Quantitative analysis of trace levels of surface contamination by X‐ray photoelectron spectroscopy. Part II: Systematic uncertainties and absolute quantification

We discuss analyses of trace levels of surface contamination using X‐ray photoelectron spectroscopy (XPS). The problem of quantifying common sources of statistical and systematic uncertainties for these measurements is formulated in terms of the needs of extreme ultraviolet lithography, but the results and conclusions are applicable to a broad range of XPS applications. We quantify the systematic uncertainties introduced by particular cases of overlapping peaks on different substrate structures by simulating measured spectra with the National Institute of Standards and Technology Database for the Simulation of Electron Spectra for Surface Analysis (SESSA). One example demonstrates that the relative atomic concentrations of trace elements such as S, P, and halogens on a Ru surface could be dramatically overestimated if the fitting of the overlapping Ru 3d and C 1s peaks excludes the contribution from carbon. We also show how spectra generated by SESSA can be compared with measured spectra to determine absolute amounts of surface impurities on layered samples of the type used for extreme ultraviolet lithography. We provide estimates of the total uncertainty for such measurements by considering the systematic limitations of SESSA and the statistical uncertainties of the measurements. The same procedure can be employed for other multilayered materials. Finally, we describe two approaches for converting XPS detection limits for an elemental impurity in an elemental matrix to the corresponding detection limits for the impurity as a thin film on the surface of the matrix material.     

纳米二氧化钛气相光催化降解三氯乙烯

采用气相色谱－质谱联用方法,Ｘ射线光电子能谱和程序升温脱附方法研究了纳米二氧化钛表面三氯乙烯的气相光催化降解反应。检测到四种新的含三个碳原子的中间体,说明三氯乙烯在反应过程中发生了Ｃ＝Ｃ双键的裂解及加成反应。研究表明,水蒸气对降解反应的影响不公与水蒸气的浓度有关,还与催化剂对水的吸收能力有关。反应副产物在催化剂表面的积累是导致催化剂活性降低的主要原因。催化剂的Ｘ射线光电子能谱显示,反应后催化剂表面     

等离子体改性聚丙烯纤维表面的XPS研究

用等离子体技术处理了聚丙烯纤维表面．用Ｘ－射线光电子能谱（ＸＰＳ）研究了聚合物表面的元素组成、相对含量的变化、表面官能团的类型．采用曲线拟合分峰技术对谱图进行数学处理，结果表明：尽管处理气氛不同，聚丙烯纤维表面除含有Ｃ—Ｈ和Ｃ＝Ｃ键外，还引入了Ｏ、Ｎ元素．形成活性基团：－ＯＨ、＞Ｃ＝Ｏ、－ＣＯＯＨ、－ＮＨ２和－ＣＯＮＨ２等，提高了聚合物表面活性。     

Analysis of the surface chemistry of oxidized polyethylene: comparison of XPS and ToF‐SIMS

A series of low‐density polyethylene (LDPE) surfaces, chemically modified using a number of oxidative techniques employed for adhesion enhancement (pretreatments), have been studied by time‐of‐flight (ToF) SIMS and XPS. The methods consisted of corona discharge, flame, electrochemical, chromic acid, acid dichromate and acid permanganate treatment. All except flame treatment were performed under mild and fairly severe conditions to yield a range of surface chemistries. The XPS analysis, using high energy resolution and a refined approach to C 1s curve‐fitting, provided some new insights into the quantitative assessment of the type and concentration of functional groups. Both positive and negative ion ToF‐SIMS spectra were obtained at high mass resolution. The oxygen‐containing fragments were identified by accurate mass analysis and subjected to a detailed comparison with the XPS results. No convincing relative intensity correlations could be identified that would allow particular secondary ion fragments to be associated strongly with particular functional groups (in this multi‐functional surface situation). Inorganic residues resulting from wet chemical treatments were also investigated and here the two techniques were found to be more complementary. Copyright © 2003 John Wiley & Sons, Ltd.     

Preparation and characterization of copper-doped cobalt oxide electrodes

Cobalt oxide (Co3O4) and copper-doped cobalt oxide (CuxCo(3-x)O4) films have been prepared onto titanium support by the thermal decomposition method. The electrodes have been characterized by different techniques such as cyclic voltammetry, scanning electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy (XPS). The effect on the electrochemical and crystallographic properties and surface morphology of the amount of copper in the oxide layer has been analyzed. The XPS spectra correspond to a characteristic monophasic Cu-Co spinel oxides when x is below 1. However, when the copper content exceeds that for the stoichiometric CuCo2O4 spinel, a new CuO phase segregates at the surface. The analysis of the surface cation distribution indicates that Cu(II) has preference for octahedral sites.     

Tyrosine derivatives assembled on gold

Two different tyrosine derivatives, one with the OH group free and one with the OH group phosphorylated, linked to 3-mercaptopropionic acid through an amide bond are adsorbed to gold surfaces. The adsorbates are studied by means of X-ray photoelectron spectroscopy (XPS) and infrared reflection-absorption spectroscopy (IRAS). The techniques are used to investigate the coordination to the surface and the molecular orientation of adsorbates relative to the surface. Molecular surface interactions, causing chemical shifts in the core level XPS spectra of the adsorbates on gold, are investigated using multilayer films as references. Angle-dependent XPS, XPS(theta), and IRAS are used to estimate molecular orientation relative to the surface. The tyrosine derivatives adsorb chemically to the surface through the sulfur atoms and highly organized monolayers are formed with the OH and the PO(2-)(3) exposed to the air/vacuum interface.     

Processing and interpretation of core-electron XPS spectra of complex plasma-treated polyethylene-based surfaces using a theoretical peak model

Interpretation of X-ray photoelectron spectroscopy (XPS) spectra of complex material surfaces, such as those obtained after surface plasma treatment of polymers, is confined by the available references. The limited understanding of the chemical surface composition may impact the ability to determine suitable coupling chemistries used for surface decoration or assess surface-related properties like biocompatibility. In this work, XPS is used to investigate the chemical composition of various ultra-high-molecular-weight polyethylene (UHMWPE) surfaces. UHMWPE doped with α-tocopherol or functionalised by active screen plasma nitriding (ASPN) was investigated as a model system. Subsequently, a more complex combined system obtained by ASPN treatment of α-tocopherol doped UHMWPE was investigated. Through ab initio orbital calculations and by employing Koopmans' theorem, the core-electron binding energies (CEBEs) were evaluated for a substantial number of possible chemical functionalities positioned on PE-based model structures. The calculated ΔCEBEs showed to be in reasonable agreement with experimental reference data. The calculated ΔCEBEs were used to develop a material-specific peak model suitable for the interpretation of merged high-resolution C 1 s, N 1 s and O 1 s XPS spectra of PE-based materials. In contrast to conventional peak fitting, the presented approach allowed the distinction of functionality positioning (i.e. centred or end-chain) and evaluation of the long-range effects of the chemical functionalities on the PE carbon backbone. Altogether, a more detailed interpretation of the modified UHMWPE surfaces was achieved whilst reducing the need for manual input and personal bias introduced by the spectral analyst.     

煤有机硫分析中XPS分峰拟合方法及参数设置

通过对含硫模型化合物和新峪焦精煤中的有机硫含量的分析,对XPS谱图的分峰拟合方法和参数设置进行了探讨。结果表明,用XPS解析煤中不同形态硫含量时,应按2p3/2和2p1/2劈裂峰分峰方法进行,并设置劈裂峰的面积比约为2∶1,裂距为1.18 eV,L-G%相同,FWHM值也相同;限定各有机硫2p3/2峰峰位分别为:硫醇硫醚类硫162.1~163.6 eV;噻吩类硫164.0~164.4 eV;亚砜类硫165.0~166.0 eV,同时对分峰拟合参数在一定范围内进行动态微调,可实现良好的数据重现性和较佳的拟合度。     

XPS and XAES of polyethylenes aided by line shape analysis: The effect of electron irradiation

X-ray photoelectron spectroscopy (XPS) and X-ray induced Auger electron spectroscopy (XAES) have been used to investigate different polyethylene surfaces, i.e. low density polyethylene (PELD), high density polyethylene (PEHD) and polyethylene of ultra high molecular weight (PEUHMW). The ratio of Csp²/sp³ was evaluated from (i) fitting of XPS C 1s spectra, (ii) the width of XAES C KLL spectra (parameter D) and (iii) line shape analysis by the pattern recognition (PR) method using the fuzzy k-nearest neighbors (fkNN) rule. The proposed approaches investigate: (i) the differences between various polyethylene surfaces, (ii) their surface changes and degradation due to electron irradiation under various doses and (iii) their stability under electron beam irradiation.The results of proposed approaches, i.e. C 1s fitting, C KLL width evaluation and PR line shape analysis applied to C 1s and C KLL transitions, are qualitatively consistent. The unirradiated polyethylenes indicate nearly Csp³ hybridizations. Under an electron dose a rapid decrease of Csp³ is observed, starting at a dose of 100 Cm⁻². The quantitative differences observed between results obtained from analyses using the C KLL and C 1s spectra, can be explained with a smaller average information depth of C KLL transition. However, quantitative discrepancies between results of various approaches using the same electron transition, i.e. C KLL or C 1s, are smaller. The surface degradation due to X-ray irradiation was negligible in comparison to electron beam irradiation. The PR method was efficient in identifying the polyethylene surfaces under various electron doses. The largest stability under an electron beam is exhibited by the PEUHMW.     

Evaluation of uncertainties in X‐ray photoelectron spectroscopy intensities associated with different methods and procedures for background subtraction. I. Spectra for monochromatic Al X‐ray

We report uncertainties in X‐ray photoelectron spectroscopy (XPS) intensities arising from commonly used methods and procedures for subtraction of the spectral background. These uncertainties were determined from a comparison of XPS intensities reported by volunteer analysts from 28 institutions and the corresponding intensities expected for a set of simulated XPS spectra. We analyzed peak intensities from 32 sets of data for a group of 12 spectra that had been simulated for a monochromated Al Kα source. Each reported intensity was compared with an expected intensity for the particular integration limits chosen by each analyst and known from the simulation design. We present ratios of the reported intensities to the expected intensities for the background‐subtraction methods chosen by the analysts. These ratios were close to unity in most cases, as expected, but deviations were found in the results from some analysts, particularly if the main peak was asymmetrical or if shakeup was present. We showed that better results for the Shirley, Tougaard, and linear backgrounds were obtained when analysts determined peak intensities over certain energy ranges or integration limits. We then were able to recommend integration limits that should be a useful guide in the determination of peak intensities for other XPS spectra. The use of relatively narrow integration limits with the Shirley and linear backgrounds, however, will lead to measures of peak intensities that are less than the total intensities. Although these measures may be satisfactory for some quantitative analyses, errors in quantitative XPS analyses can occur if there are changes in XPS lineshapes or shakeup fractions with change of chemical state. The use of curve‐fitting equations to fit an entire spectrum will generally exclude the shakeup contribution to the intensity of the main peak, and no account will be taken of any variation in the shakeup fraction with change of chemical state. Published in 2009 by John Wiley & Sons, Ltd. Certain commercial products are identified to specify the formats in which the test spectra were distributed and the software with which the test spectra were analyzed by participants. This identification does not imply that the products are endorsed or recommended by the National Institute of Standards and Technology, or that they are necessarily the most suitable for the purposes described.     

Rapid evaluation of the Voigt function and its use for interpreting X-ray photoelectron spectroscopic data

While the Voigt function is recognized as the best function to represent the photoelectron spectroscopic process, it is less frequently used because it cannot be represented as an analytical function and thus has to be evaluated numerically. This paper shows how the true Voigt function can be calculated rapidly with approximately the same speed as pseudo-Voigt functions by using approaches that have been used by the astronomical sciences community. The Voigt function is calculated using code previously published by Wells. The paper describes a method for calculating the function to generate photoelectron peaks for curve fitting X-ray photoelectron spectroscopic data. An appendix is provided with the listing of a Fortran 90 program which uses the subroutine HUMDEV published by Wells. Examples of using this approach for the fitting of experimental core X-ray photoelectron spectroscopic data are presented, and the fits compared with fits using a pseudo Voigt product function. The use of the true Voigt function in the calculation of spectra in the core and valence band region is also described and illustrated by comparing the calculated spectra with experimental spectra.     

Evaluation of uncertainties in X‐ray photoelectron spectroscopy intensities associated with different methods and procedures for background subtraction. II. Spectra for unmonochromated Al and Mg X‐rays

We report uncertainties in X‐ray photoelectron spectroscopy (XPS) intensities arising from commonly used methods and procedures for subtraction of the spectral background. These uncertainties were determined from a comparison of XPS intensities reported by volunteer analysts and the corresponding intensities expected for a set of simulated XPS spectra. We analyzed peak intensities from 16 sets of data (submitted from 15 institutions) for a group of 12 spectra that had been simulated for an unmonochromated Al‐Kα source and similar intensities from 20 sets of data (submitted from 17 institutions) that had been simulated for an unmonochromated Mg‐Kα source. Each reported intensity was compared with an expected intensity for the particular integration limits chosen by each analyst and known from the simulation design. We present ratios of the reported intensities to the expected intensities for the background‐subtraction methods chosen by the analysts. These ratios were close to unity in most cases, as expected, but deviations were found in the results from some analysts, particularly if shakeup was present. We showed that better results for the Shirley and Tougaard backgrounds were obtained when analysts determined peak intensities over certain energy ranges or integration limits. We then were able to suggest integration limits that should be a useful guide in the determination of peak intensities for other XPS spectra. The use of relatively narrow integration limits with the Shirley and linear backgrounds, however, will lead to measures of peak intensity that are less than the total intensities. Although these measures may be satisfactory for some quantitative analyses, errors in quantitative XPS analyses can occur if there are changes in XPS lineshapes or shakeup fractions with change of chemical state. The use of curve‐fitting equations to fit an entire spectrum will generally exclude the shakeup contribution to the intensity of the main peak, and any variation in the shakeup fraction with change of chemical state will not be taken into account. Published in 2009 by John Wiley & Sons, Ltd.     

Chemical and structural characterization of carbon nanotube surfaces

To utilize carbon nanotubes (CNTs) in various commercial and scientific applications, the graphene sheets that comprise CNT surfaces are often modified to tailor properties, such as dispersion. In this article, we provide a critical review of the techniques used to explore the chemical and structural characteristics of CNTs modified by covalent surface modification strategies that involve the direct incorporation of specific elements and inorganic or organic functional groups into the graphene sidewalls. Using examples from the literature, we discuss not only the popular techniques such as TEM, XPS, IR, and Raman spectroscopy but also more specialized techniques such as chemical derivatization, Boehm titrations, EELS, NEXAFS, TPD, and TGA. The chemical or structural information provided by each technique discussed, as well as their strengths and limitations. Particular emphasis is placed on XPS and the application of chemical derivatization in conjunction with XPS to quantify functional groups on CNT surfaces in situations where spectral deconvolution of XPS lineshapes is ambiguous.      

Comparison between X-ray photoelectron and X-ray absorption spectra of an environmental aerosol sample measured by synchrotron radiation

Sulfur X-ray photoelectron spectra (XPS) and X-ray absorption spectra (XAS) of an aerosol sample collected by an Andersen sampler were measured using a synchrotron beam line. While the XPS was more surface sensitive than XAS, the detection limit of XAS was better than that of XPS. It was concluded that the XAS was more suitable for the chemical state analysis of sulfur in aerosol samples than XPS.     

Characterization of calcium carbonate polymorphs with Ca K edge X-ray absorption fine structure spectroscopy

Ca K edge X-ray absorption fine structure (XAFS) spectroscopy was utilized for the characterization and quantification of calcium carbonate polymorphs and their mixtures. The advantage of the XAFS is the small sample quantity required for measurements, and a flexible sample environment. The near-edge XAFS spectra of calcite, aragonite and vaterite were measured with the conversion electron yield (CEY) method, and the obtained spectra showed characteristic features that can be utilized as fingerprints. The quantification of mixed polymorphs was examined by using a linear combination fitting of reference XAFS spectra. Though the quality of the fits was satisfactory, discrepancies in the evaluated values were observed between those with X-ray diffraction (XRD) and XAFS. The nonuniformity of samples may be enhanced by the surface sensitivity of the CEY method.     

用XPS和XAES分析电化学沉积的DLC膜

采用电化学沉积方法，以甲醇溶剂作碳源，直流电压作用下在单晶硅表面沉积得到碳薄膜。通过研究石墨、金刚石和样品薄膜的XPS和XAES谱图特征，证明了此方法沉积得到的是DLC薄膜;利用曲线拟合技术在C_1s电子能谱图中拟合出sp³峰与sp²峰，并计算出样品薄膜中sp³碳的相对含量为55%;研究石墨、金刚石和样品薄膜的一阶微分XAES谱图，用线性插入法估算出样品薄膜中sp³碳的相对含量为60%。     

Surface chemistry of lanthanum chromite powders II. Multivariate data modelling of the isoelectric point by the use of surface composition data achieved from X-ray photoelectron spectroscopy measurements

 Electrophoretic mobility measurements and X-ray photoelectron spectroscopy (XPS) analysis have been performed on several lanthanum chromite powders with different dopants. Principal component analysis of both deconvoluted XPS data and differentiated overall XPS spectra showed a clustering of the powders. From loading plots it was seen that high amounts of La and O on the surface gave highest isoelectric points (IEP). Partial-least-squares, multivariate response modelling was used to calibrate the IEPs from both deconvoluted XPS data and from differentiated overall XPS spectra. The best model was obtained when second-order differentiated overall XPS spectra were used, with an average predictive error of pH ± 0.25. This is promising considering that the IEP has been determined with an accuracy of pH_IEP± 0.3. When deconvoluted data was used, the average predictive error rose to pH ± 1.1. It is therefore an advantage to use multivariate data analysis which is a nonsubjective latent variable decomposing technique in contrast to deconvolution which is an even more time-consuming method for calibration of IEP values from XPS. Received: 8 October 1998 Accepted in revised form: 27 January 1999     

Application of surface science techniques to study a gilded Egyptian funerary mask: A multi-analytical approach

A wide range of analytical techniques has been used to study an Egyptian funerary mask of the Ptolemaic period (305-30 bc ). Secondary electron (SE) and back-scattering (BS) images, recorded by a scanning electron microscope (SEM), provided a detailed representation of the metallurgical techniques used to construct the gilded mask. It is confirmed, that the golden leaf used to cover the mask is the product of an antique refinery practice, so called, cementation process of naturally occurring alloy of gold and silver, namely electrum. Complementary results of SEM-electron dispersion spectroscopy (EDS) and electron probe microanalysis (EPMA)–wavelength dispersion spectroscopy (WDS) provided chemical compositions of the golden leaf as well as in the plaster base of the mask. X-ray photoemission spectroscopy (XPS) revealed the presence of Au, Ag, Si, S, Cl, Ca, and N, in addition to O and C. Relative concentration of Au/Ag at the surface has been measured by XPS to be 70% to 30%. XPS depth profiling verified silver-enrichment at the surface, as ratio of gold to silver is measured to be 80% to 20% at the depth of 15 nm. XPS chemical mapping images of gold and silver confirmed a rather inhomogeneous character of Au/Ag relative concentration at the surface. The main diffraction peaks in the X-ray diffraction (XRD) spectrum coincide with diffraction peaks of pure gold, silver metals, and magnesium calcite Mg_0.03Ca_0.97CO₃. Whereas, Raman spectroscopy results implied the existence of Ag₂S, a tarnishing compound, on the golden area of the mask.     

Quantitative Conformational Studies on Poly(vinyl Chloride)

Although curve fitting provides a method for obtaining intensity data for the individual components of overlapping band systems, the number of configurational and conformational bands in the C-Cl stretching region of the vibrational spectrum of poly(vinyl chloride) is such that many parameters have to be optimized. It is therefore desirable to impose constraints in the calculations, and prior knowledge of the number of component bands would be valuable. The potential of derivative spectroscopy for obtaining this information has been examined. It is shown that the superior resolution of second and fourth derivative spectra is partially offset by their inferior signal-to-noise ratio, a discriminatory effect against broader bands, and interference by subsidiary derivative peaks. The method has been used to examine the CH₂ deformation and C-Cl stretching modes of three PVC samples of different tacticity. With the former the overlapping system proves to be more complex than hitherto realized; hence, tacticity determinations based on the intensity ratio of two peaks only at 1428 and 1434 cm^?1 must be suspect. With the C-Cl stretching bands second derivatives are more useful than fourth derivatives, and the number and positions of the located bands are in broad agreement with the results from curve fitting, so providing confirmatory evidence for the correctness of the latter.     

Electrochemical and surface characterization of 4-aminothiophenol adsorption at polycrystalline platinum electrodes

The formation of a self-assembled monolayer (SAM) of 4-aminothiophenol (4-ATP) on polycrystalline platinum electrodes has been characterized by surface analysis and electrochemistry techniques. The 4-ATP monolayer was characterized by cyclic voltammetry (CV), linear sweep voltammetry, Raman spectroscopy, reflection-absorption infrared (RAIR) spectroscopy, and X-ray photoelectron spectroscopy (XPS). CV was used to study the dependence of the adsorption time and 4-ATP solution concentration on the relative degree of coverage of 4-ATP monolayers on polycrystalline Pt electrodes. The adsorption time range probed was 24-72 h. The optimal concentration of 4-ATP needed to obtain the highest surface at the lowest adsorption time was 10 mM. RAIR and Raman spectroscopy for 4-ATP-modified platinum electrodes showed the characteristic adsorption bands for 4-ATP, such as nuNH, nuCH(arom), and nuCS(arom), indicating the adsorption on the platinum surface. The XPS spectra for the modified Pt surface presented the binding energy peaks of sulfur and nitrogen. High energy resolution XPS studies, RAIR, and Raman spectrum for platinum electrodes modified with 4-ATP indicate that the molecules are sulfur-bonded to the platinum surface. The formation of a S-Pt bond suggests that ATP adsorption leads to an amino-terminated electrode surface. The thickness of the monolayer was evaluated via angle-resolved XPS (AR-XPS) analyses, giving a value of 8 A. As evidence of the terminal amino group on the electrode surface, the chemical derivatization of the 4-ATP SAM was done with 16-Br hexadecanoic acid. This surface reaction was followed by RAIR spectroscopy.