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941.
In this work, we have studied thermal stability of nanoscale Ag metallization and its contact with CoSi2 in heat-treated Ag(50 nm)/W(10 nm)/Co(10 nm)/Si(1 0 0) multilayer fabricated by sputtering method. To evaluate thermal stability of the systems, heat-treatment was performed from 300 to 900 °C in an N2 ambient for 30 min. All the samples were analyzed by four-point-probe sheet resistance measurement (Rs), Rutherford backscattering spectrometry (RBS), X-ray diffractometry (XRD), and atomic force microscopy (AFM). Based on our data analysis, no interdiffiusion, phase formation, and Rs variation was observed up to 500 °C in which the Ag layer showed a (1 1 1) preferred crystallographic orientation with a smooth surface and Rs of about 1 Ω/□. At 600 °C, a sharp increase of Rs value was occurred due to initiation of surface agglomeration, WSi2 formation, and interdiffusion between the layers. Using XRD spectra, CoSi2 formed at the Co/Si interface preventing W silicide formation at 750 and 800 °C. Meantime, RBS analysis showed that in this temperature range, the W acts as a cap layer, so that we have obtained a W encapsulated Ag/CoSi2 contact with a smooth surface. At 900 °C, the CoSi2 layer decomposed and the layers totally mixed. Therefore, we have shown that in Ag/W/Co/Si(1 0 0) multilayer, the Ag nano-layer is thermally stable up to 500 °C, and formation of W-capped Ag/CoSi2 contact with Rs of 2 Ω/□ has been occurred at 750-800 °C. 相似文献
942.
J. Jiang B.Y. Jiang C.X. Ren F.M. Zhang T. Feng X. Wang X.H. Liu S.C. Zou 《Applied Surface Science》2006,252(10):3642-3646
Hafnium and platinum were deposited onto molybdenum grids by ion-beam assisted deposition method. Electron-emission characteristics from molybdenum grids with Hf and Pt films, which were contaminated by active electron-emission substances (Ba, BaO) of the cathode, were measured using analogous diode method. The surfaces of grids were analyzed by X-ray diffraction. The results revealed that the reaction between BaO and Hf formed BaHfO3 compound, which greatly reduced the accumulation of BaO on the surface and accordingly decreased grid emission. In contrast, Ba were formed by the decomposition of BaO on the surface of Pt film under high temperature and re-evaporated from its surface, which reduced the active electron-emission substances on the surface of the grid and effectively restrained grid emission. Their mechanisms for grid-emission suppression are discussed and a good method to develop new grid-coating materials is suggested. 相似文献
943.
Ignacio Moreno Pablo Velásquez Daniel Puerto Asticio Vargas 《Optics Communications》2006,260(1):12-18
In this work, we show a very simple birefringent filter useful to modulate a broadband light spectrum. We first show the generation of various oscillating spectra using two identical multiple-order waveplates. In particular a sinusoidal broadband spectrum with a rapid oscillation is obtained. This spectrum is amplitude modulated by adding another waveplate to the system. This waveplate has a small phase shift, and with the proper orientation generates amplitude beats on the broadband spectrum. Finally, we show how this system can be voltage controlled by means of a ferroelectric liquid crystal modulator. We experimentally demonstrate this behavior with the aid of a portable spectrophotometer, and we provide a theoretical explanation on the basis of the Jones matrix formalism. 相似文献
944.
考虑二阶半线性中立型差分方程给出了方程(1)的解的振动性的充分条件.所有结果推广和改进了关于中立和时滞差分方程已有结果. 相似文献
945.
946.
Using kinetic Monte Carlo method, we have simulated a pulsed energetic growth process in pulsed laser deposition. During the growth of film, substrate temperature mainly influences upon film morphology by directly enhancing the adatom mobility through the temperature-dependent thermal vibration. By contrast, the effect of incidence kinetic energy on film growth is complex resulting from the collisions between the incident particles and the adatoms. The results show that improving incident kinetic energy cannot significantly accelerate the migration rate of adatom but change surface microstructure and promote single adatom formation resulting in more island aggregation density. Moreover, since pulse-influx characterizes pulsed laser deposition, the intensity per pulse contributes to the evolvement of nucleation density and the results illustrate that a general scaling law different from ordinary power law still exists in energetic growth of pulsed laser deposition. 相似文献
947.
Wen Bin CUI Jie ZHOU Lei CHEN Xiao Bin DENG Chun GUO 《中国化学快报》2006,17(8):999-1001
Metal porphyrins are natural antioxidant reagent1-3. However, due to the characteristics of structures, they are only soluble in inorganic acids and part of polar organic solvents. Thus, it is limited to be used as effective pharmaceutical preparations. T… 相似文献
948.
In this paper, it is shown that some of the results of torus actions on Poincaré duality spaces, Borel’s dimension formula
and topological splitting principle to local weights, hold if ‘torus’ is replaced by ‘pro-torus’. 相似文献
949.
本文对几类B值小指标鞅空间建立了原子分解定理,利用原子分解讨论了它们之间的相互嵌入关系,其原子分解的存在性和它们之间的关系均与Banach空间的凸性和光滑性有密切联系. 相似文献
950.