Si(111)外延GaN的表面形貌及形成机理研究

用高温AlN作缓冲层在Si(111)上外延生长出GaN薄膜.通过对薄膜表面扫描电子显微镜(SEM)和高分辨率双晶X射线衍射(DCXRD)的分析,确定缓冲层对外延层形貌的影响,分析解释了表面形貌中凹坑的形成及缓冲层生长温度对凹坑的影响.结果表明:温度的高低通过影响缓冲层初始成核密度和成核尺寸来影响外延层表面形貌.     

热壁外延制备InAs/Si(211)薄膜及其电学性能研究

采用热壁外延(Hot Wall Epitaxy,HWE)沉积系统在单晶Si(211)衬底表面制备了InAs薄膜,研究了不同生长温度(300℃、350℃、400℃、450℃和500℃)对薄膜材料结构及其电学性能的影响.通过X射线衍射(XRD)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、霍尔(Hall)测试等,对InAs/Si(211)薄膜的晶体结构、表面形貌及电学参数进行了测试分析.结果表明:采用HWE技术在Si(211)衬底表面成功制备了InAs薄膜,薄膜具有闪锌矿结构并沿(111)方向择优生长.随着生长温度从300℃升高到500℃,全峰半高宽(FWHM)先减小后增大,生长温度为400℃时薄膜的晶粒尺寸最大为73.4 nm,载流子浓度达到1022 cm-3,霍尔迁移率数值约为102 cm2/(V·s),说明优化生长温度能够降低InAs薄膜的缺陷复合,使薄膜结晶质量和电学性能得到提高.SEM及AFM的测试结果显示由于较高的晶格失配及Si衬底斜切面(211)的特殊取向,在Si(211)衬底上生长的InAs薄膜主要为三维层加岛状(S-K)生长模式,表面粗糙度(Ra)随温度的升高先减小后增大,400℃时薄膜的平均表面粗糙度Ra为48.37 nm.     

LaNiO3缓冲层对化学溶液法制备的Pb(Mg1/3Nb2/3)O3-PbTiO3薄膜的结构与电学性能的影响

采用化学溶液法在Pt/TiO2/SiO2/Si衬底上制备了92;Pb(Mg1/3/Nb2/3)O3-8;PbTiO3(PMNT)薄膜,对于在衬底上引入缓冲层LaNiO3(LNO)和没有引入缓冲层LNO所制备的PMNT薄膜结构及电学性能进行了比较和研究.x射线衍射测试结果表明:直接在Pt/TiO2/SiO2/Si衬底上所制备的PMNT薄膜含有大量的烧绿石相,且薄膜呈现高度的(111)择优取向;而当在Pt/TiO2/SiO2/Si衬底上引入LNO缓冲层后,所制备的PMNT薄膜是纯钙钛矿相,且薄膜呈现(100)择优取向.通过铁电和介电性能测试表明:当在Pt/TiO2/SiO2/Si衬底上引入缓冲层LNO后,所制备的PMNT薄膜的剩余极化和介电常数也都得到了较大提高.     

不同衬底表面上大晶粒多晶Si薄膜的制备

利用高频感应加热化学气相沉积(HFCVD)工艺,以H2稀释的SiH4作为反应气体源,分别在n-(111)Si衬底上常规热生长的SiO2层、织构的SiO2层和纳米晶粒多晶Si薄膜表面上,制备了具有均匀分布的大晶粒多晶Si膜.采用扫描电子显微镜(SEM)和X射线衍射(XRD)等检测手段,测量和分析了沉积膜层的表面形貌、晶粒尺寸、密度分布与择优取向等结构特征.结果表明,多晶Si膜中Si晶粒的尺寸大小和密度分布不仅与衬底温度、SiH4浓度与反应气压等工艺参数有关,而且强烈依赖于衬底的表面状态.本实验获得的最好的薄膜中,Si晶粒平均尺寸约为2.3 μm,密度分布约为3.8×107/cm2.对薄膜的沉积机理分析表明,衬底表面上Si原子基团的吸附、迁移、成核与融合等热力学过程支配着大晶粒多晶Si膜的生长.     

纳米硅增强纳米纤维薄膜的制备与研究

利用纳米硅粉和聚乙烯吡咯烷酮(PVP)的乙醇混合溶液,通过静电纺丝和碳化制备了Si/C纳米纤维薄膜.通过XRD、SEM、XPS、拉伸测试和TG法对样品进行表征.结果表明,纤维直径、薄膜表面元素含量、碳化薄膜强度可以通过控制Si与PVP含量而调节;当Si与PVP的质量比为0.2时,碳化薄膜拉伸强度最高其值为(6.1±0.3)MPa,继续增加硅的含量其薄膜强度明显降低.     

退火时间对铝诱导非晶硅薄膜晶化过程的影响

基于铝诱导非晶硅薄膜固相晶化方法,利用直流磁控溅射离子镀技术制备了Al/ Si…Al/ Si/ glass周期性结构的薄膜.采用真空退火炉对Al/ Si多层薄膜进行了500℃退火实验,通过透射电子显微镜(TEM)分析了不同退火时间下Al/ Si多层薄膜截面形貌的变化规律,并结合扩散过程探讨了退火时间对铝诱导非晶硅薄膜晶化过程的影响机理.研究结果表明:在铝诱导非晶硅薄膜固相晶化过程中,在退火过程的初期,晶态硅薄膜的生长主要来源于因Al的存在而形成的硅初始品核数量增加的贡献.随退火时间的延长,晶态硅薄膜的生长主要是依靠临界浓度线已推进区域中未参与形核的硅原子扩散至初始品核位置并进行外延生长来实现的.经500℃退火1 h后,Al/ Si薄膜的截面形貌巾出现了沿Si(111)晶面生长的栾品组织.     

低温超晶格YSZ/STO/YSZ电解质薄膜的制备及表征

采用脉冲激光沉积法(PLD),在Al2O3 (ALO)衬底上,将Y2O3∶ZrO2(YSZ)和SrTiO3 (STO)按照YSZ/STO/YSZ的顺序依次沉积,形成超晶格YSZ/STO/YSZ电解质薄膜,利用SEM、XRD和交流阻抗对其形貌、相结构和电学性能进行了表征.结果表明,衬底温度为700℃形成的超晶格YSZ/STO/YSZ电解质薄膜颗粒大且均匀,排列紧密且呈规律圆柱状;YSZ、STO均沿(111)方向择优生长;低温时电导率比单层YSZ电解质薄膜高出4个数量级,是较为理想的低温固体燃料电池电解质.     

利用Al/AlAs中间层调控GaAs在Si(111)上外延生长的研究

为了实现Ⅲ-V器件在硅基平台上单片集成,近年来Ⅲ-V半导体在硅衬底上的异质外延得到了广泛研究。由于Ⅲ-V半导体与Si之间大的晶格失配以及晶格结构不同,在Si上生长的Ⅲ-V半导体中存在较多的失配位错及反相畴,对器件性能造成严重影响。而Si(111)表面的双原子台阶可以避免Ⅲ-V异质外延过程中形成反相畴。本文利用分子束外延技术通过Al/AlAs作为中间层首次在Si(111)衬底上外延生长了GaAs(111)薄膜。通过一系列对比实验验证了Al/AlAs中间层的插入对GaAs薄膜质量的调控作用,并在此基础上通过低温-高温两步法优化了GaAs的生长条件。结果表明Al/AlAs插层可以为GaAs外延生长提供模板,并在一定程度上释放GaAs与Si之间的失配应力,从而使GaAs薄膜的晶体质量得到提高。以上工作为Ⅲ-V半导体在硅上的生长提供了新思路。     

SDC/YSZ双层电解质薄膜的制备与特性

利用脉冲激光沉积技术(PLD)在MgO单晶片基底上制备Ce0.8Sm0.2O2-δ/ZrO2∶Y2O3 (SDC/YSZ)双层电解质薄膜.X射线衍射仪(XRD)和扫描电子显微镜(SEM)的结果显示SDC/YSZ双层电解质薄膜沿(111)方向择优生长,随着退火温度的升高,薄膜变得均匀致密,结晶度得到改善,(111)衍射峰强度变大,择优生长取向明显;电化学测量表明,SDC/YSZ双层电解质薄膜的离子电导率比单层YSZ薄膜的离子电导率高.     

Si/Ti原子比对TiO2-SiO2复合薄膜亲水性能与摩擦磨损性能的影响

采用直流(DC)反应磁控溅射法在玻璃上制备了不同Si/Ti原子比的TiO2-SiO2复合薄膜.使用X射线衍射仪(XRD)、场发射扫描电子显微镜(SEM)、X射线光电子能谱仪(XPS)、紫外可见分光光度计、CA-XP150型接触角仪、UMT-2型多功能微摩擦仪,研究了不同Si/Ti原子比的TiO2-SiO2复合薄膜微观结构、表面形貌、亲水性能和摩擦磨损性能.结果表明,所制备的纯TiO2薄膜具有锐钛矿结构,其平均晶粒尺寸为11 nm,TiO2-SiO2复合薄膜呈现非晶结构,其粒子尺寸相对减小;随着Si/Ti原子比的增大,薄膜在可见光区的平均透过率从76.6; 增加到84.3;.当复合薄膜中Si/Ti原子比为1:2时,薄膜的摩擦系数为0.11,薄膜具有最佳的亲水性能;在紫外光照射2 h后水接触角降到3.0°;在黑暗中放置30 h后水接触角略增加到7.7°.     

Elastic properties of GexAsySe100−x−y glasses

The elastic properties of Ge_xAs_ySe_100−x−y (0x30; 10y40) glasses have been studied. The results were analyzed in terms of the dependence on the theoretical mean coordination number (mean number of covalent bonds per atom) m (m=2+(2x+y)×0.01). Three ranges of m (2.1m2.51, 2.51<m2.78, 2.78<m3) were revealed, where different dependencies of elastic moduli (Young’s modulus, shear modulus) and Poisson’s ratio of glasses on m were observed.     

Calculation of phase diagrams in AlxIn1−xAs/InP,AsxSb1−xAl/InP and AlxIn1−xSb/InSb nano-film systems

The models for calculation of phase diagrams of semiconductor thin films with different substrates were proposed by considering the contributions of strain energy, the self-energy of misfit dislocations and surface energy to Gibbs free energy. The phase diagrams of the Al_xIn_1−xAs and As_xSb_1−xAl thin films grown on the InP (1 0 0) substrate, and the Al_xIn_1−xSb thin films grown on the InSb (1 0 0) substrate at various thicknesses were calculated. The calculated results indicate that when the thickness of film is less than 1 μm, the strain-induced zinc-blende phase appears, the region of this phase extends with decreasing of the layer thickness, and there is small effect of surface energies of liquid and solid phases on the phase diagrams.     

Ab initio calculation of vibrational frequencies of GexPxS1−2x glass

The vibrational frequencies of GeS₄, GeP₄, Ge₂S₆, GeP₃, Ge₃P, Ge₂P₂, P₂S₂, P₃S, P₄S₃, α-P₄S₄, β-P₄S₄, α-P₄S₅, β-P₄S₅, P₄S₇, P₄S₉ and P₄S₁₀ are theoretically computed from the first principles. The Raman frequencies of Ge_xP_xS_1−2x glass are obtained for x varying from 0.05 to 0.019. The computed fundamental frequencies of clusters are compared with those experimentally found. In this way, we are able to identify the vibrating clusters in the real glass. The clusters identified in the real glass are found to be Ge₂P₂, P₄S₃, α-P₄S₄, β-P₄S₄, β-P₄S₅, P₄S₇, P₄S₉, β-P₄S₅, Ge₂S₆, Ge₃P.     

Vapour epitaxial growth and characterization of InAs1-xPx

The vapour growth of InAs_1-xP_x layers has been carried out by the hydride process. The phosphorus rich part of the system (0.7 ? x ? 1) was especially investigated. Heteroepitaxial deposits of InAs_1-xP_x and InP have been performed on substrates such as InAs, GaAs and GaP. A systematic study of the influence of the substrate orientation on the quality of the layer has been carried out by growth on hemispherical substrates. Preferential planes have been pointed out: (100) and (111) A for InAs, (111) for GaAs and GaP. The band gap variation as a function of the composition has been determined by photoluminescence at 4.2 °K and X-ray diffraction measurements. It fits the equation: E_G(x) eV = 0.425 + 0.722 x + 0.273 x² at 4.2 °K.     

Statistical method of image analysis of heterogeneities in Ba1 ? xRxF2 + x crystals

A statistical method for image analysis of smooth heterogeneities (with comparatively large luminance grade) is suggested. The method allows one to determine the average dimensions of image heterogeneities and characterize the anisotropy of their dimensions and heterogeneity of image luminance by constructing the corresponding pointer curves. The algorithms suggested for the image analysis are tested on two types of heterogeneities in Ba_{1 − x} R _x F_{2 + x} crystals grown from melts by the Stockbarger method—the cellular substructure and heterogeneity on a nanometer scale. These heterogeneities are characteristic of the whole family of nonstoichiometric fluorite M _{1 − x} R _xF_{2 + x} phases. The analysis of the typical images proves the high efficiency of the method of extraction of quantitative information on heterogeneities in M _{1 − x} R _xF_{2 + x} crystals on various scales. __________ Translated from Kristallografiya, Vol. 48, No. 2, 2003, pp. 376–384. Original Russian Text Copyright ? 2003 by Marychev, Chuprunov, Herrero, Sobolev.     

Vapor growth of GaxAl1−xSb

The vapor growth of Ga_xAl_1?xSb was experimentally studied using a closed tube transport technique. In the closed tube process with iodine as a transport agent, Ga_xAl_1?xSb was successfully grown on (111) oriented GaSb substrates at a relatively low temperature. The composition of the grown layer depended primarily on that of the source, and had only a small graded region (<0.5 μm) between the substrate and the epitaxial layer. The growth rate was almost constant irrespective of the growth time, whenever the other growth parameters were unchanged.     

Composition dependence of photoconductivity of Al20AsxTe80−x glasses

The time dependent photocurrent of Al₂₀As_xTe_80−x glasses has been studied at low temperatures. It is found that the photocurrent of all the Al₂₀As_xTe_80−x samples studied does not decrease appreciably during illumination, which is consistent with the behavior of other narrow band gap amorphous chalcogenides. Further, the photosensitivity is found to be maximized for the composition x=25, which can be associated with rigidity percolation.     

Characterization of the optical properties of LPE InxGa1−xAsyP1−y thin layers grown on InP

A series of In_xGa_1?xAs_yP_1?y single-crystal thin layers have been grown on an InP substrate in a vertical liquid phase epitaxy furnace with a rotating slide boat system. The optical properties of these LPE quaternary alloys lattice-matched to InP have been investigated mainly by photoluminescence and electroreflectance measurements. Photoluminescence spectra of In_xGa_1?xAs_y P_1?y epitaxial layers are dominated by a strong luminescence line due to band-edge emission. At low temperatures, around 4.2 K, we have observed complicated luminescence bands with many fine structures. Electroreflectance spectra for the LPE In_xGa_1?xAs_yP_1?y layers are sufficiently broad to fulfil the low-field condition, and the analysis enabled us to determine precisely the band gap energy.     

Synthesis and structure of new phases of the Am?1Bi2BmO3m+3 (m = 2) type

Three polycrystalline bismuth-containing layered perovskite-like oxides are synthesized by high-temperature solid-state reactions. One of these compounds was described previously, namely, Bi₃Ti_1.5W_0.5O₉, for which the unit cell parameters a = 5.372(5) Å, b = 5.404(4) Å, and c = 24.95(2) Å are determined in this study. The other two compounds, namely, Na_0.75Bi_2.25Nb_1.5W_0.5O₉ with the unit cell parameters a = 5.463(1) Å, b = 5.490(7) Å, and c = 24.78(0) Å and Ca_0.5Bi_2.5Ti_0.5Nb_1.5O₉ with the unit cell parameters a = b = 3.843(2) Å and c = 24.97(6) Å, are synthesized for the first time. The compositions of these compounds are based on the composition of the well-known compound Bi₃TiNbO₉ with a high Curie temperature (T _C = 1223 K), in which bismuth, niobium, and titanium atoms are partially or completely replaced by other atoms. The experimental and calculated interplanar distances determined from the X-ray diffraction patterns of the studied compounds are presented. __________ Translated from Kristallografiya, Vol. 50, No. 1, 2005, pp. 59–64. Original Russian Text Copyright ? 2005 by Geguzina, Shuvaev, Shuvaeva, Shilkina, Vlasenko.