Heterodyne interferometer with two spatial-separated polarization beams for nanometrology

An interferometer having accuracy in displacement measurement of <1 nm is necessary in nanometrology. To meet the requirement, the periodic nonlinearity mainly caused by polarization and frequency mixings should be less than deep sub-nanometer. In this paper, two spatial-separated polarization beams are used to avoid mixings and then the periodic nonlinearity. The developed interferometer demonstrates a periodic nonlinearity of about 25 pm and a 2 pm/Hz in displacement noise level.     

卢瑟福散射实验装置的研制

研制了一种鼎瑟福散的实验装置,并介绍了其实验结果,由于要用了步进电机和半导体探测器,该装置具有结构紧凑,操作简便等优点。     

Phase measurement accuracy of feedback interferometers

Feedback interferometers are described with specific reference to potential applications in micro-machines. A theoretical analysis is developed to determine the linearity, stability, and noise performance of this type of interferometer. The theoretical analysis was tested using a prototype high-precision feedback interferometer which showed that, at a feedback loop gain which enabled the system to track 6 fringes, the linearity of the interferometer was better than λ/100 and single phase measurements could be made with an accuracy of λ/80.     

Continuous wave laser wavelength measurement using the travelling Michelson interferometer

The general design, operating principles, and accuracy limitations of cw laser wavemeters based on the Michelson interferometer are discussed. Device construction and operating practicalities are illustrated by reference to an automatic system built to monitor the wavelength of a Coherent 599-21 single-mode dye laser.     

相移测量技术中相移器研究

本文介绍一种用于相移测量技术的相移器。该相移器由计算机通过Ｄ／Ａ接口板自动控制输出电压幅度，其电路采用闭环控制，位移由压电晶体产生，具有很高的电压稳定度（０１％）和较小的相移误差（小于３°）。描述相移器的结构、驱动源工作原理及相移器标定方法     

Speckle shear interferometry

A number of speckle shear methods and their applications to ndt are discussed. Experiments using multiple apertures with custom-made optical elements have shown that in-plane displacement, slope and curvature patterns can be obtained by filtering through appropriate haloes.     

Two-Period Interference Fringe Interferometry for Step-Profile Altitude Difference Measurement

This paper proposes a new measuring method called two-period interference fringe interferometry, for a step-profile altitude difference measurement. The principle of the method is different from that of the two-wavelength interferometry which is widely known. The two interference fringes with only slight difference between their spatial periods are obtained by turning a binary step-grating, and they produce a synthetic equivalent period much longer than either of the two periods alone. The interference fringes are produced by the ±1st-order beams diffracted from the grating. The intensity distribution of the interference pattern is independent of the wavelength of the laser-diode light source used. The measuring range of this method is much larger than that of the two-wavelength interferometery. Sinusoical phase modulating technique is easily applied to detect the phase distribution of the interference pattern by vibrating the grating sinusoidally. A plane reflector of 3mm thickness is measured to verify this novel method.     

信噪比对偏振耦合测试影响分析

以白光麦克尔逊干涉仪对双折射保偏光纤的偏振耦合进行测试,并基于仪器结构建立了测试扫描结果的数学模型.分析及仿真了信噪比对耦合强度及耦合位置检测的影响大小及变化趋势.信噪比大于32dB,可满足偏振耦合测试的要求.     

Measurement Accuracy in Phase-Shifting Point Diffraction Interferometer with Two Optical Fibers

A phase-shifting point diffraction interferometer (PS/PDI) with point sources of two single mode optical fibers has been developed, which will be appropriate for the surface figure measurement of large aperture optics on a sub-nanometer scale. To reduce the measurement error factors, a fiber optic plate (FOP) is used as a projection plane for interference pattern. Errors caused by imperfection of optical alignment, such as position of point sources and tilt of FOP, are minimized by analyzing the measured phase data with an original method. Measurement accuracy in the PS/ PDI is estimated with the interference pattern produced by the two optical fiber sources. If inhomogeneity of the FOP and a systematic error of the PS/PDI are eliminated, the measurement accuracy of the present system is estimated to be less than 4nm P-V and 0.7nm rms, respectively, at a measurement wavelength of 632.8 nm.     

气体靶密度的数值计算与实验研究

 采用了1维简单模型来模拟气体靶的空间密度分布情况，并且该计算值得到了实验的验证。使用M-Z干涉仪诊断锥型喷嘴喷射的气体靶密度分布，得到了不同压力和不同延时下的干涉图样。自行编写了实验数据处理程序，得到了不同情况下气体密度的空间分布。在相互作用实验中，由气体分子密度随压力的变化，可以确定合适的压力，以获得预期的气体靶密度；由气体分子密度随时间的变化，可以确定激光与气体的作用时刻。