旋转磁场对空间浮区内流场及浓度场的影响

采用全浮区模型数值研究了旋转磁场作用下熔区内热毛细对流流动特性,分析了磁场强度对流场及浓度场的影响.研究发现,无磁场时,熔体内杂质浓度场和流场呈现三涡胞对称振荡特征;温度场主要由扩散作用决定,呈对称分布.旋转磁场作用下,Ma数基本保持不变.当磁场强度B0≤1 mT时,熔体内杂质浓度场和流场与无磁场时结构类似,但旋转磁场的搅拌作用使得熔体内周期性振荡提前出现,且当旋转磁场产生的洛伦兹力相对较大时,表面张力产生的三维振荡对流得到很好地抑制.B0=5 mT时,周向波动被完全抑制,熔区内流场和浓度场呈二维轴对称分布.旋转磁场对熔体流动产生的轴向抑制作用和周向搅拌作用,都有助于熔体流动的稳定性、浓度分布以及温度分布的均匀性,从而有利于高质量晶体的生长.     

Effect of surface tension‐driven flow on BaB2O4 crystal growth from high temperature melt‐solution

The surface tension driven‐flow in BaB₂O₄ (BBO) melt‐solution is visualized by differential interference microscope coupled with Schlieren technique, and the streamline of the steady thermocapillary convection is found to be in form of an axially symmetric pattern. Based on the observation of BBO crystal rotation caused by the convective vortex, the widths of interfacial concentration, heat and momentum boundary layer are calculated. The effect of thermocapillary convection on boundary layer thickness is also investigated. Results show that the width of boundary layer decreases linearly with the increasing of dimensionless Marangoni number. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Thermocapillary‐buoyancy flow of silicon melt in a shallow annular pool

In order to understand the nature of surface spoke patterns on silicon melt in industrial Czochralski furnaces, a series of unsteady three‐dimensional numerical simulations were conducted for thermocapillary‐buoyancy flow of silicon melt in annular pool (inner radius r_i = 15 mm, outer radius r_o = 50 mm, depth d = 3 mm). The pool is heated from the outer cylindrical wall and cooled at the inner wall. Bottom and top surfaces either are adiabatic or allow heat transfer in the vertical direction. Results show that a small temperature difference in the radial direction generates steady roll‐cell thermocapillary‐buoyancy flow. With large temperature difference, the simulation can predict three‐dimensional oscillatory flow, which is characterized by spoke patterns traveling in the azimuthal direction. The small vertical heat flux (3 W/cm²) does not have significant effects on the characteristics of this oscillatory flow. Details of the flow and temperature disturbances are discussed and the critical conditions for the onset of the oscillatory flow are determined. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Axial macrosegregation in Ga‐doped germanium grown by the vertical gradient freeze technique with a rotating magnetic field

The impact of a rotating magnetic field (RMF) on the axial segregation in Vertical Gradient Freeze (VGF) grown, Ga doped germanium is investigated. Growth experiments were performed using the VGF‐RMF as well as the conventional VGF technique. Carrier concentration profiles characterising the Ga segregation were measured by the Spreading Resistance method and calibrated using Hall values of carrier concentration and mobility. The Ga concentration rises more gradually under RMF action, i.e., the dopant segregation is significantly reduced by the rotating field. This effect is attributed to a better mixing of the melt. Numerical results on the flow velocity confirm this explanation. The RMF induced flow is much more intense than the natural buoyant convection due to the radial temperature gradient and leads to a pronounced decrease of the effective partition coefficient k_eff. In the early stages of growth a k_eff value close to k₀ was obtained, i.e., the gallium was almost homogeneously distributed within the melt. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Experiments on the oscillatory convection of low Prandtl number liquid in Czochralski configuration for crystal growth with cusp magnetic field

This paper presents results of experiments on the oscillatory convection of mercury in a Czochralski configuration with cusp magnetic field. Temperature fluctuation measurements are carried out to determine the critical Rayleigh number for the onset of time dependent natural convection. The effects of a cusp magnetic field on the supercritical natural convection coupled with rotation of crystal disk are investigated. In the presence of a rotating flow it is found that a cusp magnetic field can induce a new long wave instability and can amplify the temperature fluctuation depending on the magnitude of the relevant flow similarity parameters and the melt aspect ratios. A flow regime diagram for the amplification and damping of the temperature fluctuations is presented to provide an experimental data base for finding optimum growth conditions in the cusp magnetic field Czochralski process.     

微重力条件下Marangoni数对分离结晶过程的影响

为了了解微重力条件下新型分离结晶生长过程中熔体热毛细对流的基本特征,利用有限差分法进行了三维数值模拟.当熔体顶部分别为自由表面及固壁边界条件时,得到了新型分离结晶Bridgrnan生长过程中熔体热毛细对流的速度分布和温度分布.结果表明:熔体顶部为自由表面时,当Marangoni数较小时,在上自由表面和下部狭缝处自由表面的表面张力的驱动下,熔体内部产生了逆时针和顺时针两个流动方向相反的流胞,此时熔体内的流动状态为稳态;随着Marangoni数进一步的增大,流胞的流动逐渐增强并逐步向熔体内部扩展,熔体内部温度分布非线性增强,上自由表面和下部狭缝处自由表面处速度增大;当Marangoni数超过某一临界值后,流动转化为非稳态流动.当熔体顶部为固壁时,与熔体顶部为自由表面时相比,临界Marangoni数增大.流动失稳的物理机制是流速的变化和阻力的变化之间存在滞后.     

Numerical investigation of heat transport and fluid flow during the seeding process of oxide Czochralski crystal growth Part 2: rotating seed

In this paper, the role of seed rotation on the characteristics of the two‐dimensional temperature and flow field in the oxide Czochralski crystal growth system has been studied numerically for the seeding process. Based on the finite element method, a set of two‐dimensional quasi‐steady state numerical simulations were carried out to analyze the seed‐melt interface shape and heat transfer mechanism in a Czochralski furnace with different seed rotation rates: ω_seed = 5‐30 rpm. The results presented here demonstrate the important role played by the seed rotation for influencing the shape of the seed‐melt interface during the seeding process. The seed‐melt interface shape is quite sensitive to the convective heat transfer in the melt and gaseous domain. When the local flow close to the seed‐melt interface is formed mainly due to the natural convection and the Marangoni effect, the interface becomes convex towards the melt. When the local flow under the seed‐melt interface is of forced convection flow type (seed rotation), the interface becomes more concave towards the melt as the seed rotation rate (ω_seed) is increased. A linear variation of the interface deflection with respect to the seed rotation rate has been found, too. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Influence of transverse magnetic field on thermocapillary flow in liquid bridge

For exploring the optimizing convection control technique by external magnetic field in floating zone crystal growth of semiconductor under microgravity, thermocapillary flow in a floating half‐zone model is simulated numerically, and the influences of both the transversal uniform magnetic field and the magnetic field generated by transversal four coils on thermocapillary flow are investigated. The results indicate that the transversal uniform magnetic field is likely to break the axisymmetrical structure of thermocapillary flow, which is unfavorable to the growth of high‐quality crystal; under the magnetic field generated by transversal four coils, both the mean and the maximum velocities increase with the increment of the distance between coils or the decrement of coil radius; and the convection tends to be more axisymmetrical with increasing coil radius. Compared to the transversal uniform magnetic field, the magnetic field generated by transversal four coils of appropriate radius and relative distance may not only suppress convection, but also enhance the axisymmetry of convection at the same time, and finally, the better convection control can be achieved. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Solutocapillary convection in germanium‐silicon melts

Surface tension gradients in free crystal growth melts give rise to convective flow. If these gradients are due to thermal gradients, the well known thermocapillary (Marangoni) convection ensues. Concentration gradients due to segregation at the interface during growth can lead to additional solutocapillary convection. A system with large solutocapillary convection is Ge‐Si due to the pronounced segregation and the strong difference in surface tension; solutal buoyancy convection is also present due to the large density difference between Ge and Si. Solutocapillary convection will oppose thermocapillary convection in the Ge‐Si system since Si, having the higher surface tension, is preferentially incorporated into the crystal. A set of experiments directly proving and partially quantifying the effect has been conducted under microgravity during a parabolic flight campaign by recrystallizing Ge‐Si mixtures of different compositions, between 3% and 9% Si, in a crucible with tracers to visualize the movement. Solutocapillary flow with initial flow rates in excess of 5.5 cm/s at the onset of crystallization was measured. A slight dependence of the flow velocity on the initial Si content has been found. Experiments on the ground showed the same effect but with overall smaller speeds; this difference can be explained by the additional action of solutal buoyancy convection. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Numerical investigation of magnetic field effect on pressure in cylindrical and hemispherical silicon CZ crystal growth

The effect of axial magnetic field of different intensities on pressure in silicon Czochralski crystal growth is investigated in cylindrical and hemispherical geometries with rotating crystal and crucible and thermocapillary convection. As one important thermodynamic variable, the pressure is found to be more sensitive than temperature to magnetic field with strong dependence upon the vorticity field. The pressure at the triple point is proposed as a convenient parameter to control the homogeneity of the grown crystal. With a gradual increase of the magnetic field intensity the convection effect can be reduced without thermal fluctuations in the silicon melt. An evaluation of the magnetic interaction parameter critical value corresponding to flow, pressure and temperature homogenization leads to the important result that a relatively low axial magnetic field is required for the spherical system comparatively to the cylindrical one.     

Effect of Magnetic Field and γ Irradiation on the Properties of Tl‐2212 Superconducting Tape

The critical temperature and critical current of Tl‐2212 superconducting sample in the form of a tape have been studied near T_c under magnetic field and gamma irradiation. T_c decreases from 109 to 94 K with increase of magnetic field up to 300 mT. In 77‐109 K range, J_c decreases rapidly in low fields up to around 50 mT followed by a very slow decrease in J_c up to 300 mT. T_c of the sample did not change up to 100 MR γ dose and then started to decrease from 109 to 102 K with increase of g dose up to 800 MR, most of the change taking place in high doses. The critical currents of the sample decreased steadily with γ irradiation up to 600 MR after which no further change was noticed.     

Melt Flow and Species Transport in μg‐Gradient‐Freeze Growth of Germanium

The result of a μg‐experiment on the Gradient‐Freeze growth of Ge:Zn with doping from the vapour phase shows a homogeneous distribution of the zinc in the melt, indicating the dominating role of a gravity‐independent transport mechanism. This effect is investigated numerically on the basis of a global model of the growth setup. The numerical simulation includes the melt flow and the transport of the dopant taking into account buoyant and thermocapillary forces. The results confirm the minor influence of gravity on the species transport. The complete mixing of the melt can be explained by thermocapillary (Marangoni) convection only.     

Unsteady three-dimensional buoyancy-driven convection in a circular cylindrical cavity and its damping by magnetic field

The oscillatory convection in an electrically conducting liquid-metal confined in a cylindrical cavity of moderate length is investigated using a spectral numerical method involving direct resolution of the Navier-Stokes equations for three-dimensional flows. Time signals, symmetry properties and energy budgets are presented in order to characterize the flow oscillations. The damping of the oscillatory flows by a vertical magnetic field is then studied up to the stabilization to a steady flow.     

Rotating magnetic fields: Fluid flow and crystal growth applications

Rotating or alternating magnetic fields are widely used in the industrial steel casting process or in metallurgical manufacturing. For the growth of single crystals, these techniques attracted a rapidly increasing attention within the last years: a well defined melt flow leads to a more homogeneous temperature and concentration distribution in the melt and consequently improves the growth process. Rotating magnetic fields (RMF) might be used instead of crucible and/or crystal rotation avoiding mechanically induced disturbances or might be added to conventional rotation mechanisms to gain a further flow control parameter. Compared to static magnetic fields, rotating ones are distinguished by a much lower energy consumption and technical effort. Furthermore, there are no reports on detrimental effects such as the generation of thermoelectromagnetic convection or coring effects in the grown crystals. One advantage of rotating magnetic fields is the possibility to apply them even to melts with a rather low electrical conductivity like e.g. aqueous solutions. High flow velocities are already generated with moderate fields. Therefore the field strength has to be adjusted with care because otherwise undesirable Taylor vortices might be induced. In the last years, the potential of rotating magnetic fields for crystal growth processes was demonstrated for model arrangements using e.g. gallium or mercury as a test liquid as well as for a variety of growth techniques like Float Zone, Czochralski, Bridgman, or Travelling Heater Methods: Fluctuations of the heat transport due to time-dependent natural convection have could be reduced by more than an order of magnitude or the mass transport could be improved with respect to the a better radial symmetry and/or a more homogeneous microscopic segregation.     

Bifurcation analysis of the thermocapillary convection in cylindrical liquid bridges

We consider the instability of the steady, axisymmetric thermocapillary convection in cylindrical liquid bridges. Finite-difference method is applied to compute the steady axisymmetric basic solutions, and to examine their linear instability to three-dimensional modal perturbations. The numerical results show that for liquid bridges of O(1) aspect ratio Γ (= length/radius) the first instability of the basic state is through either a regular bifurcation (stationary) or Hopf bifurcation (oscillatory), depending on the Prandtl number of the liquid. The bifurcation points and the corresponding eigenfunctions are predicted precisely by solving appropriate extended systems of equations. For very small Prandtl numbers, i.e. Pr < 0.06, the instability is of hydrodynamical origin that breaks the azimuthal symmetry of the basic state. The critical Reynolds number, for unit aspect ratio and insulated free surface, tends to be constant, Re_c → 1784, as Pr → 0, the most dangerous mode being m = 2. While for Pr 0.1, the instability takes the form of a pair of hydrothermal waves traveling azimuthally. The most dangerous mode is m = 3 for 0.1 Pr 0.8 and m = 2 for Pr 0.9. Dependence of the critical Reynolds number on other parameters is also presented. Our results confirm in large part the recent linear-theory results of Wanschura et al. [7] and provide a more complete stability diagram for the finite half-zone with a nondeformable free surface.     

不同高径比下浮区晶体生长熔体内对流不稳定性分析

本文通过数值模拟的方法，研究了零重力条件下半浮区液桥内熔体热毛细对流的演化规律。在液桥的高度L和温差ΔT保持不变的情况下，通过改变液桥的半径R来改变液桥的高径比(Ar=L/R)。随着高径比Ar的变化，液桥内的对流表现出不同的流动特征。在Ar=0.5时，热毛细对流处于三维稳态；在Ar=1时，流场和温度场从稳态模式向非稳态周期多频振荡模式转变，它们之间的频率关系满足倍频关系(f_n=nf₁);在Ar=1.25时，监测点的速度振荡频率增大，表现为较小幅度的振荡模式，且温度振荡消失。     

Static magnetic fields in semiconductor floating-zone growth

Heat and mass transfer in semiconductor float-zone processing are strongly influenced by convective flows in the zone, originating from sources such as buoyancy convection, thermocapillary (Marangoni) convection, differential rotation, or radio frequency heating. Because semiconductor melts are conducting, flows can be damped by the use of static magnetic fields to influence the interface shape and the segregation of dopants and impurities. An important objective is often the suppression of time-dependent flows and the ensuing dopant striations. In RF-heated Si-FZ-crystals, fields up to 0.5Tesla show some flattening of the interface curvature and a reduction of striation amplitudes. In radiation-heated (small-scale) Si-FZ crystals, fields of 0.2–0.5Tesla already suppress the majority of the dopant striations. The uniformity of the radial segregation is often compromised by using a magnetic field, due to the directional nature of the damping. Transverse fields lead to an asymmetric interface shape and thus require crystal rotation (resulting in rotational dopant striations) to achieve a radially symmetric interface, whereas axial fields introduce a coring effect. A complete suppression of dopant striations and a reduction of the coring to insignificant values, combined with a shift of the axial segregation profile towards a more diffusionlimited case, are possible with axial static fields in excess of 1Tesla. Strong static magnetic fields, however, can also lead to the appearance of thermoelectromagnetic convection, caused by the interaction of thermoelectric currents with the magnetic field.     

Combined effects of crucible geometry and Marangoni convection on silicon Czochralski crystal growth

In order to understand the influence of crucible geometry combined with natural convection and Marangoni convection on melt flow pattern, temperature and pressure fields in silicon Czochralski crystal growth process, a set of numerical simulations was conducted. We carry out calculation enable us to determine temperature, pressure and velocity fields in function of Grashof and Marangoni numbers. The essential results show that the hemispherical geometry of crucible seems to be adapted for the growth of a good quality crystal and the pressure field is strongly affected by natural and Marangoni convection and it is more sensitive than temperature. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Three‐dimensional flow in a thin annular layer of silicon melt with bidirectional temperature gradients

Bidirectional temperature gradients coexist virtually in surface tension driven flows. However, the simulations have been performed to the flow with only one temperature gradient. A series of 3 D numerical simulations are conducted to investigate the Marangoni‐thermocapillary flow of silicon melt in a thin annular layer with bidirectional temperature gradients. The temperature gradients are produced by the temperature difference ΔT between walls and the constant heat flux q on the bottom, respectively. When changing q, the melt presents different state evolutions at different ΔT. Furthermore, two critical q are found, one makes the minimum melt temperature higher than the crystallization temperature and the other makes the flow unsteady. Both of the critical heat fluxes decrease with increasing ΔT. q contributes more to the elevation of the melt temperature, while ΔT contributes more to the enhancement of the melt instability. In addition, the melt on the free surface flows mainly along the radial direction.     

Numerical simulation of MHD rotator action on hydrodynamics and heat transfer in single crystal growth processes

The article presents the results of the mathematical and physical simulations of the influence of a rotating magnetic field (RMF) on the hydrodynamics and heat transfer in processes of large semiconductor single crystal growth in ampoules. Different versions of the RMF are considered, in particular, for symmetric and asymmetric positions of a RMF inductor with regard to the melt in the ampoule, for two counter-rotating magnetic fields, for different geometrical ratios in the “RMF inductor - liquid melt” system, and for different electrical conductivities of the hard walls at their contact with the melt. The interconnection between the distribution of the electromagnetic forces in the liquid volume and the formed velocity patterns, temperature distribution and shape of the solidification front is studied. An original method for the definition of the electromagnetic forces, which considers finite dimensions of the RMF inductor and melt, was used to calculate real conditions of the RMF influence on growth processes. The numerical results obtained are compared to the data of model experiments. Their satisfactory agreement permits us to propose this calculation method for the definition of the optimal parameters of a growth process under specific conditions and to select the most rational type of RMF influence.