Structural and electrical characterization of ALCVD ZrO2 thin films on silicon |
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Authors: | S Ferrari DT DekadjeviS Spiga G TallaridaC Wiemer M Fanciulli |
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Institution: | Laboratorio MDM, Istituto Nazionale per la Fisica della Materia, Via Olivetti 2, 20041 Agrate Brianza (Mi), Italy |
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Abstract: | We report on the structural and electrical properties of ZrO2 thin layers grown on Si by atomic layer chemical vapour deposition. Atomic force microscopy, X-ray diffraction, X-ray reflectivity and time-of-flight secondary ion mass spectrometry have been used to characterize as-grown and annealed samples. High frequency capacitance-voltage measurements have been performed to determine the capacitance of the gate dielectric stack. The ZrO2 film is found to be polycrystalline. Electrical and structural data suggest a coherent picture of film modification upon annealing. |
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Keywords: | Z100 S440 E130 |
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