铟封前后透射式GaAs光电阴极光谱响应特性的测试与分析

利用自行研制的光谱响应测试仪工程化样机,对透射式GaAs光电阴极在高温激活结束、低温激活结束以及铟封成管后的光谱响应特性进行了测试。结果显示,铟封后阴极整个响应波段的光谱响应下降,长波响应受到最显著的影响,表现为800~815 nm之间长波响应大幅度衰减,截止波长和峰值波长向短波移动,峰值响应和积分灵敏度减小,最终的光谱响应曲线变得平坦。阴极参量的计算结果反映铟封后阴极的表面逸出几率降低,说明铟封引起阴极表面激活层发生变化,使得能量较低的长波段光生电子不容易逸出,阴极长波响应和灵敏度随之降低。进一步分析了铟封过程中影响阴极表面激活层的因素。     

光刻机硅片表面不平度原位检测技术

随着光刻特征尺寸的不断减小,硅片表面不平度对光刻性能的影响越来越显著.该文提出了一种新的硅片表面不平度的原位检测技术本文在分析特殊测试标记成像规律的基础上,讨论了测试标记的对准位置偏移量与硅片表面起伏高度的变化规律,提出了一种新的硅片表面不平度原位检测技术.实验表明,该技术可实现硅片表面不平度及硅片表面形貌的高准确度原位测量.该技术考虑了光刻机承片台吸附力的非均匀性对硅片表面不平度的影响,更真实反映曝光工作状态下的硅片表面不平度大小.与现有的原位检测方法相比,硅片表面不平度的测量空间分辨率提高了1.67%倍,可实现硅片表面形貌的原位检测.     

光学平面绝对检验方法的研究

应用两种方法对三个高精度平面进行了测试。第一种方法是Fritz的三面互检法,它利用Zernike多项式的特性拟合三个面四次组合测量得到的干涉图,然后求出三个面的Zernike多项式系数,从而得到三个面的面形偏差。第二种方法是奇偶函数法,根据函数的奇偶性,把平面的面形函数分解为四类:偶奇、奇偶、偶偶和奇奇函数,分别求出各分量,从而得到三个面的三维面形偏差。对两种方法都编制了理论模拟和实测程序,并进行了实验,实现了无参考面的高精度平面面形测试。     

替代法测量微安表内阻的不确定度分析

在测量微安表内阻的众多方法中,替代法是最简单的方法。本文全面分析了影响测量结果不确定度的因素,求出了实验测量的最佳条件,计算了普通仪器组合下测量结果的相对不确定度。     

Broadband Analysis of Holographic Power Combining Circuits

Holography is a promising technique for power combining applications in the frequency range of short millimeter and submillimeter waves. In this paper, quasi-optical holographic power combining circuits are investigated. An equivalent network is utilized which rigorously models horn arrays and biperiodic dielectric structures in order to design computer-generated holograms. We apply the network model to a 5-element quasi-optical power combiner and demonstrate its capability. The hologram is designed for 150 GHz and has an efficiency of 92.5 % with a 90 % bandwidth of 5.3 %. With the aid of a broadband waveguide power divider and a vector field measurement system, the circuit is analyzed.     

Simultaneous Measurement of Particle Size and Particle Velocity by the Spatial Filtering Technique

The objective of this study was to compare the measuring results of a fiber‐optical probe based on a modified spatial filtering technique with given size distributions of different test powders and also with particle velocity values of laser Doppler measurements. Fiber‐optical spatial filtering velocimetry was modified by fiber‐optical spot scanning in order to determine simultaneously the size and the velocity of particles. The fiber‐optical probe system can be used as an in‐line measuring device for sizing of particles in different technical applications. Spherical test particles were narrow‐sized glass beads in the range 30–100 μm and irregularly shaped test particles were limestone particles in the range 10–600 μm. Particles were dispersed by a brush disperser and the measurements were carried out at a fixed position in a free particle‐laden air stream. Owing to the measurement of chord lengths and to the influence of diffraction and divergent angle, the probe results show differences from the given test particle sizes. Owing to the particle‐probe collisions, the mean velocity determined by the probe is smaller than the laser Doppler mean velocity.     

中心—焦点区分问题的I l'yashenko算法

对二维平面系统的二维系统的中心焦点区分问题 ,I l'yashenko曾建议一个算法 ,本文给出此法的详细证明 .据此 ,我们讨论了区分问题在 Arnold意义下的代数可解性与不可解性     

利用莫尔条纹的准正弦特性的三维轮廓术

分析了两个矩形光栅迭合产生的莫尔条纹的光强分布特性，通过选择适当的光栅参数，可得到一个近似的正弦分划板，并把它用于三维面形测量中，实验结果表明，这种方法简单，易于自动处理，有广泛的实用价值。     

Multivariate Gini Indices

Two extensions of the univariate Gini index are considered:R_D, based on expected distance between two independent vectors from the same distribution with finite meanμ ^d; andR_V, related to the expected volume of the simplex formed fromd+1 independent such vectors. A new characterization ofR_Das proportional to a univariate Gini index for a particular linear combination of attributes relates it to the Lorenz zonoid. TheLorenz zonoidwas suggested as a multivariate generalization of the Lorenz curve.R_Vis, up to scaling, the volume of the Lorenz zonoid plus a unit cube of full dimension. Whend=1, bothR_DandR_Vequal twice the area between the usual Lorenz curve and the line of zero disparity. Whend>1, they are different, but inherit properties of the univariate Gini index and are related via the Lorenz zonoid:R_Dis proportional to the average of the areas of some two-dimensioned projections of the lift zonoid, whileR_Vis the average of the volumes of projections of the Lorenz zonoid over all coordinate subspaces.