazhong
University of Science and Technology, Wuhan 430074, China |
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| Abstract: | A single layer of CoFeB and a multilayer of CoFeB--MgO films are
prepared by means of DC/RF magnetron sputter deposition. The
excellent microwave properties and high electrical resistivity are
simultaneously achieved in the discontinuous multilayer structure of
Co$_{44}$Fe$_{44}$B$_{12}$(0.7\,nm)/MgO(0.4\,nm)]$_{40}$ film. This
film has a high permeability ({$\mu \prime $}) (larger than 100
below 2.1\,GHz), a high magnetic loss ($\mu'$) (larger than 100 in
a range from 1.5 to 3.3\,GHz), a resistivity of 3.3$\times 10^{3}\mu
\Omega \cdot$\,cm, a saturation magnetization of 1.2\,T, and an
in-plane uniaxial anisotropy field of 5.5\,kA/m. The microstructure
and the surface topography of the film are also analysed. The
relatively large surface roughness for the discontinuous film is
responsible for the wide frequency band of magnetic loss. The
magnetic loss and the high resistivity indicate that the
discontinuous CoFeB--MgO multilayer film has potential applications
in microwave absorbers and electromagnetic interference (EMI)
shielding materials in a GHz frequency range. |
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| Keywords: | soft magnetic films microwave
properties resistivity roughness |
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