Diffraction errors in micromirror-array based wavefront generation

Using Laser-based Speckle-Interferometers, the shape of optically rough surfaces can be measured precisely and contactlessly from variable measuring distances even in regions of difficult access. This work is concerned with the integration of a micromirror array (MMA) into an electronic Speckle-Pattern-Interferometer. With the adaptive optics, it is intended to adapt the phasefront of a reference wave to critical surface areas of the measurement object. Yet, due to the topography of the MMA, diffraction effects occur which affect the phase and intensity of the generated wavefront. We demonstrate how these diffraction effects can be efficiently modelled by a Fraunhofer diffraction method. We compare the results of this model to theoretical data obtained by a numerical Fresnel diffraction model and to measurement data obtained from a measurement setup incorporating a multi mirror array.     

Quadrature demodulation technique for self-mixing interferometry displacement sensor

A new, to the best of our knowledge, signal processing method based on quadrature demodulation technique is presented for laser diode self-mixing interferometry(LDSMI) displacement sensor. Phase modulation of the laser beam is obtained by an electro-optic modulator (EOM) in the external cavity. Detection of the target's displacement can be easily achieved by sampling the interference signal at those times which satisfied certain conditions. The major advantage of the technique is that it does not involve any complicated calculation and insensitive to the sampling error. Experimental results show that the proposed method can effectively improve the displacement measurement resolution of the laser diode self-mixing displacement sensor to a few nanometers.     

基于低通滤波的相位掩模干涉图相位解调方法

 传统的四步相移算法在分析相位掩模干涉图时存在相移值误差、分辨力降低和相干噪声等不足,从而影响了动态干涉仪的性能。为了提高相位掩模干涉图的分析精度,提出了一种基于低通滤波的相位解调方法。该方法根据相位掩模引入相位的空间频率远大于被测相位空间频率的最大值,采用低通滤波的方法提取相位信息。数值分析结果表明,该方法的精度高于传统四步相移算法。分析干涉图的信噪比,合理选择低通滤波器,可进一步提高相位解调的精度。     

基于解耦差分泽尼克待定系数法的二维横向剪切波面重建算法

横向剪切干涉术是一种自参考干涉计量技术,其原理是被检测波前与其自身被剪开的波前之间在重叠范围内相干涉,由干涉图得到两相互剪切波前的波前差,通过波面重建算法得到待测波面.在波面重建算法中,泽尼克待定系数法是其中的一种.分析了横向剪切干涉技术的测量原理;提出了一种新的基于解耦差分泽尼克待定系数法的二维横向剪切波面重建算法....     

CAE-based compensation methods of non-uniform pulse laser beam profiles

Applying the pulse laser to speckle methods, non-uniformities of the laser beam profiles and the intensities between each laser pulse have unpleasant consequences on the intensity distribution of the recorded images and following on the assigned fringes of the corresponding subtractive result. This contribution introduces a computer-based technique for compensating this technical and physical problem, so that the fringe quality is improved, even if the homogeneity of the laser beam profiles is on such low level, that the conventional (subtractive) technique fails. The solution is based on algorithms, which refines each intensity distribution and is comparable with the known shading correction.     

Optical inspection and characterization of microoptics using confocal microscopy

With the growing demand for microoptics in different areas the importance of the characterization increases. Methods for a fast defect detection in microlens arrays are developed. We present a technique where the confocal principle is applied for determining the variation and the absolute value of the focal length. Additionally, using a self–filtering method the deviation of the periodic structure of microlens arrays is investigated theoretically and experimentally. Point-like defects as well as aberrations have been detected. The introduced methods allow the fast, parallel characterization of microlens arrays.     

光源编码的白光散斑剪切干涉计量术

本文提出了一种用非相干光源照明进行剪切干涉计量的方法—光源编码的白光散斑剪切干涉计量术.它采用光栅对光源进行编码以提高空间相干性,使物体的两个剪切像的波面部分相干叠加,以实现剪切干涉.     

Speckle interferometry for measurement of continuous deformations

Improvements of a method for measurement of continuous displacements and deformations with digital phase shifting speckle pattern interferometry are presented. The method is based on an algorithm that, with the knowledge of the initial phase, only needs one image at a time to evaluate continuos phase changes due to object deformations. In the improved method, the initial random phase of the speckle pattern is evaluated using a number of phase-shifted images before the deformation under study. This is used for increasing the accuracy of the initial phase estimation and reducing influences from image noise and other measurement disturbances. The phase-shifted speckle patterns are used as references for comparison with the speckle patterns of the deformed object, thereby increasing the reliability and accuracy of the phase estimations of the deformed patterns. The technique can be used for measuring deformations such as transients and other dynamic events, heat expansion as well as other phenomena where it is difficult to accomplish phase shifting during deformation.