平栅型双层膜的场致发射性能研究

通过在平栅型基板上,分别溅射氧化铋薄膜和氧化锡薄膜,形成阴极场发射阵列,并在阴极和栅极之间加载脉冲电流,使阴栅级之间的薄膜形成裂缝,并进行场致发射性能测试,测试结果表明,平栅型双层膜发射器件的开启电压随阳极电压增加而降低.在阳压为3000 V,隔离子高度为500 μm时,平栅型双层膜场发射器件的开启电压为110 V,在栅压为110 V时的发射效率为1;左右,随着栅压的增大,发射效率逐渐减小.该双层膜阴极具有均匀的发射性能、良好的栅控能力以及场发射特性.     

硝酸银辅助的氧化锌纳米线的气相法制备

以硝酸银作为催化剂前驱物,通过低成本的CVD法,成功合成了氧化锌纳米线.利用场发射扫描电镜(FE-SEM)、X射线衍射仪(XRD)、高性能X射线能谱仪(EDS)、荧光光谱仪等研究了氧化锌纳米线的形貌、相结构、化学成份和光致发光特性.研究结果表明:所获得的氧化锌纳米线具有六方纤锌矿结构;平均直径为50nm,长度在3～5μm之间;室温下,氧化锌纳米线除了有明显的紫外发射外,在421nm附近还有紫光发射.整个氧化锌纳米线的生长由气-液-固机制所控制.     

过渡层对纳米非晶碳薄膜场发射性能的影响

采用微波等离子体化学气相沉积法在经研磨处理后的Si(111)面上制备出了纳米非晶碳薄膜.为改善薄膜的场发射性能,在研磨好的Si基底上运用直流磁控溅射法沉积了一层金属过渡层.本文分别选择三种常见金属:钛(Ti)、鉬(Mo)、镍(Ni)来作对比试验.结果发现用钛作为过渡层时薄膜场发射效果最好,主要表现为开启电场低,同一电场下发射电流大,发射点密度较大且分布均匀等.利用迭代法计算了钛作为过渡层时制备的纳米非晶碳薄膜的有效发射面积和功函数.     

种子层诱导溶胶-凝胶法Li,Mg掺杂ZnO薄膜的结构及光电性能研究

本文以ZnO为种子层采用溶胶-凝胶法制备了Li、Mg掺杂的氧化锌薄膜.利用XRD、SEM、PL等手段对薄膜的结构、表面形貌和发光性能进行了表征,研究了不同掺杂情况、种子层、旋涂次数对Li、Mg掺杂的ZnO薄膜性能的影响.结果表明预铺种子层、旋涂8次、在580℃下退火的条件下制得的薄膜性能最好,通过Li、Mg共掺杂使得ZnO薄膜的光致发光性能增强近5倍,近带边发射峰发生蓝移,禁带宽度变大.     

阵列式碳纳米管微波受激发射光子

采用化学气相沉积工艺(CVD)制备阵列式碳纳米管(ACNT)薄膜并检测薄膜的微波性能.当ACNT薄膜受到微波照射时,强烈地发射光子,产生耀眼的的白光,红外测温仪显示温度高达1200℃,但ACNT并不氧化燃烧.ACNT薄膜经球磨成粉状后,光子发射性能消失,在微波照射下 ACNT粉末和普通碳纳米管(MWCNT)表现相近,吸收微波能量后开始燃烧并发出红色的火焰,实测温度为720℃.研究显示ACNT具有优异的场发射性能.     

旋涂法制备纳米ZnO阴极涂层及场发射性能

采用水热法制备了烟花状的纳米氧化锌,用X射线衍射仪和扫描电子显微镜对样品的结构和形貌进行了表征与分析.然后通过旋涂技术将掺入不同质量的氧化锌沉积到镍衬底上,经过热处理后进行了形貌表征和场发射特性的测试.结果表明:制备的样品是六方纤锌矿结构的花状纳米晶,镍基片上沉积的纳米ZnO涂层具有突出的发射体尖端且分布较均匀;在一定范围内,电流密度随掺杂氧化锌粉末的增多而增大,开启场强逐渐下降.原因是随着ZnO的增加,有效地增强了涂层的电子输运能力,增加了有效发射体数目进而提高了场增强因子.最后,分析了涂层的场发射机制.     

钛铝共掺杂氧化锌和钛掺杂氧化锌透明导电薄膜的制备与性能对比研究

利用直流磁控溅射法,在相同实验条件下成功沉积出了钛掺杂氧化锌(TZO)透明导电薄膜和钛铝共掺杂氧化锌(TAZO)透明导电薄膜,并对两种薄膜的结构、应力和光电性能进行了对比研究.结果表明:两种薄膜均为具有c轴择优取向的六角纤锌矿结构多晶薄膜;TAZO薄膜的导电性能优于TZO薄膜,100 W溅射功率下制备的TZO薄膜的电阻率具有其最小值5.17×10-4 Ω·cm,而相同功率下TAZO薄膜的电阻率为3.88×10-4 Ω·cm;同时TAZO薄膜的光学性能也优于TZO薄膜,所有TAZO薄膜样品的可见光透过率均大于91;,而TZO薄膜的可见光透过率均大于85;.     

纳米非晶碳薄膜的制备及其场致电子发射特性

采用微波等离子体增强化学气相沉积(MPECVD)法,在涂有FeCl3的硅衬底上制备出了纳米非晶碳薄膜.通 过SEM、XRD和拉曼光谱分析了薄膜材料的形貌和结构.并研究了薄膜材料的场发射特性.结果表明:薄膜的开启电场仅为0.39 V/μm;当电场强度为1.85 V/μm时,电流密度高达3.06 mA/cm2;且场发射点均匀、密集、稳定.迭代法计算表明薄膜材料的功函数为3.1 eV,发射点密度约为1.7×105个/cm2.这些均表明该薄膜是一种性能优良的场发射阴极材料.     

衬底温度对氧化锌薄膜微结构及光学性能的影响

衬底温度是磁控溅射法制备氧化锌薄膜中一个非常重要的工艺指标,探索衬底温度对氧化锌薄膜微结构及光学性能的影响对制备环保型高质量氧化锌紫外屏蔽材料具有重要意义。以质量分数99.99%的氧化锌陶瓷靶为溅射源,利用射频磁控溅射技术在石英衬底上沉积了氧化锌紫外屏蔽薄膜,通过X射线衍射仪、薄膜测厚仪、紫外-可见分光光度计、荧光分光光度计进行测试和表征,研究了不同衬底温度对ZnO薄膜微结构及光学性能的影响。实验结果表明:制备所得薄膜均为六角纤锌矿结构,具有沿(002)晶面择优取向生长的特点,其晶格常数、晶粒尺寸、透过率、光学能隙、可见荧光、结晶质量等都与衬底温度密切相关,当衬底温度为250 ℃,溅射功率160 W,氩气压强0.5 Pa,氩气流速8.3 mL/min,沉积时间60 min时,所得氧化锌薄膜样品取向性最好,晶粒尺寸最大,薄膜结构致密,具有良好的光学性能和结晶质量。     

ZnO/PbS量子点异质结太阳能电池结构调控研究

利用氧化锌溶胶-凝胶(Sol-Gel)、锌盐乙醇溶液(ES)和氧化锌纳米粒子溶液(NP)三种不同的籽晶层前驱液,在ITO衬底上通过化学浴沉积方法(CBD)制备出了一维氧化锌纳米棒阵列薄膜,并在所制备的氧化锌纳米棒阵列薄膜上构筑了具有“三维”异质结结构的PbS量子点太阳能电池.通过扫描电镜(SEM)、X射线衍射(XRD)和透射光谱分析等研究了籽晶层对氧化锌纳米棒阵列薄膜形貌、结构和光学性质的影响;结合电池性能测试结果,比较分析了“三维”异质结结构和“平面”异质结结构对电池性能的影响.结果表明:在ES籽晶层上生长的氧化锌纳米棒阵列薄膜的取向性最好,Sol-Gel次之,NP最差;在ES和Sol-Gel籽晶层上生长2h的样品透射率在80;左右;与“平面”异质结结构PbS量子点电池相比,基于氧化锌纳米棒阵列薄膜制备的“三维”异质结结构电池的短路电流可提高40;,表明“三维”异质结结构有利于载流子的分离和输运.     

The effect of ZnO buffer layer on structural and optical properties of ZnO nanorods

A low‐temperature synthetic route was used to prepare oriented arrays of ZnO nanorods on ITO conducting glass substrate coated with buffer layer of ZnO seeds in an aqueous solution. The corresponding growth behavior and optical properties of ZnO nanorod arrays were studied. It was found that the nature of the buffer layer had effect on the microstructures and optical properties of the resultant ZnO nanorod arrays. X‐ray diffraction (XRD) results showed the nanorods were preferentially grown along (002) direction, but the diameter of the nanorods prepared with the buffer layer was much smaller than the without one, which can be clearly seen from the scanning electron microscopy (SEM) results. And it also found that the buffer layer was not only enhanced the density of overall coverage but also beneficial to grown the oriented arrays. Photoluminescence spectroscopy (PL) results indicated that the all the samples had the better optical behaviors. By computation, the relative PL intensity ratio of ultraviolet emission (I_UV) to deep level emission (I_DLE) of ZnO nanorods grown with the pure substrate was much higher than that of the sample with the buffer layer. The defects on the surface increased with the size reduction of nanorods caused by the buffer layer may be the main reason for it. And the small shift in the UV emission was caused by the rapid reduction in crystal size and compressive stress from Raman spectra results. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Analysis of the growth of RF sputtered ZnO thin films using the optical reflective second harmonic generation

Reflective second harmonic generation (RSHG) is used to analyze the growth condition of poly crystal zinc oxide (ZnO) film with a c-axis orientation, grown on the Si substrate by RF magnetron sputtering technique. It elucidates physical phenomena exhibited by growing ZnO thin films. Connecting with analytical results of the characteristic parameters derived from the X-ray patterns and SEM images, the relationship between the RSHG intensity and the substrate temperature reveals that the effect of the grain boundaries is the domination of the RSHG mechanism. The inclined structures of ZnO films on the Si substrate are explained with reference to these RSHG patterns.     

Effect of growth temperature on the structure and optical properties of ZnO nanorod arrays grown on ITO substrate

ZnO nanorod arrays have been successfully prepared on ITO substrate by a chemical‐bath deposition method at different growth temperatures. The influence of the growth temperature on the morphology and microstructure of the ZnO nanorods was investigated by scanning electron microscopy (SEM) and X‐ray diffraction (XRD). The results showed that the diameter of the ZnO nanorods decreased and the size of the nanocrystals increased with increasing growth temperature. Optical absorption measurements showed the absorption band edge has shifted to a lower‐energy region due to the quantum size effect. Green emission and UV emission bands were observed and they are found to be temperature dependent, which indicates that the deep‐level emission and band‐edge emission of ZnO nanorods is closely related to the rod diameter, and the related mechanism is discussed.     

Effect of oxygen partial pressure on the growth of zinc micro and nanostructures

Zinc micro and nanostructures were synthesized in vacuum by condensing evaporated zinc on Si substrate at different gas pressures. The morphology of the grown Zn structures was found to be dependent on the oxygen partial pressure. Depending on oxygen partial pressure it varied from two-dimensional microdisks to one-dimensional nanowire. The morphology and structural properties of the grown micro and nanostructures were studied by scanning electron microscopy (SEM) and X-ray diffraction (XRD). Transmission electron microscopy (TEM) studies on the grown Zn nanowires have shown that they exhibit core/shell-like structures, where a thin ZnO layer forms the shell. A possible growth mechanism behind the formation of different micro and nanostructures has been proposed. In addition, we have synthesized ZnO nanocanal-like structures by annealing Zn nanowires in vacuum at 350 °C for 30 min.     

Growth and luminescence properties of large‐scale zinc oxide nanotetrapods

Large‐scale zinc oxide (ZnO) nanotetrapods have been grown on p‐type Si (111) substrate by oxidizing zinc pieces in air by thermal evaporation technique without the presence of any catalyst. The size and morphology of the nanostructures was found to depend on experimental parameters. The grown nanostructures were characterized by X‐ray Diffraction (XRD), Photoluminescence (PL), Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), High Resolution TEM (HRTEM) and analysis of elemental composition was done by Energy Dispersive X‐ray analysis (EDX). The EDX spectrum shows that the grown product contains Zn and O only. The X‐ray diffraction pattern indicates that the microstructure of the obtained products is typical hexagonal wurtzite ZnO. The optical properties were studied using room temperature PL spectroscopy which indicates that the products are of high optical quality and the near band edge UV transition peak intensity increases with decrease in tetrapod size. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

HREM investigations of intermediate ZnO and ZnO/Y–ZrO2 layers in Y–ZrO2 bicrystals and ZnO films grown on Y–ZrO2 bicrystal substrates

The structure of yttrium-stabilized ZrO₂ (YSZ) bicrystals with ZnO and ZnO/YSZ/ZnO/YSZ/ZnO intermediate layers, as well as ZnO films grown on YSZ bicrystal (1 1 0)/90° substrates, has been investigated by means of high-resolution electron microscopy (HREM) and microanalysis. All bicrystals were produced by the solid-phase intergrowth (SPI) method. The internal ZnO film in the bicrystal formed at the SPI temperature of 1400°C consisted of domains with two symmetrical orientations: , and , . A bicrystal with a ZnO/YSZ/ZnO/YSZ/ZnO internal film was formed at the temperature of 1200°C. There was no mixing of ZnO and YSZ films and no traces of any solid-phase reactions were observed. Grains in all internal ZnO films and ZnO films grown on the bicrystal substrates had numerous stacking faults. It was found that SPI does not influence the density and structure of these defects. Orientational relationships between YSZ and ZnO in all samples were determined. The ZnO films grown on (1 1 0)/90° bicrystal substrates inherited the grain boundary (GB) from the substrate. Its structure and geometry is determined by four variants of ZnO grain growth.     

基底加热温度对ITO薄膜的性能影响研究

氧化铟锡(ITO)薄膜被广泛用作光电器件中的透明导电电极,其透光率、导电性、表面粗糙度、与基底的功函数匹配及其电流传输特性都会对光电器件的性能造成影响。本文采用射频(RF)磁控溅射方法制备ITO薄膜,系统研究了基底加热温度对其各方面性能的影响,并确认了最佳基底温度。实验采用锡掺氧化铟陶瓷为靶材,组分摩尔比为m(In₂O₃)∶m(SnO₂)=90∶10。采用XRD、SEM对所制备的薄膜进行表征,系统分析不同基底温度对ITO薄膜结晶性能、形貌的影响;采用紫外可见分光光度计、霍尔效应测试仪、紫外光电子谱仪(UPS)、电流电压曲线系统研究了基底温度对薄膜光电特性、载流子浓度、薄膜功函数以及电流传输特性的影响。研究结果表明,基底温度200 ℃为最佳,此时ITO薄膜结晶良好、表面平整、可见光波段平均透过率超过80%,导电性能和电流传输特性均较佳,且薄膜组分与靶材组分一致。     

硅基AAO模板内电化学沉积ZnO纳米线及其光电性能研究

本文利用二次阳极氧化法在p型低阻〈100〉晶向的硅衬底上制备了AAO/Si,以硅基AAO为辅助模板,采用电化学沉积的方法以Zn(NO3).6H2O和HMT(C6H12N4)为原料,在80℃的水浴槽中制备了ZnO纳米线结构。采用SEM,XRD和拉曼光谱等手段对ZnO/AAO/Si复合结构进行表征。SEM图表明ZnO纳米线已成功组装到AAO/Si模板里,直径约45 nm,长度约为600 nm。XRD和拉曼光谱表明ZnO具有六角纤锌矿多晶结构。光致发光(PL)谱图表明ZnO/AAO/Si复合结构在565 nm附近有较宽黄绿发射峰,在395 nm附近有微弱的紫外发射峰。场发射测试结果表明,ZnO纳米线的场增强因子的β值为2490,场增强因子很高,具有广泛的应用前景。     

衬底温度对磁控溅射法制备掺Ta氧化锌薄膜性能的影响

采用射频磁控溅射法,在不同的衬底温度下制备了钽(Ta)掺杂的氧化锌(ZnO)薄膜,采用X射线能谱(EDS)、X射线衍射(XRD)、扫描电镜(SEM)、紫外-可见分光光度计和光致发光(PL)光谱研究了衬底温度对制备的Ta掺杂ZnO薄膜的组分、微观结构、形貌和光学特性的影响.EDS的检测结果表明,Ta元素成功掺入到了ZnO薄膜;XRD图谱表明,掺入的Ta杂质是替代式杂质,没有破坏ZnO的六方晶格结构,随着衬底温度的升高,(002)衍射峰的强度先增大后降低,在400℃时达到最大;SEM测试表明当衬底温度较高时(400℃和500℃),Ta掺杂ZnO薄膜的晶粒明显变大;紫外-可见透过光谱显示,在可见光范围,Ta掺杂ZnO薄膜的平均透光率均高于80;,衬底不加热时制备的Ta掺杂ZnO的透光率最高;制备的Ta掺杂ZnO薄膜的禁带宽度范围为3.34~3.37eV,衬底温度为500℃时制备的Ta掺杂ZnO薄膜的禁带宽度最小,为3.34eV.PL光谱表明衬底温度为500℃时制备的Ta掺杂ZnO薄膜中缺陷较多,这也是造成薄膜禁带宽度变小的原因.     

微管ZnO可控生长的研究

本文采用水热法在玻璃基片上生长出了微米级六棱管状ZnO.采用X射线衍射(XRD)、扫描电子显微镜(SEM)对所制备的样品进行物相结构及表面形貌的分析.结果显示所制备的样品为六角晶系纤锌矿结构的ZnO.通过在基片上预先生长不同尺度中空ZnO球的方法能够成功的生长出不同尺寸微米管状ZnO,初步实现了水热合成微米管状ZnO的可控生长.