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1.
Auger electron spectroscopy (AES) sputter depth profiling of an ISO reference material of the GaAs/AlAs superlattice was investigated using low‐energy Ar+ ions. Although a high depth resolution of ~1.0 nm was obtained at the GaAs/AlAs interface under 100 eV Ar+ ion irradiation, deterioration of the depth resolution was observed at the AlAs/GaAs interface. The Auger peak profile revealed that the enrichment of Al due to preferential sputtering occurred during sputter etching of the AlAs layer only under 100 eV Ar+ ion irradiation. In addition, a significant difference in the etching rates between the AlAs and GaAs layers was observed for low‐energy ion irradiation. Deterioration of the depth resolution under 100 eV Ar+ ion irradiation is attributed to the preferential sputtering and the difference in the etching rate. The present results suggest that the effects induced by the preferential sputtering and the significant difference in the etching rate should be taken into account to optimize ion etching conditions using the GaAs/AlAs reference material under low‐energy ion irradiation. Copyright © 2005 John Wiley & Sons, Ltd.  相似文献   

2.
Dependences of the depth resolution in Auger electron spectroscopy sputter‐depth profiling of a GaAs/AlAs superlattice reference material on the incident angle and energy of primary Ar+ ions were investigated. The results revealed that the depth resolution is improved for the lower primary energy as a square root of the primary energy of ions at both the incident angles of 50° and 70° , except for 100 eV at 50° , where the significant deterioration of the depth resolution is induced by the preferential sputtering of As in AlAs, and the difference in the etching rate between GaAs and AlAs. The deterioration of the depth resolution, i.e. the difference in the etching rate and the preferential sputtering, observed for 100 eV at 50° was suppressed by changing the incident angle of ions from 50° to 70° , resulting in the high‐depth resolution of ~1.3 nm. The present results revealed that the glancing incidence of primary ions is effective to not only reducing the atomic mixing but also suppressing the difference in the etching rates between GaAs and AlAs and the preferential sputtering in the GaAs/AlAs multilayered system. The results also suggest that careful attention is required for the optimization of conditions of sputter‐depth profiling using GaAs/AlAs superlattice materials under low‐energy ion irradiation. Copyright © 2009 John Wiley & Sons, Ltd.  相似文献   

3.
An effect of measurement conditions on the depth resolution was investigated for dual‐beam time of flight‐secondary ion mass spectrometry depth profiling of delta‐doped‐boron multi‐layers in silicon with a low‐energy sputter ion (200 eV – 2 keV O2+) and with a high‐energy primary ion (30 keV Bi+). The depth resolution was evaluated by the intensity ratio of the first peak and the subsequent valley in B+ depth profile for each measurement condition. In the case of sputtering with the low energy of 250 eV, the depth resolution was found to be affected by the damage with the high‐energy primary ion (Bi+) and was found to be correlated to the ratio of current density of sputter ion to primary ion. From the depth profiles of implanted Bi+ primary ion remaining at the analysis area, it was proposed that the influence of high‐energy primary ion to the depth resolution can be explained with a damage accumulation model. Copyright © 2013 John Wiley & Sons, Ltd.  相似文献   

4.
A Monte Carlo (MC) simulation program written in C++ has been newly developed to describe the dynamic processes of depth profiling with low energy ions. This MC simulation was applied to the depth profiling of GaAs/AlAs reference material for Ne+, Ar+, and Xe+ ions to elucidate the depth resolution attained by surface analytical techniques. The result clearly predicts that there is a considerable difference between the depth resolutions estimated from the leading and trailing edges of Ne+ and Xe+ ions, whereas the difference is quite small for Ar+ ions. Systematic investigation of the dependence of theoretical depth resolution on primary ion energy has revealed that the preferential sputtering primarily caused by the difference in energy transfer to target atoms through elastic collisions between incident ions and target atoms results in the difference between the leading and trailing edges. The inclusion of other factors, e.g. preferential sputtering effect caused by the metallization of Al atoms on the topmost surface, etc. for further improvement of the MC simulation modeling before accommodating quantitative arguments on the depth resolution is strongly recommended. Copyright © 2006 John Wiley & Sons, Ltd.  相似文献   

5.
Focused ion beam implantation of 30‐keV Ga+ ions in single‐crystalline Si and Ge was investigated by SIMS, using Cs+ primary ions for sputtering. Nine different implantation fluences ranging from 1 × 1013 to 1 × 1017 Ga+‐ions/cm2 were used, with implanted areas of 40 × 40 µm2. The Ga concentration distributions of these implants were determined by SIMS depth profiling. Such 30‐keV Ga implantations were also simulated by a dynamic Monte‐Carlo code that takes into account the gradual change of the near‐surface composition due to the Ga incorporation. In both approaches, an essentially linear increase of the Ga peak concentrations with fluence is found up to ~1 × 1016cm?2; for higher fluences, the Ga content approaches a saturation level which is reached at about (1–2) × 1017cm?2. The measured and simulated peak concentrations of the Ga distributions are in good agreement. The most probable ranges obtained from the experiments correspond closely with the respective values from the simulations. The surface morphology caused by Ga+ implantation was investigated by atomic force microscopy (AFM). The AFM data indicate that for low fluences (<3 × 1015cm?2) the surface within the implanted areas is growing outward (i.e. is swelling). For increasingly higher fluences, sputter‐induced erosion of the surface becomes dominant and distinct craters are formed for fluences above ~1 × 1016cm?2. At the boundary of the implanted region a wall‐like structure is found to form upon Ga implantation; its height is growing with increasing fluence, reaching a value of ~15 nm at 1 × 1017 Ga+‐ions/cm2. Copyright © 2008 John Wiley & Sons, Ltd.  相似文献   

6.
We report the morphological changes on Ge surfaces upon 50 keV Ar+ and 100 keV Kr+ beam irradiation at 60° angle of incidence. The Ge surfaces having three different amorphous–crystalline (a/c) interfaces achieved by the pre‐irradiation of 50 keV Ar+ beam at 0°, 30° and 60° with a constant fluence of 5 × 1016 ions/cm2 were further processed by the same beam at higher fluences viz. 3 × 1017, 5 × 1017, 7 × 1017 and 9 × 1017 ions/cm2 to understand the mechanism of nano‐scale surface patterning. The Kr+ beam irradiation was carried out only on three fresh Ge surfaces with ion fluences of 3 × 1017, 5 × 1017 and 9 × 1017 ions/cm2 to compare the influence of projectile mass on surface patterning. Irrespective of the depth of a/c interface, the nanoscale surface patterning was completely missing on Ge surface with Ar+ beam irradiation. However, the surface patterning was evidenced upon Kr+ beam irradiation with similar ion fluences. The wavelength and the amplitude of the ripples were found to increase with increasing ion fluence. In the paper, the mass redistribution at a/c interface, the incompressible solid flow through amorphous layer, the angular distribution of sputtering/backscattering yields and the generation of non‐uniform stress across the amorphous layer are discussed, particularly in analogy with low energy experiments, to get better understanding of the mechanism of nanoscale surface patterning by the ion beams. Copyright © 2016 John Wiley & Sons, Ltd.  相似文献   

7.
The sputter damage profiles of Si(100) by low‐energy O2+ and Ar+ ion bombardment at various angles of incidence were measured using medium‐energy ion scattering spectroscopy. It was observed that the damaged Si surface layer can be minimized down to 0.5–0.6 nm with grazing‐incident 500 eV Ar+ and O2+ ions at 80°. To illustrate how the damaged layer thickness can be decreased down to 0.5 nm, molecular dynamics simulations were used. The SIMS depth resolution estimated with trailing‐edge decay length for a Ga delta‐layer in Si with grazing‐incident 650 eV O2+ was 0.9 nm, which is in good agreement with the measured damaged layer thickness. Copyright © 2004 John Wiley & Sons, Ltd.  相似文献   

8.
The effect of Xe+ bombardment on the surface morphology of four different polymers, polystyrene (PS), poly(phenylene oxide), polyisobutylene, and polydimethylsiloxane, was investigated in ion energy and fluence ranges of interest for secondary ion mass spectrometry depth‐profiling analysis. Atomic force microscopy (AFM) was applied to analyze the surface topography of pristine and irradiated polymers. AFM analyses of nonirradiated polymer films showed a feature‐free surface with different smoothness. We studied the influence of different Xe+ beam parameters, including the incidence angle, ion energy (660–4000 eV), current density (0.5 × 102 to 8.7 × 102 nA/cm2), and ion fluence (4 × 1014 to 2 × 1017 ion/cm2). Xe+ bombardment of PS with 3–4 keV at a high current density did not induce any change in the surface morphology. Similarly, for ion irradiation with lower energy, no surface morphology change was found with a current density higher than 2.6 × 102 nA/cm2 and an ion fluence up to 4 × 1016 ion/cm2. However, Xe+ irradiation with a lower current density and a higher ion fluence led to topography development for all of the polymers. The roughness of the polymer surface increased, and well‐defined patterns appeared. The surface roughness increased with ion irradiation fluence and with the decrease of the current density. A pattern orientation along the beam direction was visible for inclined incidence between 15° and 45° with respect to the surface normal. Orientation was not seen at normal incidence. The surface topography development could be explained on the basis of the balance between surface damage and sputtering induced by the primary ion beam and redeposition–adsorption from the gas phase. Time‐of‐flight secondary ion mass spectrometry analyses of irradiated PS showed strong surface modifications of the molecular structure and the presence of new material. © 2000 John Wiley & Sons, Inc. J Polym Sci B: Polym Phys 39: 314–325, 2001  相似文献   

9.
Polyatomic primary ions offer low penetration depth and high damage removal rates in some polymers, facilitating their use in the molecular depth profiling of these polymers by secondary ion mass spectrometry (SIMS). This study is the second in a series of systematic characterizations of the effect of polymer chemistry on degradation under polyatomic primary ion bombardment. In this study, time‐of‐flight SIMS (ToF‐SIMS) was used to measure the damage of ~90 nm thick spin‐cast poly(methyl methacrylate), poly(n‐butyl methacrylate), poly(n‐octyl methacrylate) and poly(n‐dodecyl methacrylate) films under extended (~2 × 1014 ions cm?2) 5 keV SF5+ bombardment. The degradation of the poly(n‐alkyl methacrylates) were compared to determine the effect of the length of the alkyl pendant group on their degradation under SF5+ bombardment. The sputter rate and stability of the characteristic secondary ion intensities of these polymers decreased linearly with alkyl pendant group length, suggesting that lengthening the n‐alkyl pendant group resulted in increased loss of the alkyl pendant groups and intra‐ or intermolecular cross‐linking under SF5+ bombardment. These results are partially at variance with the literature on the thermal degradation of these polymers, which suggested that these polymers degrade primarily via depolymerization with minimal intra‐ or intermolecular cross‐linking. Copyright © 2004 John Wiley & Sons, Ltd.  相似文献   

10.
Polyatomic primary ions have been applied recently to the depth profiling of organic materials by secondary ion mass spectrometry (SIMS). Polyatomic primary ions offer low penetration depth and high damage removal rates in some polymers, but the relationship between polymer chemistry and degradation under polyatomic primary ion bombardment has not been studied systematically. In this study, positive and negative ion time‐of‐flight SIMS (ToF‐SIMS) was used to measure the damage of ~100 nm thick spin‐cast poly(methyl methacrylate) (PMMA), poly(methyl acrylate) (PMA) and poly(methacrylic acid) (PMAA), films under extended (~2 × 1014 ions cm?2) 5 keV SF5+ bombardment. These polymers were compared to determine the effect of the main chain and pendant methyl groups on their degradation under SF5+ bombardment. The sputter rate of PMMA was approximately twice that of PMA or PMAA and the rate of damage accumulation was higher for PMA and PMAA than PMMA, suggesting that the main chain and pendant methyl groups played an important role in the degradation of these polymers under SF5+ bombardment. These results are consistent with the literature on the thermal and radiation‐induced degradation of these polymers, which show that removal of the main chain or pendant methyl groups reduces the rate of depolymerization and increases the rate of intra‐ or intermolecular cross‐linking. Copyright © 2004 John Wiley & Sons, Ltd.  相似文献   

11.
It is known that by lowering the impact energy the sputter rate and surface transient width in SIMS will be reduced. However, few studies have been done at ultralow energies over a wide range of impact angles. This study examines the dependence of sputter rate and transient width as a function of O2+ primary ion energy (Ep = 250 eV, 500 eV and 1 keV) and incidence angles of 0–70°. The instrument used is the Atomika 4500 SIMS depth profiler and the sample was Si with 10 delta‐layers of Si0.7Ge0.3. We observed that the lowest transient width of 0.7 nm is obtainable at normal and near‐normal incidence with Ep ~ 250 eV and Ep ~ 500 eV. There is no significant improvement in transient width going down in energy from Ep ~ 500 to ~250 eV. The onset of roughening is also not obvious at Ep ~ 250 eV over the whole angular range studied. Although the sputter rate during the surface transient is normally different from that at steady state, only at Ep ~ 250 eV was it observed that the sputter rate remained fairly independent of depth. We conclude that the best working ranges to achieve a narrow transient width and accurate depth calibration are at Ep ~ 250 eV/0° < θ < 20°and 500 eV/0°< θ < 10°. Copyright © 2005 John Wiley & Sons, Ltd.  相似文献   

12.
Depth profiling of an organic reference sample consisting of Irganox 3114 layers of 3 nm thickness at depths of 51.5, 104.5, 207.6 and 310.7 nm inside a 412 nm thick Irganox 1010 matrix evaporated on a Si substrate has been studied using the conventional Cs+ and O2+ as sputter ion beams and Bi+ as the primary ion for analysis in a dual beam time‐of‐flight secondary ion mass spectrometer. The work is an extension of the Versailles Project on Advanced Materials and Standards project on depth profiling of organic multilayer materials. Cs+ ions were used at energies of 500 eV, 1.0 keV and 2.0 keV and the O2+ ions were used at energies of 500 eV and 1.0 keV. All four Irganox 3114 layers were identified clearly in the depth profile using low mass secondary ions. The depth profile data were fitted to the empirical expression of Dowsett function and these fits are reported along with the full width at half maxima to represent the useful resolution for all the four delta layers detected. The data show that, of the conditions used in these experiments, an energy of 500 eV for both Cs+ beam and O2+ beam provides the most useful depth profiles. The sputter yield volume per ion calculated from the slope of depth versus ion dose matches well with earlier reported data. Copyright © 2013 John Wiley & Sons, Ltd.  相似文献   

13.
《Electroanalysis》2004,16(16):1336-1342
The construction, performance characteristics, and application of polymeric membrane (PME) and coated graphite (CGE) thiocyanate‐selective electrodes are reported. The electrodes were prepared by incorporating the complex [Cu(L)](NO3)2 (L=4,7‐bis(3‐aminopropyl)‐1‐thia‐4,7‐diazacyclononane) into a plasiticized poly(vinyl chloride) membrane. The influence of membrane composition, pH of test solution, and foreign ions were investigated. The electrodes reveal Nernstian behavior over a wide SCN? ion concentration range (1.0×10?6–1.0×10?1 M for PME and 5.0×10?7–1.0×10?2 M for CGE) and show fast dynamic response times of 15 s and lower. The proposed sensors show high selectivity towards thiocyanate over several common organic and inorganic anions. They were successfully applied to the direct determination of thiocyanate in urine and saliva of smokers and nonsmokers, and as an indicator electrode in titration of Ag+ ions with thiocyanate.  相似文献   

14.
《Soft Materials》2013,11(2-3):125-144
Abstract

New procedures involving depth‐sensing indentation are used to measure the submicron scale elastic modulus, hardness, viscosity, and activation energy and volume for creep of amorphous selenium below glass transition. The accurate measurement of Young's modulus in a highly viscoelastic situation using depth‐sensing indentation remains a challenge, and a creep correction procedure is employed here to measure the modulus. The measured Young's modulus exhibits a strong decreasing trend from ~10 GPa to 4.4 GPa as temperature increases from ~302 K to 309 K, in reasonably good agreement with bulk behavior. Two new procedures are also proposed here to measure the viscosity. The measured shear viscosity decreases from ~1×1012 Pa‐s to ~2×1010 Pa‐s when the temperature increases over the same range, and the variation with temperature is found to obey an Arrehnius rate equation. The activation energy for the viscous creep process is found to be ~463 kJ/mol. Both the viscosity and the activation energy are lower than the bulk values, and this is thought to be due to the much higher stress levels of over 200 MPa involved in the nanoindentation experiments here. The apparent activation volume exhibits a rising trend from 1.04×10?31 to 2.35×10?30 m3 over the same temperature range.  相似文献   

15.
A series of novel, fluorene‐based conjugated copolymers, poly[(9,9‐bis{propenyl}‐9H‐fluorene)‐co‐(9,9‐dihexyl‐9H‐fluorene)] ( P1 ), poly[(9,9‐bis{carboxymethylsulfonyl‐propyl}fluorenyl‐2,7‐diyl)‐co‐(9,9‐dihexyl‐9H‐fluorene)] ( P2 ) and poly[(9,9‐dihexylfluorene)‐co‐alt‐(9,9‐bis‐(6‐azidohexyl)fluorene)] ( P3 ), are synthesized by Suzuki coupling reactions and their electrochemical properties, in the form of films, are investigated using cyclic voltammetry. The results reveal that the polymer films exhibit electrochromic properties with a pseudo‐reversible redox behavior; transparent in the neutral state and dark violet in the oxidized state. Among the three polymers, P2 possesses the shortest response time and the highest coloration efficiency value. These polymers emit blue light with a band gap value of around 2.9 eV and have high fluorescent quantum yields. Their metal ion sensory abilities are also investigated by titrating them with a number of different transition metal ions; all of these polymers exhibit a higher selectivity toward Fe3+ ions than the other ions tested with Stern–Volmer constants of 4.41 × 106M?1, 3.28 × 107M?1, 1.25 × 106M?1, and 6.56 × 106M?1 for P1 , P2 , water soluble version of P2 ( P2S ) and P3 , respectively. © 2012 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem, 2013  相似文献   

16.
For more than three decades, time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) has been used for elemental depth profiling. In recent years, cluster primary ion sources (principally, C60+, Bin+, and Aun+) have become widely available, and they can greatly enhance the signal intensity of molecular ions (10–1000 times). Understanding the performance of cluster ion analysis beams used in elemental depth profiling can greatly assist normal ToF‐SIMS users in choosing the optimal analysis beam for depth profiling work. Presently, however, the experimental data are lacking, and such choices are difficult to make. In this paper, hydrogen and deuterium depth profiling were studied using six different analysis beams—25 keV Bi+, Bi3+, Bi5+, 50 keV Bi32+, 10 keV C60+, and 20 keV C602+. The effort shows that cluster primary ions do enhance H? and D? yields, but the enhancement is only about 1.5–4.0 times when compared to atomic Bi+ ions. Because the currents of atomic ion analysis beams are much stronger than the currents of cluster ion analysis beams for most commercial ToF‐SIMS instruments, the atomic ion analysis beams can provide the strongest H? and D? signal intensities, and may be the best choices for hydrogen and deuterium depth profiling. In addition, two representative nuclides, 30Si and 18O, were also studied and yielded results similar to those of H? and D?. Copyright © 2011 John Wiley & Sons, Ltd.  相似文献   

17.
The irradiation effects of Ar+, He+, and S+ with energy from 10 eV to 180 eV on n-InP(100) surface are analyzed by X-ray photoelectron spectroscopy and low energy electron diffraction. After irradiation on the n-InP surface, damage on the surface, displacement of the Fermilevel and formation of sulfur species on S+ exposed surface are found and studied. Successive annealing is done to suppress the surface states introduced by S+ exposure. However, it is unsuccessful in removing the damage caused by noble ions. Besides, S+ ions can efficiently repair the Ar+ damaged surface, and finally form a fine 2×2 InP surface.  相似文献   

18.
《Electroanalysis》2002,14(24):1691-1698
Three different recently synthesized aza‐thioether crowns containing a 1,10‐phenanthroline sub‐unit (L1–L3) and a corresponding acyclic ligand (L4) were studied to characterize their abilities as silver ion ionophores in PVC‐membrane electrodes. Novel conventional silver‐selective electrodes with internal reference solution (CONISE) and coated graphite‐solid contact electrodes (SCISE) were prepared based on one of the 15‐membered crowns containing two donating S atoms and two phenanthroline‐N atoms (L1). The electrodes reveal a Nernstian behavior over wide Ag+ ion concentration ranges (1.0×10?5?1.0×10?1 M for CONISE and 5.0×10?8?4.0×10?2 M for SCISE) and very low limits of detection (8.0×10?6 M for CONISE and 3.0×10?8 M for SCISE). The potentiometric response is independent from pH of the solution in the pH range 3.0–8.0. The electrodes manifest advantages of low resistance, very fast response and, most importantly, good selectivities relative to a wide variety of other cations. The electrodes can be used for at least 2 months (for CONISE) and 4 months for (SCISE) without any appreciable divergence in potentials. The electrodes were used as an indicator electrode in the potentiometric titration of Ag+ ion and in the determination of silver in photographic emulsions and in radiographic and photographic films.  相似文献   

19.
本文介绍了一种利用荧光熄灭定量的测定铜(II)的新方法。从新鲜菠菜中提取叶绿素-a,用高氯酸溶液处理,制得脱镁叶绿素-a。测量脱镁叶绿素-a的紫外-可见吸收光谱,观测到505和535nm处有特征吸收峰。在60 ℃水浴中,脱镁叶绿素-a的丙酮溶液与铜(II)离子水溶液混合,5分钟后发现混合液颜色变绿,505和535 nm处吸收峰消失。铜(II)离子水溶液与脱镁叶绿素-a的丙酮溶液混合后发生荧光猝灭现象,而类似浓度的其它生理离子在相同反应条件下对脱镁叶绿素-a的荧光猝灭现象不明显。 研究了铜(II)离子与脱镁叶绿素-a的反应时间,反应温度对荧光强度衰减的影响。并通过阿累尼乌斯经验关系估算铜(II)离子与脱镁叶绿素-a反应的活化能约为10 ±1kJ·mol-1。研究了铜(II)离子的浓度对脱镁叶绿素-a的丙酮溶液荧光强度的影响,在8.0×10-5 ~8.0×10-7 mol·dm-3范围内,铜(II)离子的浓度与混合液的荧光强度成线性衰减关系,检测限可达8.0×10-7 mol·dm-3。利用脱镁叶绿素-a的丙酮溶液的荧光强度变化测量,有望发展成为一种检测铜(II)离子的新方法。  相似文献   

20.
Molecular depth profiling of polymers by secondary ion mass spectrometry (SIMS) has focused on the use of polyatomic primary ions due to their low penetration depth and high damage removal rates in some polymers. This study is the third in a series of systematic characterizations of the effect of polymer chemistry on degradation under polyatomic primary ion bombardment. In this study, time‐of‐flight SIMS (ToF‐SIMS) was used to assess 5 keV SF5+‐induced damage of ~90 nm thick spin‐cast poly(2‐hydroxyethyl methacrylate) (PHEMA) and ~130 nm thick trifluoroacetic anhydride‐derivatized PHEMA (TFAA‐PHEMA) films. The degradation of these polymers under extended SF5+ bombardment (~2 × 1014 ions cm?2) was compared to determine the effect of the pendant group chemistry on their degradation. The sputter rate and ion‐induced damage accumulation rate of PHEMA were similar to a poly(n‐alkyl methacrylate) of similar pendant group length, suggesting that the addition of a terminal hydroxyl group to the alkyl pendant group does not markedly change the stability of poly(n‐alkyl methacrylates) under SF5+ bombardment. The sputter rate and ion‐induced damage accumulation rate of TFAA‐PHEMA were much higher than a poly(n‐alkyl methacrylate) of similar pendant group length, suggesting that derivatization of the terminal hydroxyl group can significantly reduce degradation of the polymer under SF5+ bombardment. This result is in good agreement with the literature on the thermal and radiation‐induced degradation of fluorinated poly(alkyl methacrylates), which suggests that the electron‐withdrawing fluorinated pendant group increases the probability of depolymerization. Copyright © 2004 John Wiley & Sons, Ltd.  相似文献   

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