Background and amplitude encoded fringe patterns for 3D surface-shape measurement

This paper presents a new fringe projection method for surface-shape measurement that uses background and amplitude encoded high-frequency fringe patterns. The background and amplitude, combined as a codeword, identify the wrapped phase fringe order to partially unwrap the phase to a low frequency. The low-frequency wrapped phase map is then directly used to reconstruct the surface based on geometry constraints without requiring additional images as in other temporal phase-unwrapping methods. Measurements performed on a double-hemisphere, mask, and manikin head, using projected fringe patterns with 48 periods, demonstrated the ability of the method to perform 3D shape measurement with only four projected patterns and captured images, using a single camera and projector.     

集成聚焦式测头的纳米测量机用于台阶高度标准的评价

利用集成聚焦式测头的纳米测量机实现了高精度的台阶高度标准评价,该系统的测量范围可以达到25mm×25mm×5mm.描述了纳米测量机的工作原理,通过内嵌激光干涉仪和角度传感器的实时测量与反馈,实现高精度定位与扫描.聚焦式测头只作为零点传感器,与3个激光轴交于一点,避免了阿贝误差影响.通过将聚焦式测头的输出信号引入到纳米测量机的数字信号控制器中,实现定位系统的辅助测量,减小了聚焦式测头的非线性对测量结果的影响.根据ISO 5436-1:2000的评价方法对经过标定的台阶高度进行评价,14次测量的均方根(RMS)偏差为0.237nm.     

量子真空计量标准中的非极性稀薄气体折射率测量研究

为进一步提高真空量值的复现性和准确性,最新研究采用量子技术实现对真空量值的测量与表征.该方法利用Fabry-Perot谐振腔实现腔内气体折射率的精密测量,并反演出气体密度,进而获得对应的真空量值,其中气体折射率的测量是影响真空量值准确性的关键.本文基于第一性原理,利用从头计算理论计算了在已知压力和温度条件下的氦气折射率,给出腔内气体压力与折射率关系的表达式,并利用基于Fabry-Perot激光谐振腔的真空测量装置,通过双腔谐振激光拍频精确测量了充气前后谐振激光频率的变化,测出了氦气折射率,并分析了测量不确定度.将理论计算值与实验测量值进行了对比分析,得出了制约准确度提高的主要因素,并提出了修正方法.     

噪声对一种三粒子量子探针态的影响

量子度量学是研究量子测量与统计推断的一门学科,主要利用量子手段来提高参数估计的精度,在量子信息处理与测量中起到关键作用.量子参数估计的一般过程包含四个步骤:探针态的制备、参数化过程、对参数化后的输出态进行测量以及根据测量结果估计待测参数.其中探针态的选取对测量精度起着至关重要的作用.然而在实际的量子探针态的制备过程中,初始探针态会受到环境噪声的影响.目前人们已经研究了W态与Greenberger-Horne-Zeilinger(GHZ)态的量子Fisher信息(QFI)在典型噪声通道下的变化行为.由于W态与GHZ态有着不同的纠缠性质,对于W态与GHZ态的叠加态的QFI动力学研究具有重要的实际意义.故此,本文主要研究典型噪声通道对这两种状态的叠加态的QFI动力学行为的影响,得出了QFI随噪声参数的变化行为.结果表明,叠加态中W态组分可明显对抗相位阻尼噪声对探针态的QFI的影响,而其中的GHZ态组分可明显对抗振幅阻尼噪声的影响,从而为在实际环境中选取高精度的参数估计过程提供参考.     

飞秒光梳和碘稳频532nm Nd:YAG激光频率的测量

报道了中国计量科学研究院研制的基于掺钛蓝宝石(Ti:Sapphire)锁模飞秒脉冲激光器的飞秒光学频率梳装置，并利用此装置测量了碘稳频532nm(¹²⁷I₂R(56)32-10) Nd∶YAG固体激光器的频率，结果为 563260223512991±20Hz,相对不确定度为3.6×10^-14.这一数值是直接溯源到铯原子微波频率基准的光学频率测量结果.     

Accelerating the development of phase-change random access memory with in-fab plasma profiling time-of-flight mass spectrometry

We demonstrate the potential of using plasma profiling time-of-flight mass spectrometry (PP-TOFMS) to accelerate process developments for phase-change random access memory (PCRAM) applications, which require advanced materials with composition-driven properties. We assess the performances of PP-TOFMS for the chemical depth-profiling of GeSbTe phase change materials, first after deposition steps to investigate the top surface layer and the incorporation of silicon into the amorphous matrix, then after the thermal annealing step to refine in situ capping strategies, and finally in close loop with etching process steps. Comparison of reference-free semiquantitative PP-TOFMS analysis based on ion beam ratio with Rutherford backscattering spectrometry shows remarkable agreement (~10% relative). PP-TOFMS proves to be a fast screening tool, which allows process monitoring and selection of samples that indeed need more complex analysis.     

Phase locked loop profilometry

An innovative technique for obtaining automatic three-dimensional shape information of a diffuse surface is presented. The technique is based on a new approach of phase measuring from a fringe pattern. The target to be studied is first modulated by projecting a linear grating onto its surface. The linear fringes are deformed according to the surface shape. Demodulation is carried out by determining the phase of these deformed fringes using a novel digital phase locked loop demodulation algorithm. The technique has the main advantage that the traditional phase unwrapping process is not required. The phase is determined continuously as the algorithm scans the two-dimensional fringe pattern. Owing to its sequential nature, this phase detection technique can be implemented using a special purpose video processor for phase determination at video rates, making it a very fast algorithm. The algorithm along with experimental results of real surface profiles are presented.     

半导体激光器及其在干涉计量中的应用

本文介绍了半导体激光器的典型特性,探讨了用其相干长度进行干涉计量的新方法,并进行了眼球光学长度的测量的实验。     

Speckle shearography using a multiband light source

Applications for optical metrology usually use lasers as light sources, because of the excellent spatial and temporal coherence of the emitted light. By comparison, the demands of speckle shearography concerning the coherence of the light source are low. This enables certain white-light sources to be an option.

In this paper, the feasibility of low coherence shearography is shown. For this purpose an experimental setup is designed, composed of a mercury arc lamp, a spatial filter and a Michelson interferometer. With respect to speckle shearography, important characteristics of the light source are described and the mercury arc lamp is shown to be suitable. Finally, some experimental investigations of an object under load are presented.     

Four-pulse interferometric recordings of transient events by pulsed TV holography

With traditional double-pulsed holographic interferometry or pulsed TV holography, the experiment usually has to be repeated to allow the recording of a time sequence of interferograms of the event. With the proposed technique a sequence of four interferograms of a solitary transient event is measured. A twin oscillator, injection-seeded, pulsed Nd:YAG laser is incorporated into a pulsed TV holography set-up. With orthogonal polarisation and double pulsing of each of the two channels of the laser, four pulses are recorded on two separate CCD-frames. Four interferograms of a laser-impacted plate obtained from the same experiment, show how the bending waves develop and propagate in the plate.