电子辐照对VO2薄膜热致相变过程中光学性能的影响

利用能量为1.7MeV,注量分别为10^13-10^15/cm^2,的电子束辐照二氧化钒薄膜,对辐照及未辐照样品进行了UV－VIS,XPS参数测试,并测量900nm处光透射性能随温度的变化,发现电子辐照导致了VO2薄中的V离子价态由V^4向V^5 转变,薄膜热致相变前后的光透射比随注量增加变化较小,只在注量为10^14/cm^2时光透射比减小得较明显,相变温度点及热滞回线宽度随注量增加出现显著变化,并对有关的结果进行了讨论。     

射频磁控溅射工艺制备二氧化钒薄膜

以V2O5陶瓷烧结靶材及射频磁控溅射工艺制备V2O5薄膜,再经氩气气氛退火处理得到VO2薄膜.采用扫描电子显微镜观察不同制备条件下薄膜表面微观形貌特征,拉曼光谱和X射线光电子能谱用来分析确定退火前后薄膜的物相结构及化合价态.结果表明,溅射4h、450℃退火2h制备的薄膜结晶形态良好,VO2纯度高于94;原子分数.     

WO3基电致变色器件的制备及性能研究

本文采用真空热蒸发法,在ITO基底上制备WO3薄膜,之后在空气气氛中对其进行了400℃,1 h的退火处理.SEM测试结果表明,退火后的WO3薄膜变得更为致密平整.将退火后的WO3薄膜,及通过溶胶凝胶法制得的TiO2-CeO2对电极薄膜和PC-PEO-LiClO4凝胶态电解质封装得到电致变色器件,以探索该退火处理对WO3薄膜电致变色性能的影响.结果表明,该WO3基电致变色器件在632.8 nm处的光学调制幅度达56.8;,记忆时间超过24 h,且具有良好的循环稳定性.本研究表明WO3薄膜的后期退火处理对制备高性能WO3基电致变色器件具有重要的意义.     

掺杂VO2薄膜的相变机理和光电特性研究

本文采用V2O5粉和MoO3粉为原料,通过无机溶胶-凝胶法制备掺Mo6+的VO2薄膜.实验采用XRD和XPS等研究手段,对掺杂薄膜的物相组成、价态、相变温度、电阻突变量级和相变前后的光透过率进行了测试.结果发现:所制备的掺杂薄膜其主要成份是VO2,掺入的MoO3结构未发生改变,掺杂薄膜随MoO3含量的增加其相变温度明显下降,但其电阻突变量级和光透过率的突变量亦随之降低,其中,电阻突变量级的下降趋势更显著,不过只要MoO3掺杂量不高于5;时,掺杂薄膜的电阻突变仍可保持2个量级以上,而且红外光透过率的突变量仍保持较高.分析认为,薄膜中掺入的MoO3与VO2可以互溶,从而可作为施主组元降低VO2能带结构中的禁带宽度,改变其光电特性.     

硅太阳电池用MgF2/ZnS双层减反射薄膜的制备及表征

采用真空热蒸发技术,制备出了性能优良的MgF2/ZnS双层减反射薄膜.采用扫描电子显微镜、X射线衍射仪对薄膜的形貌以及结晶形态进行分析,采用椭圆偏振仪测试薄膜的折射系数及厚度,利用反射谱对双层减反射薄膜的减反射性能进行了表征.研究表明:衬底温度为200 ℃时薄膜附着力、结晶态良好;蒸发速率影响薄膜的表面形态;MgF2/ZnS厚度为110 nm/35 nm时具有最佳减反射效果.     

掺杂VO2薄膜的相变机理和研究进展

掺杂VO2薄膜是一种具有相变特性的功能材料,具有广阔的应用前景.本文综述了掺杂VO2薄膜的相变机理、制备方法和应用前景,并指出掺杂VO2薄膜的发展趋势,以期更好地探讨掺杂VO2薄膜的应用研究.     

CdSe纳米晶薄膜的光敏特性研究

硒化镉(CdSe)是一种光电性能优异的II-VI族化合物半导体.采用真空热蒸发技术在Si(100)衬底上制备出高质量的CdSe纳米晶薄膜,并利用X射线衍射仪(XRD)、Raman光谱仪、膜厚测试仪、扫描电镜(SEM)和数字源表对其结晶性能、晶体结构、表面形貌及光敏特性进行了表征.结果显示,CdSe纳米晶薄膜呈六方纤锌矿结构,纯度较高,结晶性能较好,沿c轴择优生长的优势明显;同时,薄膜具有典型的光敏电阻特性,且电阻值受光照强度、退火温度影响明显.     

真空退火和氢退火对ZnO∶B薄膜电学和光学性能的影响

在玻璃衬底上采用低压化学气相沉积法制备了B掺杂的ZnO薄膜,研究了真空气氛和氢气气氛下不同退火温度对ZnO∶B(BZO)薄膜电学性能和光学性能的影响。结果表明,两种不同退火气氛下进行退火处理,BZO薄膜性能发生相反的变化:真空气氛下退火时,BZO薄膜的导电能力随退火温度的提高而下降,但长波区的透光率却随之增加,这主要是由于真空退火后载流子浓度降低所致;而在氢气气氛下退火后,BZO薄膜载流子浓度基本保持不变,但Hall迁移率却显著提高,从而在保证透光率基本不变的前提下,使得BZO薄膜的导电能力得到显著提高,这可以为BZO薄膜光学和电学综合性能的协同优化提供一种有效方法。     

衬底温度对In2S3薄膜结构及其性能的影响

采用超声喷雾热解法,在玻璃基底上一步合成了In2S3薄膜.研究了衬底温度对In2S3薄膜的结构、表面形貌、电学和光学性能影响.结果表明:所制备的In2S3薄膜均具有沿(220)面择优取向生长特性且无其他杂相,衬底温度对薄膜的均匀性、致密度、结晶程度均有明显影响,并因此影响薄膜的光电性能.薄膜的导电件随着衬底温度的升高迅速增强,但足在衬底温度为350℃时有所降低.衬底温度为300℃所制备的薄膜在可见光区透光率最高达到90;以上,禁带宽度达到2.43 eV.     

管式PECVD氮化硅薄膜不同退火环境的工艺研究

研究了在真空与氮气两种环境中不同的退火温度和退火时间对氮化膜薄膜性能影响,测试了退火后氮化硅薄膜的膜厚、折射率、少子寿命以及电性能参数.结果表明,多晶硅管式PECVD真空退火环境优于氮气,并确定当退火温度在450 ℃、退火时间20 min时,工艺参数最佳.当温度过高过低均不利于膜厚的增加也不利于形成良好的欧姆接触,且此时光电转换效率较差.折射率的变化却不同,其最大值是在低温下达到的,此时氮气环境更有利于高折射率的获得.此外,还就膜厚和折射率随温度、环境变化的情况进行了详细的讨论.     

Effect of annealing on the structural,electrical and optical properties of nanostructured TiO2 thin films

Nanostructured titanium dioxide thin films were prepared using reactive pulsed laser ablation technique. Effects of annealing on the structural, morphological, electrical and optical properties are discussed. The structural, electrical and optical properties of TiO₂ films are found to be sensitive to annealing temperature and are described with GIXRD, SEM, AFM, UV‐Visible spectroscopy and electrical studies. X‐ray diffraction studies showed that the as‐deposited films were amorphous and at first changed to anatase and then to rutile phase with increase of annealing temperature. Optical constants of these films were derived from the transmission spectra and the refractive index dispersion of the films, subjected to annealing at different temperatures, is discussed in terms of the single oscillator‐Wemple and Didomenico model. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Structural and electrical characterization of ALCVD ZrO2 thin films on silicon

We report on the structural and electrical properties of ZrO₂ thin layers grown on Si by atomic layer chemical vapour deposition. Atomic force microscopy, X-ray diffraction, X-ray reflectivity and time-of-flight secondary ion mass spectrometry have been used to characterize as-grown and annealed samples. High frequency capacitance-voltage measurements have been performed to determine the capacitance of the gate dielectric stack. The ZrO₂ film is found to be polycrystalline. Electrical and structural data suggest a coherent picture of film modification upon annealing.     

Isothermal and Isochronal Studies of the Structural and Electrical Properties of CdTe

Cadmium telluride (CdTe) thin films were grown by thermal evaporation technique. The influence of post‐growth heat treatment, isothermal and isochronal, on the structural and electrical properties of these films were carried out. Multi phases were obtained as a function of the period and the value of annealing temperature. In isothermal annealing, the sheet resistance was dropped by many orders while in isochronal annealing it was increased fairly. A correlation between the temperature and the annealing time and the structural characteristics of these films was established in both type of annealing. The grain size and the sheet resistance were found greatly affected by the type of annealing as well as the temperature and the annealing time.     

Effect of Thermal Annealing on Structural Properties,Morphologies and Electrical Properties of TiO2 Thin Films Grown by MOCVD

TiO₂ thin films, were deposited on Si(100) and Si(111) substrates by metalorganic chemical vapor deposition at 500 °C, and have been annealed for 2 min, 30 min and 10 hours at the temperature from 600 °C to 900 °C, in oxygen and air flow, respectively. XRD and atomic force microscopy characterized the structural properties and surface morphologies of the films. As‐deposited films show anatase polycrystalline structure with a surface morphology of regular rectangled grains with distinct boundaries. Rutile phase formed for films annealed above 600 °C, and pure rutile polycrystalline films with (110) orientation can be obtained after annealing under adequate conditions. Rutile annealed films exhibit a surface morphology of equiaxed grains without distinct boundaries. The effects of substrate orientation, annealing time and atmosphere on the structure and surface morphology of films have also been studied. Capacitance‐Voltage measurements have been performed for films deposited on Si(100) before and after annealing. The dielectric properties of TiO₂ films were greatly improved by thermal annealing above 600 °C in oxygen.     

Preparation and optical properties of AgGaS2 nanofilms

In this paper, AgGaS₂ nanofilms have been prepared by a two‐step process involving the successive ionic layer absorption and reaction (SILAR) and annealing method. Using AgNO₃, GaCl₃ and Na₂S₂O₃ as reaction sources, the mixture films were firstly deposited on quartz glass substrates at room temperature, and then annealed in Ar environment at 200–500 °C for 4 h, respectively. The effects of annealing temperature on structural and optical properties were investigated by XRD, UV‐Vis, EDS and photoluminescence (PL) spectra. It was revealed in XRD results that α‐Ag₉GaS₆ was contained in the samples annealed at 200 °C, and this phase was decreased with increase of the annealing temperatures. When the sample was annealed at above 400 °C, the chalcopyrite AgGaS₂ nanofilm was obtained. The preferred orientation was exhibited along the (112) plane. It was shown in atomic force microscopy (AFM) results that the grain sizes in AgGaS₂ nanofilms were 18‐24 nm and the thin films were smooth and strongly adherent to the substrates. When the annealing temperature was higher than 400 °C, it is an optimum condition to improve the structural and optical properties of the AgGaS₂ thin films. The room temperature PL spectra of AgGaS₂ nanofilms showed prominent band edge emission at 2.72 eV. Based on all results mentioned above, it can be concluded that the SILAR‐annealing method is preferable to preparing high‐quality AgGaS₂ nanofilms. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Ga<Subscript>2</Subscript>O<Subscript>3</Subscript>–In<Subscript>2</Subscript>O<Subscript>3</Subscript> thin films on sapphire substrates: Synthesis and ultraviolet photoconductivity

The structure and electrical and optical properties of β-Ga₂O₃–In₂O₃ thin films on sapphire substrates with different orientations have been investigated. The samples have been prepared by annealing of gallium–indium metallic films on sapphire substrates in air at different gallium-to-indium ratios in the initial mixture. The photoconductivity of these structures in the solar-blind ultraviolet spectral region has been examined.     

Effects of annealing on structural,electrical and optical properties of AgGa(Se0.5S0.5)2 thin films deposited by using sintered stoichometric powder

The structural, electrical and optical properties of AgGa(Se_0.5S_0.5 )₂ thin films deposited by using the thermal evaporation method have been investigated as a function of annealing in the temperature range of 450–600 °C. X‐ray diffraction (XRD) analysis showed that the structural transformation from amorphous to polycrystalline structure started at 450 ^oC with mixed binary phases of Ga₂Se₃, Ga₂S₃, ternary phase of AgGaS₂ and single phase of S. The compositional analysis with the energy dispersive X‐ray analysis (EDXA) revealed that the as‐grown film has different elemental composition with the percentage values of Ag, Ga, Se and S being 5.58, 27.76, 13.84 and 52.82 % than the evaporation source powder, and the detailed information about the stoichometry and the segregation mechanisms of the constituent elements in the structure have been obtained. The optical band gap values as a function of annealing temperature were calculated as 2.68, 2.85, 2.82, 2.83, and 2.81 eV for as‐grown, annealed at 450, 500, 550, and 600 °C samples, respectively. It was determined that these changes in the band gap are related with the structural changes with annealing. The temperature dependent conductivity measurements were carried out in the temperature range of 250‐430 K for all samples. The room temperature resistivity value of as‐grown film was found to be 0.7x10⁸ (Ω‐cm) and reduced to 0.9x10⁷ (Ω‐cm) following to the annealing. From the variation of electrical conductivity as a function of the ambient temperature, the activation energies at specific temperature intervals for each sample were evaluated. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

海胆状Eu2O3/Ag3VO4复合材料的水热合成及其光致发光性能

以硝酸银和氧化铕为金属源,P123为结构导向剂,乙醇和水为溶剂.本文通过前驱体合成路线,采用水热法得到海胆状Eu2 O3/Ag3 VO4微球,并探讨其合成条件;采用SEM、XRD、XPS等方法对样品进行了表征,并探讨了Eu2 O3/Ag3 VO4海胆状微纳米结构的形成过程.测试结果表明:在反应温度为80℃,反应时间为10 h时,所合成的海胆状Eu2 O3/Ag3 VO4微球直径约为4~5μm.针对合成的样品,研究了海胆状Eu2 O3/Ag3 VO4微球的光致发光性能,并考察Eu3+掺杂量对光致发光性能的影响,当Eu3+掺杂量为4;时,样品具有最好的光致发光性能.     

Optical characterization of thermally evaporated thin CdO films

Cadmium Oxide films have been prepared by vacuum evaporation method on a glass substrate at room temperature. Detailed structural, optical, and electrical properties of the films are presented at different annealing temperatures. The crystal structure of the samples was studied by X‐ ray diffraction. The spectral absorption coefficient of the CdO film at the fundamental absorption region (450‐650nm) was determined using the spectral data of transmittance. The direct and indirect band gap energies were determined and found to be 2.33 eV and 1.95 eV respectively. The third order optical nonlinearities χ(3) of CdO films has been measured used the z‐can technique. The real and imaginary parts of χ(3) have been measured at 514 nm and found to be 1.7x10^‐3 esu and 3.0x10^‐3 esu, respectively. (© 2003 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)